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stage Product List

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Small Nano Stage "nano-UP Series"

Palm-sized nano stage. With this small size and thinness, positioning on the nanometer order is possible.

The nano-UP series is a compact nano stage that achieves extremely high control resolution and repeatability by incorporating a high-precision feedback scale and piezo actuators. By rapidly switching between a stepping motor (for coarse movement) and piezo (for fine movement), it enables smooth positioning at the nano order. The lineup includes three types and four models: a single-axis stage, a theta stage, and an inclined stage, which can be freely combined according to your application needs. We also welcome inquiries regarding customization, so please feel free to consult with us.

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Small Nano Stage "nano-UP Series"

Perfect for aligning laser optical axes and lenses! With this small size and thinness, ultra-precise positioning on the nanometer order is possible! The combination of XYZΘ is also flexible!

The nano-UP series is a compact nano stage that achieves extremely high control resolution and repeatability by incorporating a high-precision feedback scale and piezo actuators. By rapidly switching between a stepping motor (for coarse motion) and piezo (for fine motion), it enables smooth positioning at the nano scale. The lineup includes three types and four models: a one-axis stage, a θ stage, and an inclined stage, which can be freely combined according to your application needs. We also welcome inquiries about customization, so please feel free to consult with us.

  • Other machine elements

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Ultra-precision stage

Precision stages optimal for semiconductor inspection equipment and semiconductor manufacturing equipment! Achieving straightness and positioning accuracy on the nanometer order!

◆The perfect stage for ultra-precise positioning! The stage is the heart of the equipment, governing its accuracy. At PMT, we manufacture ultra-precise stages that can be used in equipment such as wafer inspection systems and exposure systems, which require high positioning accuracy and repeatability.

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  • Other machine elements

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