Power supply for film formation (sputtering)
Low failure rate and high reliability! An arc suppressor is available as an option.
We would like to introduce the "Film Formation (Sputtering) Power Supply" that we handle. The unit's output ranges from 1.5kW to 20kW, and it can support up to 300kW through master-slave operation. Additionally, it features high-speed interruption during arcing and low arc energy, with an optional arc suppressor available. Suitable for use in sputtering equipment and semiconductor manufacturing equipment. 【Features】 ■ DC sputtering and semiconductor film deposition power supply ■ High reliability and ease of support through domestic design and manufacturing ■ Selection of products with appropriate output capacity for specific applications ■ High reliability (low failure rate) ■ Optional arc suppressor available ■ High-speed interruption during arcing (interruption within 1us) ■ Low arc energy (less than 1mJ/kW) *For more details, please download the PDF or feel free to contact us.
- Company:オリジン
- Price:Other