Plasma Continuous Monitoring System "FS1000"
Visualization and prediction of plasma abnormal discharge.
EM Predix Co., Ltd. has proposed measurement and countermeasure technologies for plasma damage and electrostatic discharge across various industries over the past 14 years (and has accumulated relevant experience prior to that). This document introduces the Plasma Continuous Monitoring System FS1000, which detects electromagnetic waves emitted from abnormal discharges occurring within the plasma chamber that are completed in nanoseconds (ns). 【Features】 - Detects discharges at all positions within the chamber - Detects transient electromagnetic waves emitted by discharges - Detects, predicts, and controls abnormal discharges For more details, please contact us or download the catalog.
- 企業:東京電子交易
- 価格:Other