Last Updated： Aggregation Period:Jul 09, 2025～Aug 05, 2025
This ranking is based on the number of page views on our site.
Last Updated： Aggregation Period:Jul 09, 2025～Aug 05, 2025
This ranking is based on the number of page views on our site.
Last Updated： Aggregation Period:Jul 09, 2025～Aug 05, 2025
This ranking is based on the number of page views on our site.
166～180 item / All 243 items
Our Roots-type vacuum pump is a multi-stage Roots vacuum pump that utilizes unique cooling technology.
Exhaust can achieve a clean vacuum without containing sealing water or sealing oil, similar to a sealed liquid vacuum pump. It operates across the entire range from atmospheric pressure to the inlet shut-off using a Roots type, pursuing ease of use.
Our Roots-type vacuum pump is a multi-stage Roots vacuum pump that utilizes unique cooling technology.
Exhaust can achieve a clean vacuum without containing sealing water or sealing oil, similar to a sealed liquid vacuum pump. It operates over the entire range from atmospheric pressure to the inlet shut-off using a Roots type, focusing on ease of use.
Our Roots-type vacuum pump is a multi-stage Roots vacuum pump that utilizes unique cooling technology.
Exhaust can achieve a clean vacuum without containing sealing water or sealing oil, similar to a sealed liquid vacuum pump. It operates throughout the entire range from atmospheric pressure to the inlet shut-off using a Roots type, focusing on ease of use.
The fluororesin lining construction for the gas connection section is optimal for the inhalation of halogen-based gases and strongly acidic gases.
The Roots-type dry vacuum pump VP series features a fluororesin lining in the gas contact area. The thickness of the fluororesin lining is over 150μm, providing durability against halogen gases and strong acidic gases. It can be utilized in applications such as reagents, agriculture, chemicals, and high-performance materials. 【VP4 Series Lineup】 ■VP4-501 ■VP4-651 ■VP4-801 For more details, please contact us or download the catalog.
High-durability dry vacuum pump suitable for all processes! Specialized for process performance.
The "SDE Series" is a dry vacuum pump from Kashiyama Industry, which has gained high trust in a wide range of fields, including semiconductor and liquid crystal manufacturing. It employs a vertical screw with excellent anti-deposition performance, demonstrating high corrosion resistance due to structural materials and temperature settings. The unique screw design achieves energy savings. 【Examples of Compatible Processes】 ■ Metal-Etch ■ SA-CVD ■ Metal-CVD ■ PE-CVD ■ LP-CVD ■ ALD *For more details, please refer to the PDF document or feel free to contact us.
Large displacement pumps that accommodate the increase in diameter of wafers and FPDs.
The "SDL Series" is a dry vacuum pump from Kashiyama Industries, which has gained high trust in a wide range of fields, including semiconductor and LCD manufacturing. It accommodates the increasing size of wafers and FPDs. By combining units, it can achieve a large exhaust capacity, meeting requests for over 150,000 L/min. Furthermore, by ensuring exhaust speed on the atmospheric side, it shortens the cycle time through rapid exhaust of large load lock chambers. There is also a solvent exhaust specification available, so please inquire for details. 【Features】 ■ Accommodates the increasing size of wafers and FPDs ■ Shortens cycle time *For more details, please refer to the PDF materials or feel free to contact us.
TW-05A does not have an electromagnetic valve, while TW-05AS comes with an electromagnetic valve (anti-backflow).
The vacuum pump "TW-05A・TW-05AS" has the TW-05A without an electromagnetic valve and the TW-05AS with an electromagnetic valve (anti-backflow). The suction port diameter of the vacuum pump is 7/16-20UNF (1/4). The hose attachment screw size is M10×1.5 (with attachment) and can be used for both R12 and R134. The compression method is rotary vane. The weight is 6.9 kg. For more details, please download the catalog.
Vacuum Pump TEZ8
● Easy oil change with oil cartridge system ● Monitor tube prevents oil entry and backflow The built-in monitor tube with strainer prevents backflow and entry of vacuum pump oil, as well as oil ejection when pressure is applied inside the vacuum pump. ● Monitor tube with built-in strainer A transparent monitor tube that allows monitoring of debris entry, equipped with a strainer to prevent the entry of sludge and other debris. ● Compact and lightweight ● High-speed turbo fan The adoption of a high-speed turbo fan ensures excellent cooling efficiency, performing well even in high-temperature environments.
Achieving a lightweight 2.95kg! A new standard model equipped with sufficient capabilities.
We would like to introduce our ultra-mini single-stage vacuum pump, the 'TA150SV'. Weighing only 2.95 kg, it features a large sight glass that allows for easy visibility of oil levels and contamination. It is a new standard model equipped with sufficient capabilities. It comes with an oil backflow prevention valve that prevents oil from flowing back when the vacuum pump is stopped. 【Features】 ■ Achieves a lightweight of 2.95 kg ■ Equipped with an oil backflow prevention valve ■ Prevents oil backflow when the vacuum pump is stopped ■ Large sight glass allows for easy visibility of oil levels and contamination *For more details, please refer to the PDF document or feel free to contact us.
Compact × High Vacuum × High Functionality! Achieving a vacuum level of 3.3 Pa (25 microns) with the power of a two-stage system!
The "TA150SW" is an ultra-mini two-stage vacuum pump equipped with a two-stage rotor. The air that is drawn in is compressed more highly and expelled by two rotors connected in series. Therefore, a significant pressure difference occurs between the exhaust and intake ports, allowing for a higher vacuum level than a single-stage pump. Additionally, the absence of back pressure on the first stage rotor enables smooth intake rotation, which is one of the reasons for achieving high vacuum. 【Features】 ■ Compact × High vacuum × High functionality ■ Equipped with two-stage rotor ■ Oil backflow prevention mechanism (solenoid valve) ■ Compact size *For more details, please refer to the PDF document or feel free to contact us.
It can be used in industrial vacuum suction and medical devices such as suction devices.
The oil-free piston-type vacuum pump with a DC motor is oil-free (uses special resin piston rings). It is lightweight, low noise, and easy to maintain. It can be used at high vacuum levels and allows for continuous operation (only with brushless motors). There are many achievements in the domestic market as well. It has a built-in thermal protector. Depending on the application, it can also be used as a compressor. It can be used for industrial vacuum suction, analyzers and environmental measuring instruments, vacuum packaging equipment, medical devices such as suction devices, degassing equipment, adsorption transport and workholding, beauty and health equipment, and more. For more details, please contact us or refer to the catalog.
Renewed and making a comeback.
Large aircraft have also been added to the series.
We are featuring the "MDP-V series," which has low noise with a low-speed, high-balance rotor!
This catalog introduces the vacuum pumps handled by Daiko Machinery Industry. It features models such as the "MDP-V Series," which allows for smooth exhaust without condensation or dust accumulating inside the pump, as well as the "MDP Series," "SLT Series," and "SDV Series." Please use this for selecting products. [Contents (excerpt)] ■MDP-V Series ■MDP Series ■SLT Series ■SDV Series ■SDF Series *For more details, please refer to the PDF document or feel free to contact us.
Prolongs the lifespan of bearings, shaft seals, timing gears, etc., through low-speed operation. High reliability with easy disassembly and assembly.
Our company designs, manufactures, and sells "dry vacuum pumps" that achieve remarkably low speeds (3600 min-1 / 60Hz, 3000 min-1 / 50Hz) thanks to our unique screw shape (Queen Bee Screw). These pumps are utilized in a wide range of fields including chemicals and pharmaceuticals, automotive and electronic components, semiconductors, and liquid crystals. You can choose products suited to your applications from our various lineups. 【Features】 - Long lifespan of bearings and other components due to low-speed operation, as well as reduced noise and vibration - Smooth exhaust without condensation or dust accumulating inside the pump - Simple structure for easy disassembly and assembly - Excellent ultimate pressure achieved, allowing for continuous operation across a wide pressure range - The gas-contacting parts exhibit excellent corrosion resistance due to special coating *For more details, please refer to the materials. Feel free to contact us with any inquiries.
For light chemical processes: Affordable and more versatile! Achieved longer lifespan, low noise, and low vibration for bearings, shaft seals, gears, etc.
The "SDV-R Series" is a screw-type dry vacuum pump designed for light chemical processes. Improving upon the popular "SDV Series," which is known for its low cost and space-saving design, we have expanded its applications. We have added a nitrogen purge mechanism to prevent the intrusion of internal gases into the bearing area and to dilute corrosive gases. 【Features】 ■ Structural changes to the side case - Closed the atmospheric vent hole to prevent external leakage of handled gases. ■ Addition of nitrogen purge mechanism - Prevents the intrusion of internal gases into the bearing area and dilutes corrosive gases. ■ Fluorine coating applied to gas contact parts. ★ We also offer a variety of pumps for transporting different fluids. *For more details, please refer to the PDF document or feel free to contact us.
