1nm Feedback Stage FS-1020SPX(MD)/XY
"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position holding stability after positioning!
This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 20mm with a resolution of 1nm (*1). Thanks to our self-developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1020SPX(MD) and the high-speed type is FS-1020UPX. (*1) In combination with the feedback stage controller FC-911.
- Company:シグマ光機
- Price:Other