Evolving high performance and high reliability! A DC power supply that adopts a multi-stage inverter method and achieves extremely low arc energy.
"GEXUS" is a DC power supply for sputtering that adopts a multi-stage inverter system, achieving extremely low arc energy. It offers a wide range of outputs from 1.5kW to 20kW. By operating multiple units in tandem, it is possible to achieve a maximum output of 240kW. Additionally, there is a 3kW DC power supply for sputtering, "GEXUS-H3A," which realizes low output starting from 30W. It can be used for various film deposition applications including semiconductors, power devices, and SiC. 【Features】 ■ High reliability, low failure rate ■ High-speed arc extinguishing device available as an option ■ High-speed interruption during arcing (interruption within 1us) ■ Low arc energy (less than 1mJ/kW) *For more details, please download the PDF or feel free to contact us.
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basic information
【Features of GEXUS DC Power Supply for Spattering】 ■GEXUS-1.5: Output 1.5kW, ultra-thin design (1U: 43.5mm) ■GEXUS-H3A: Output 3kW, supports low output from 30W. Local operation via the operation panel is possible. ■GEXUS-15: Output 15kW. Also available in 6kW and 10kW types. Local operation control option available. Options compliant with standards such as NRTL and CE are available. ■GEXUS-20: Output 20kW, supports high output through tandem operation (Max 240kW). ■GEXUS-ARC: High-speed arc extinguishing device. Achieves a height of 1U (43.5mm). Available lineup that allows 2-channel connection in the same shape. Can be easily installed by simply connecting in parallel to the output of our DC power supply. *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Semiconductor film deposition ■ Sputtering Semiconductor, power devices, SiC, and various other film depositions ■ Bias * For more details, please download the PDF or feel free to contact us.
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Company information
Our company manufactures and sells power supply equipment, semiconductor devices, precision mechanical components, system equipment, and synthetic resin coatings. Leveraging our strengths through a five-business structure consisting of precision mechanical components, coatings, power supply devices, bonding/coating equipment, and power semiconductors, we engage in "proposal-based product development" that values communication with our customers. Additionally, through consulting and dialogue during the development process, we not only meet the functions requested by our customers but also provide new satisfaction with added value.
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