Technical Information Magazine 202001-01 in-situ STEM
The technical information magazine The TRC News provides the latest information on analytical techniques that are useful for research and development, solving production troubles, and quality control.
**Abstract** In recent years, there has been a growing demand for high-sensitivity and low-power consumption devices, leading to increased attention on magnetic memory and magnetic sensors in the field of spintronics. These devices widely utilize the MTJ (magnetic tunnel junction) structure due to its ability to achieve high magnetoresistance effects. The MTJ structure consists of thin layered films on the order of a few nanometers, where the film thickness, roughness, and crystallinity at the atomic level significantly influence the properties. Additionally, since the magnetic characteristics change with annealing temperature, this paper presents a case study using in-situ TEM to analyze the changes in crystallinity and elemental distribution during heating at the nanometer level. **Table of Contents** 1. Introduction 2. Samples and Evaluation Methods 3-1. Changes in Crystallinity 3-2. Analysis of Crystal Orientation 3-3. Analysis of In-Plane Crystal Orientation 4. Conclusion 5. Acknowledgments 6. Closing Remarks
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