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stage×シグマ光機 - List of Manufacturers, Suppliers, Companies and Products

stage Product List

31～33 item / All 33 items

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10nm Feedback Stage FS-3200X/XY

10nm Feedback Stage FS-3200X/XY

"Precision positioning device" with high resolution, excellent positioning repeatability, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controller FC-514.

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Vacuum-compatible 10nm feedback stage, lifting type

Vacuum-compatible 10nm feedback stage, lifting type

Vacuum-compatible positioning stage for the Z-axis with a built-in linear encoder and 10nm resolution.

This is a high-resolution Z-axis positioning stage equipped with an optical linear encoder. It offers a resolution of 10nm with stroke options of 5mm or 10mm. It has been designed to mitigate outgassing, making it usable in a vacuum. The structure minimizes changes in the tilt of the table surface, and with our proprietary linear encoder and unique feedback control circuit, it provides high resolution, excellent positioning repeatability, and position retention after positioning.

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Vacuum-compatible 10nm feedback stage, micro-rotation type

Vacuum-compatible 10nm feedback stage, micro-rotation type

Micro-rotation stage with an encoder that operates with a minimum resolution of 0.00001° and ±4° in vacuum conditions.

This is a high-resolution micro-rotation stage equipped with an optical linear encoder. It has a resolution of 0.00001° and a stroke of ±4°. It has been treated for outgassing and can be used in a vacuum. It is suitable for adjusting the rotation direction.

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