[Adopted by domestic semiconductor manufacturers] An ultrasonic motor used in semiconductor manufacturing that combines high-speed movement and precise positioning in a vacuum.
Nanomotion's ultrasonic motors come in various sizes and are suitable for environments ranging from atmospheric pressure to ultra-high vacuum. We have built motion platforms for a wide range of applications, from various micro-stages in the semiconductor industry to 300mm wafer inspection stages.
The features of Nanomotion's ultrasonic motors include backlash-free direct drive, allowing the stage to be held even without power. The motor alone can provide a driving force of up to 32N, but in situations where more torque is needed, multiple ultrasonic motors can be installed to increase the driving force. They can also be used in high vacuum environments, and a non-magnetic model is available for ion beam applications.
■ SE Motor (Latest Model)
Speed range of 1μm to 500mm/sec, sub-nanometer step resolution, maximum driving force of 32N. This ultrasonic motor was developed with Nanomotion's involvement in a development consortium for 7nm processes and has garnered attention from domestic manufacturers.
■ HR Motor (Standard Model)
Speed range of 1μm to 250mm/sec, 1nm step resolution, maximum driving force of 32N. This ultrasonic motor is widely used by domestic manufacturers.
