Excimer UV irradiation device "SPC Series" <Flat Type>
Ideal for universities, research, and development! High-intensity excimer irradiation unit capable of bulk irradiation.
The "SPC Series" is a flat-type excimer UV irradiation device. It improves the illuminance distribution from the conventional ±15% to ±5%. It is an excimer irradiation unit capable of high illuminance bulk irradiation. It can be utilized for wafer cleaning, exposure light sources, coater pretreatment, resist modification, and more. 【Features】 ■ Illuminance monitor function ■ Feedback control ■ Vacuum compatibility ■ Improved illuminance distribution from the conventional ±15% to ±5% *For more details, please refer to the PDF document or feel free to contact us.
- Company:クォークテクノロジー
- Price:Other