[Example] "Particle-PLUS" cylindrical magnetron sputter
Introduction of Particle-PLUS Analysis Case: "Plasma Sputtering of Cylindrical Magnetron Device" Simulation Case
This is an analysis case of magnetron sputtering using a cylindrical target, which is one method for forming a strong film on the inside of a long cylindrical pipe. By combining the axisymmetric model and mirror symmetry boundary conditions available in Particle-PLUS, it is possible to obtain results quickly without the need to simulate the entire device. ◇ Features of 'Particle-PLUS' - It excels in low-pressure plasma analysis. - By combining the axisymmetric model and mirror symmetry boundary conditions, it allows for rapid results without the need to simulate the entire device. - It specializes in plasma simulations for low-pressure gases, where calculations using fluid models are challenging. - It supports both 2D (two-dimensional) and 3D (three-dimensional) analyses, enabling efficient analysis of complex models. - Customization is possible as a strength of our in-house developed software. ◆ Various calculation results can be output ◆ - Potential distribution - Density distribution/temperature distribution/generation distribution of electrons and ions - Particle flux and energy flux to the wall - Energy spectrum of electrons and ions at the wall - Density distribution/temperature distribution/velocity distribution of neutral gas and more. *Please feel free to contact us for more details.
- Company:ウェーブフロント 本社
- Price:Other