Ultra-high purity gas pressure regulator "S-TORRV50/50SH Series"
A filter is built into the flow path of the single chamber! You can use it with confidence, especially with high-purity gases.
The "S-TORRV50/50SH series" is a pressure regulator developed based on the TORR regulator, which has gained immense trust in semiconductor process gas lines, specifically for ultra-high purity gases. For corrosive gases, we offer the "SH series," which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts in contact with the gas. We conduct a complete inspection, including He leak tests, on all units before shipment. This model is widely used in low-pressure piping and outlet panels that require higher flow rates than the "STV30," as well as in liquefied gas cylinder cabinets. 【Features】 ■ Medium flow model for low pressure on the primary side ■ Eliminates threaded structures in gas contact parts and comes standard with electropolishing ■ Achieves very high moisture replacement characteristics and particle reduction ■ The connection between the main body and fittings is welded, and the external seal of the diaphragm section employs a metal seal structure ■ High external sealing capability allows for safe use, especially with high-purity gases *For more details, please refer to the PDF document or feel free to contact us.
- Company：日酸TANAKA 産業機器事業部
- Price：Other
