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stage×シグマ光機 - List of Manufacturers, Suppliers, Companies and Products

stage Product List

1～15 item / All 35 items

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Submicron Feedback Stage FS-3150X/XY

Submicron Feedback Stage FS-3150X/XY

A positioning stage with a built-in long-stroke encoder, featuring high resolution, high position reproducibility, and high position retention.

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It features a self-developed linear encoder and a proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. The stroke is '150mm' with a resolution of either '50nm' or '100nm' (*1). Due to the long stroke, it can perform both sample movement and precise positioning with just this one unit. (*1) In combination with the feedback stage controller FC-411 or FC-111.

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Long Scale Stage FS-3000/2000 Series

Long Scale Stage FS-3000/2000 Series

"Precision positioning device" - A stage with long stroke, high resolution, excellent positioning repeatability, and position holding capability after positioning!

This is a high-resolution long-stroke positioning stage equipped with an optical linear scale, which reduces detection errors. It has a stroke of "200mm," "300mm," or "400mm" with a resolution of "50nm" (*1) or "100nm" (*2). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) Combination with feedback stage controller FC-401 (*2) Combination with feedback stage controller FC-101

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5nm Feedback Stage FS-1020SPX/XY

5nm Feedback Stage FS-1020SPX/XY

Built-in encoder: A positioning stage with high resolution, positioning reproducibility, and position holding capability of 5nm resolution!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It has a resolution of "5nm" (*1) and a stroke of "20mm." Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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10nm Feedback Stage FS-1020PX/XY

10nm Feedback Stage FS-1020PX/XY

A positioning stage with excellent position resolution, reproducibility, and retention due to feedback control with 10nm resolution.

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It performs feedback control based on the encoder's position information, offering high resolution, high positional reproducibility, and high positional stability. When used in combination with the feedback stage controller FC-511, it operates with a resolution of 10nm over a stroke of 20mm.

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10nm Feedback Stage FS-1040PX/XY

10nm Feedback Stage FS-1040PX/XY

[Stroke 40mm] A positioning stage with high resolution of 10nm, excellent positioning repeatability, and high position holding capability!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-511, it can operate with a reading resolution of '10nm' over a '40mm' stroke.

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10nm Feedback Stage FS-1050PX/XY

10nm Feedback Stage FS-1050PX/XY

"Precision positioning device" with high resolution of 10nm, high positioning repeatability, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

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Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Stage with built-in linear encoder that can be used in a vacuum with 1nm resolution.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. The operating range is 40mm, allowing positioning and movement with a single unit. It incorporates a self-developed linear scale, resulting in a slim and lightweight design, and offers high-precision repeat positioning performance through full closed-loop control, featuring characteristics comparable to those for atmospheric use.

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Slim-type 100nm resolution stage (50mm)

Slim-type 100nm resolution stage (50mm)

Built-in encoder! High-resolution positioning stage

It is equipped with an in-house developed optical linear scale encoder, allowing it to operate with a resolution of 100 nm or 50 nm when controlled by the controller. This is a custom example of a slim model in the direction of travel. Benefits of being slim: - Space-saving with a long stroke - Securing space on the reference plane - Miniaturization of inspection equipment

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  • Electron microscope

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1nm Feedback Stage FS-1020UPX / XY

1nm Feedback Stage FS-1020UPX / XY

"Precision positioning device" maintains high resolution of 1nm while increasing movement speed!

It is equipped with an optical linear encoder, allowing positioning with a resolution of '1nm' against the reading value of the built-in scale. The stroke is '20mm' long, enabling both transport and precise positioning with a single unit. It is used in research fields that handle wavelengths on the nanometer order.

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1nm Feedback Stage FS-1040UPX / XY

1nm Feedback Stage FS-1040UPX / XY

"Precision positioning device" maintains its high resolution of 1nm while achieving faster movement speed!

This is a precision positioning stage that incorporates an optical linear encoder, enabling closed-loop control with a resolution of '1nm' for the readings from the built-in scale. It has a long stroke of '40mm', allowing for both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

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1nm Feedback Stage FS-1050UPX / XY

1nm Feedback Stage FS-1050UPX / XY

"Precision positioning device" maintains its high resolution of 1nm while achieving faster movement speed!

This is a precision positioning stage that incorporates an optical linear encoder, allowing for closed-loop control with a resolution of '1nm' based on the reading values of the built-in scale. The stroke is '50mm', enabling both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

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1nm Feedback Stage FS-1050SPX(MD)/XY

1nm Feedback Stage FS-1050SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, which reduces detection errors. It has a stroke of 50mm with a resolution of 1nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1050SPX (MD) and the high-speed type is FS-1050UPX. (*1) In combination with the feedback stage controller FC-911.

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Submicron Feedback Stage FS-3200X/XY

Submicron Feedback Stage FS-3200X/XY

"Precision positioning device" with high resolution, high positioning repeatability, and excellent position holding capability after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controllers FC-414 or FC-114.

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Vacuum-compatible submicron feedback stage, lift type

Vacuum-compatible submicron feedback stage, lift type

Usable in a vacuum! Positioning stage for the Z-axis with built-in linear encoder and sub-micron resolution!

This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of either 50nm (*1) or 100nm (*2). It has been treated for outgassing and can be used in a vacuum. Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis configurations, and is equipped with a self-developed linear scale and proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111

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Vacuum-compatible submicron feedback stage, micro-rotation type

Vacuum-compatible submicron feedback stage, micro-rotation type

Usable in a vacuum! Stage for adjusting rotation direction

It is equipped with an optical linear encoder, allowing it to detect the position of the movable parts of the stage, which enables the controller to perform closed-loop control based on that position information, resulting in excellent position reproducibility. The resolution can be operated at "0.00005" or "0.0001" resolution, depending on the controller. It has been treated for outgassing, making it usable in a vacuum.

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