Air Bearing A-311 for Semiconductor Inspection
Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.
In the semiconductor industry, high-precision inspection is essential for quality control of wafers and improving yield. In particular, the detection of fine defects and foreign substances is a crucial factor that affects product reliability. Traditional inspection methods have limitations in inspection speed and resolution, which can lead to increased takt time and decreased inspection accuracy. The PIglide IS A-311 achieves high-speed and high-precision wafer inspection through a combination of air bearings and linear motors, addressing these challenges. 【Application Scenarios】 - Inspection of foreign substances on wafer surfaces - Measurement of pattern dimensions - Defect detection 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield
- Company:PI Japan
- Price:Other