Exhaust gas treatment and dust removal device - Wet scrubber Panacea
Efficiently removes toxic gases and powders (by-products) emitted from dry etching, CVD, and epitaxial growth processes using only water.
We have a wealth of delivery experience to major semiconductor and flat panel manufacturers! ■Feature 1: Suppression of carcinogenic substances It is possible to suppress carcinogenic substances emitted from combustion abatement systems. ■Feature 2: Cl2 abatement efficiency of over 99% using only water This achieves a dramatic reduction in water supply costs through the use of recycled water, as well as a significant reduction in the amount of NaOH used. ■Feature 3: Improved yield of production equipment It is possible to significantly reduce the downtime of production equipment by improving the maintenance cycle of combustion abatement systems. ■Feature 4: Extensive delivery experience to LCD factories We have delivery experience not only in Japan but also to LCD factories primarily in Taiwan and China.
- Company：東設 本社ヘッドオフィス
- Price：Other
