EFEM
The 300mm wafers are taken out from the FOUP cassette and sorted. The sorting patterns can be set arbitrarily, allowing for sorting that meets customer specifications. In addition to sorting, it can also be used as a loader/unloader for the equipment. By equipping a horizontal multi-axis robot (GCR4210-500-AM), it can access four cassettes without a travel axis. The adoption of a Z-axis stroke of 500mm allows for the placement of cassettes in two vertical tiers. By equipping the robot with an inversion axis, it can transport wafers without contacting the processing surface, even in the case of bottom-side processing. A mapping sensor is installed in the wrist block to detect wafers inside the cassette. The opening and closing doors are equipped with open/close detection sensors, and they are locked during robot operation for safety considerations. A glass (transparent work) compatible aligner is included (SAL3361GR). The integration with the customer's equipment can be modified as needed (HOST communication will be handled separately). Customization according to customer specifications is possible.
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basic information
Transported Item: 150mm Glass Wafer Processing Rate: 140 wafers/h (does not include processing time on the equipment side) Operating Range: Workpiece Center Distance: 672mm, Swing Angle (θ-axis): 335 degrees, Vertical Stroke (Z-axis): 500mm, Inversion Axis: 180 degrees Transport Speed (Average Speed): Arm: 550mm/sec, Swing Angle (θ-axis): 300 degrees/sec, Vertical Stroke (Z-axis): 300mm/sec Transport Speed (Maximum Speed): Arm: 900mm/sec, Swing Angle (θ-axis): 400 degrees/sec, Vertical Stroke (Z-axis): 450mm/sec No Inversion Unit During Suction Transport: Arm: 1800mm/sec, Swing Angle (θ-axis): 540 degrees/sec, Vertical Stroke (Z-axis): 500mm/sec Repeatability: Within ±0.1mm <System> Work Holding Method: Holding by suction Cleanliness: ISO Class 2 (ISO 14644) Footprint: 640mm x 835mm (excluding touch panel) Weight: Approximately 350kg Utility: Power: Single-phase AC 200V 15A, Vacuum: -53kPa or more (when suction chuck is installed)
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."