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[Case Study] Chiller Implementation Case Collection - Semiconductor and Electronics Industry Edition / Apiste
For cooling of sputter etching equipment and laser oscillators!
This document is an application guide for the semiconductor, electronics, and electrical industries using our high-performance chiller, the "PCU-SL Series." It introduces various applications, including the cooling of sputtering and etching equipment, cooling of laser oscillators, and more, along with illustrations. Please make use of it. [Contents] ■ Cooling of vacuum deposition equipment ■ Cooling of sputtering and etching equipment ■ Temperature conditions for aging test equipment for semiconductor devices ■ Cooling of laser oscillators ■ Temperature control of chemical solution tanks *For more details, please refer to the PDF document or feel free to contact us.
- Company：アピステ
- Price：Other
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