We can accommodate short delivery times and small lots. Support from experienced technicians.
Features
- Short delivery time
- Capable of handling small lots
- Total solutions provided by experienced technicians
- Precision coating that pursues uniformity in application
- Rental of spin coaters is also available, allowing us to propose solutions tailored to your applications and environment.
Target substrates and workpieces
- Glass: 10mm□ to 200mm□; 400×500mm
- Wafers: Φ2 inches to Φ300mm
- Functional films: MAX 400×500mm
- Optical lenses, precision small parts, etc.
Coating materials and viscosity
- Various chemicals, resists, resin-based materials, etc.
- Viscosity: a few cp to 10,000 cp
- Film thickness: 1 to 100μm
Main applications and examples
- Universities, research and development institutions, National Institute of Advanced Industrial Science and Technology (AIST), material development, precision parts, optical components
- Pharmaceutical research applications, precision mold parts for automobiles, cosmetics, electronic devices, semiconductors, liquid crystals
Various equipment
- Clean booth (installed within a clean room)
- Slit coater
- Tabletop spin coater Φ500 series (compatible with inner cup method)
- Tabletop spin coater Φ300 series
- Hot plate
- Film thickness measurement device