コフロック List of Products and Services

This catalog is a comprehensive catalog of "Gas Generation Devices" handled by Kofurock Co., Ltd. [Contents] ■ What is a Gas Generation Device ■ Case Studies of Gas Generation Device Implementation ■ Gas Generation Device Range Table ■ List of Nitrogen Gas Generation Devices ■ List of Oxygen Gas Generation Devices ■ List of Ozone Gas Generation Devices ■ List of Hydrogen Gas Generation Devices ■ List of Other Gas Generation Devices (Clean Dry Air, Gas Mixing Devices) *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

The "M series (MPZ)" uses the PSA method to concentrate oxygen gas from the air, serving as a raw material for ozone gas, significantly reducing the generation of NOx gas (toxic). By adopting a multi-layout package, it is possible to select the orientation of the panel surface and exhaust duct according to the installation location. It has a built-in compact compressor, allowing it to be used anywhere with an AC100V power supply. 【Features】 ■ Fully automatic operation for easy handling ■ Touch panel surface can be selected according to installation space※1 ■ Multi-exhaust duct allows for exhaust in four directions: front, back, left, and right※1 ■ Improved operability and maintainability due to compact layout and touch panel adoption※1 ■ The discharge section is air-cooled, so no supply equipment for cooling water is needed ■ Built-in high-purity oxygen gas generation device (O2 90%) ■ Optional installation of an oxygen concentration meter available For more details, please refer to the PDF document or feel free to contact us. ※1 Excluding PZ-3A

• Gas Generator

The "Mini-CUBE Series (MNTS)" is a compact nitrogen gas generator that supports purities ranging from 95% to 99.999%. Its ultra-compact body allows for desktop installation. Additionally, it features a DC inverter-controlled compressor, which comes standard with energy-saving functionality. The new design blends seamlessly with peripheral equipment, making it an optimal series for use as an accessory to analytical and culture equipment, as well as soldering devices. 【Features】 ■ Increased gas output by 20%, achieving a compact and lightweight design (310×392×310mm) ■ Gas supply with just one switch after power connection ■ Quiet model achieving 55dB at the front of the unit ■ Energy-saving functionality included ■ Compatible with single-phase AC 100V-240V ■ New design adopted *For more details, please refer to the PDF document or feel free to contact us.

• Nitrogen Gas Generator

The "M Series (MNT)" is a device designed to pursue miniaturization and improved maintenance. By adopting a multi-layout package, it is possible to select the orientation of the touch panel and exhaust duct according to the installation location. It is equipped with a compact oil-free compressor, allowing it to be used anywhere with a 100V AC power supply. 【Features】 ■ Touch panel orientation can be selected according to installation space ■ Multi-exhaust duct allows for exhaust in four directions: front, back, left, and right ■ Improved operability and maintenance through a compact layout ■ Quiet design at 58dB ■ One-year or 8,000-hour warranty after delivery ■ Adoption of a newly designed dedicated circuit board ■ Not subject to regulations (exempt from second-class pressure vessels, high-pressure gas safety laws, etc.) *Actual device colors may vary. *For more details, please refer to the PDF materials or feel free to contact us.

• Nitrogen Gas Generator

The "MNTL Series" is a nitrogen gas generation device with a built-in compressor that significantly improves equipment performance in terms of generation volume and discharge pressure. With the new LCD panel, the functionality has also been enhanced. As a large-capacity model of the "MNT Series," it is suitable as a nitrogen supply source for equipment and laboratory use. 【Features】 ■ Nitrogen gas generation volume increased by up to 54.5% ■ Built-in oil-free compressor ■ One-year warranty including the air compressor for peace of mind ■ Space-saving design that allows for flexible installation ■ Adoption of a new LCD panel ■ Quiet design achieving a noise level of 58.8dB at the front of the device *For more details, please refer to the PDF document or feel free to contact us.

• Nitrogen Gas Generator

The "MNTL-NCPII series" is a nitrogen gas generator with a separate compressor that significantly improves equipment performance. Equipped with a new LCD panel, this series is well-suited for equipment attachments and laboratory use as a large-capacity model of the "MNT series." 【Features】 ■ Increases nitrogen generation by up to 44% ■ Reduces installation area by 20% ■ Achieves low noise levels ■ Adopts an LCD panel ■ Capable of generating N2 with general-purpose air *For more details, please refer to the PDF materials or feel free to contact us.

• Nitrogen Gas Generator

The NTE series is the successor to the NT series, significantly improving equipment performance such as output volume and pressure, and enhancing functionality with the standard inclusion of a touch panel. Additionally, the Eco mode adopted in this model is patented. 【Features】 ■ Realization of high functionality ■ Space-saving design ■ Quiet model achieving a noise level of 60dB at the front of the device ■ Improved maintainability ■ Free power supply *For more details, please refer to the PDF document or feel free to contact us.

• Nitrogen Gas Generator

The "N2 IMPACT II" is a nitrogen gas generator with a built-in compressor. The ECO mode technology used in this product is patented. By performing comprehensive maintenance on the PSA and compressor, maintenance costs can be reduced. Additionally, the adoption of a highly durable compressor has extended the maintenance cycle to approximately twice as long (compared to our previous models). 【Features】 ■ Equipped with Eco mode, reducing power consumption by up to 49% based on nitrogen gas usage ■ Nitrogen generation increased by up to 27.3% ■ Standard external air supply function ■ Improved maintainability reduces effort and costs ■ Adoption of a scroll compressor *For more details, please refer to the PDF document or feel free to contact us.

• Nitrogen Gas Generator

The "GENE-BASE series" is an outdoor nitrogen gas generation device born from the technological fusion between the gas generation device Kofurock and the compressor manufacturer Hokueki Kogyo. It offers a lineup from low purity to high purity, allowing for proposals tailored to customer needs. It is suitable for both indoor and outdoor installation, and can operate continuously even in high-temperature environments of up to 45°C outdoors. Its waterproof performance is equivalent to IPX3. Since the compressor is built into the device, there is no need for structures like compressor rooms, which can significantly reduce installation costs. 【Features】 - Indoor and outdoor installation type - Built-in inverter screw compressor - Capable of continuous operation in outdoor environments at 45°C - Simultaneous supply of N2 gas and compressed air (industry first) - Achieves low noise operation below 60 dB(A) (industry first) - Enhanced energy-saving features (cylinder pause system) - Standard equipped with oil-water separation function for drain water within the package (industry first) - Space-saving design considering maintenance ease *For more details, please refer to the PDF document or feel free to contact us.

• Nitrogen Gas Generator

The "NEXP Series" is a nitrogen gas generation device for laser processing that can generate and supply high-pressure nitrogen gas on-site. It has simplified the introduction process by modularizing the energy-saving nitrogen gas generation device "NE Series" along with the purification and pressurization mechanisms. This series is optimal as a supply source for assist gas in laser cutting. 【Features】 ■ Supports high purity of 99.999% ■ Capable of rated discharge of 3.5 MPa or more (maximum pressurization pressure of 4.7 MPa) ■ No need for cylinder replacement ■ Expanded versatility *For more details, please refer to the PDF document or feel free to contact us.

• Nitrogen Gas Generator

The "NE II Series" enables a generation capacity of 20-180 N㎥/h with a compact housing design, and through process improvements, it has increased nitrogen gas generation by approximately 36.5% compared to conventional models. With the adoption of a panel door, the maintenance space on the front, back, and sides is only 600mm, eliminating unnecessary installation space. Additionally, the maintenance area is consolidated on the right side of the unit. 【Features】 ■ N2 generation capacity increased by up to 36.5% ■ Power consumption per 1 N㎥ reduced by up to 26.4% ■ Space-saving design *For more details, please refer to the PDF materials or feel free to contact us.

• Nitrogen Gas Generator

The "NEMH Series" boasts one of the smallest installation footprints in the industry, with a range of 60-180 Nm3/h, and has increased nitrogen gas generation by approximately 10% compared to conventional models (NE Series). Additionally, it is equipped with a unique energy-saving feature called the "Cylinder Idle System," which allows for energy savings based on usage. It can also be installed outdoors, making it versatile in terms of installation locations. 【Features】 ■ Nitrogen generation increased by up to 12.5% ■ Energy-saving function based on nitrogen gas usage ■ Suitable for outdoor installation ■ Low noise design ■ Space-saving design *For more details, please refer to the PDF document or feel free to contact us.

• Nitrogen Gas Generator

The "Mini-CUBE Series (MOXS)" is a compact oxygen gas generator that utilizes a DC inverter-controlled compressor and comes standard with energy-saving features. It supports oxygen purity of over 90%. Its ultra-compact body allows for tabletop installation. The new design blends seamlessly with surrounding equipment and is ideal for supplying to culture devices and bioreactors, adding oxygen for aquaculture, oxygen-enriched combustion, and as a raw material for ozone. 【Features】 - Achieves compactness and lightweight design (310×392×310mm) - Gas supply with just one switch after power connection - Quiet model achieving 55dB at the front of the device - Equipped with energy-saving features - Compatible with single-phase AC 100V-240V - Adopts a new design *For more details, please refer to the PDF materials or feel free to contact us.

• Gas Generator

The "M Series (MOX)" is a device that pursues miniaturization and improved maintenance. It is available in generation rates of 4NL/min and 8NL/min. With a built-in compact compressor, it can be installed anywhere there is an AC100V outlet. There is no need to replace oxygen gas cylinders, making it widely used in universities and research institutions. 【Features】 ■ Touch panel surface can be selected according to installation space ■ Multi-exhaust duct allows for exhaust in four directions: front, back, left, and right ■ Improved operability and maintenance through a consolidated layout ■ Quiet design at 58dB ■ One-year or 8,000-hour warranty after delivery ■ Adoption of a newly designed dedicated circuit board ■ Not subject to regulations (exempt from second-class pressure vessels, high-pressure gas safety laws, etc.) *The actual color of the device may change. *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

The "GENE-BASE Series" is an outdoor oxygen gas generation device that was born from the technological fusion between the gas generation device Kofurok and the compressor manufacturer Hokueki Kogyo. The gas discharge pressure ranges from 0.2 to 0.5 MPa, allowing for proposals tailored to customer needs. It is suitable for both indoor and outdoor installation, and can operate continuously even in high-temperature environments of 45°C outdoors. Its waterproof performance is equivalent to IPX3. Since the device has a built-in compressor, there is no need for structures like compressor rooms, which can significantly reduce installation costs. 【Features】 - Indoor and outdoor installation type - Built-in inverter screw compressor - Continuous operation possible in outdoor environments at 45°C - Simultaneous supply of O2 gas and compressed air (industry first) - Low noise operation below 60 dB(A) (industry first) - Enhanced energy-saving features (cylinder pause system) - Standard oil-water separation function for drain water included in the package (industry first) - Space-saving design considering maintenance *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

The "OX Series" is a medium-sized oxygen gas generator used for various applications such as water treatment, combustion, ozone generation, and aquaculture (fish farming). It offers oxygen gas purity of over 90% with a generation capacity ranging from 0.7 to 9.3 N㎥/h. It is an external air supply type. It operates fully automatically and is easy to use. Its compact design does not take up much space. Additionally, this product is outside the application scope of the High-Pressure Gas Safety Act, Category 2 pressure vessels. 【Features】 ■ Fully automatic operation with easy controls ■ Compact design that saves space ■ Outside the application scope of the High-Pressure Gas Safety Act, Category 2 pressure vessels *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

The "Mini-CUBE Series (MOZS)" is a tabletop-sized ultra-compact ozone gas generator. By using oxygen generated from a built-in oxygen gas generator as a raw material, it provides ozone gas that significantly reduces the generation of harmful NOx gases. It can be used for various applications such as ozone degradation testing of rubber and resin, oxidation-promoting gas for chemical experiments, and sterilization in agricultural and aquaculture production environments. Furthermore, the MOZS features a stylish design that departs from the traditional mechanical image, meeting various needs for sterilization and deodorization in hospitals, welfare facilities, hotels, food factories, supermarkets, and more. 【Features】 - Achieves compactness and lightweight design - Significantly reduces the generation of harmful NOx gases - Energy-saving through the use of a DC inverter air compressor - Quiet model achieving 55dB at the front of the device - Compatible with power supply AC100V to 240V *For more details, please refer to the PDF materials or feel free to contact us.

• Gas Generator

The "PZH Series" is a high-concentration ozone gas generator that uses ceramic tubes. The ozone gas concentration can be set using a dial. With an ozone gas pressure of 0.15 MPa, it is easy to dissolve in water using ejectors and other methods. Additionally, the ozonizer is air-cooled, eliminating the need for cooling water, and it has a built-in compressor, which means no extra piping or wiring is required. 【Features】 ■ Oxygen gas generator with built-in compressor ■ High ozone gas pressure of 0.15 MPa makes water dissolution easy with ejectors and other methods ■ Air-cooled ozonizer, no cooling water required ■ High ozone concentration ■ Ozone concentration can be finely controlled by frequency control *For more details, please refer to the PDF materials or feel free to contact us.

• Gas Generator

The "Mini-CUBE Series (MAIRS)" is a tabletop clean dry air generation device that can supply air with a dew point of -70°C or lower. The product gas that meets the air cleanliness class 0:2:0 (JIS B 8392-1:2012) can be used for various applications such as analytical instruments, powder conveying, and preventing condensation in refrigeration units. Similar to nitrogen and oxygen generation devices, the ultra-compact body with a built-in compressor can be installed on a tabletop. 【Features】 ■ Achieves compact and lightweight design ■ Gas supply with just one switch after power connection ■ Quiet model achieving 55dB at the front of the device ■ Standard equipped with flow meter and pressure reducing valve ■ Energy-saving function included ■ Compatible with single-phase AC 100V-240V ■ Ability to monitor the condition of the supplied clean dry air *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

The "M Series (MCDA)" is a device that pursues miniaturization and improved maintainability. By adopting a multi-layout package, it is possible to select the orientation of the touch panel and exhaust duct according to the installation location. It is equipped with a compact oil-free compressor, allowing it to be used anywhere with an AC100V power supply. 【Features】 ■ Touch panel orientation can be selected according to installation space ■ Multi-exhaust duct allows for exhaust in four directions: front, back, left, and right ■ Improved operability and maintenance through a compact layout ■ Quiet design at 58dB ■ One-year or 8,000-hour warranty after delivery ■ Adoption of a newly designed dedicated circuit board ■ Not subject to regulations (exempt from second-class pressure vessels, high-pressure gas safety laws, etc.) * The actual color of the device may change. * For more details, please refer to the PDF materials or feel free to contact us.

• Gas Generator

The "GENE-BASE series" is an outdoor oxygen gas generation device born from the technological fusion of the gas generation device Kofurok and the compressor from Hokueki Industries. It is suitable for both indoor and outdoor installation, capable of continuous operation even in high-temperature environments of 45°C outdoors. Its waterproof performance is equivalent to IPX3. Since the device incorporates a compressor, there is no need for structures like compressor rooms, which is expected to significantly reduce installation costs. 【Features】 - Indoor and outdoor installation type - Built-in inverter screw compressor - Continuous operation possible in outdoor environments at 45°C - Simultaneous supply of CDA and compressed air (industry first) - Achieves low noise operation below 60dB(A) (industry first) - Evolved energy-saving function (cylinder pause system) - Standard oil-water separation function for drain water included in the package (industry first) - Space-saving design considering maintenance ease *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

Electrolyze only the necessary amount of water when needed to produce hydrogen gas with a purity of 99.999%. You will be freed from the transportation, replacement, and management tasks associated with gas cylinders. It can be installed in a space-saving manner and is maintenance-free. *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

The hydrogen storage alloy canister is a container filled with hydrogen storage alloys that have the ability to absorb and release hydrogen. It is compact and safe, and can be reused multiple times. It is a new hydrogen supply tool that serves as an alternative to gas cylinders. *For more details, please refer to the PDF document or feel free to contact us.*

• Gas Generator

The "RK20T" and "RK50T" are resin flow meters that are useful for measuring the flow of water (H2O), nitrogen (N2), air, and more. We offer the "RK20T" for small flow rates and the "RK50T" for large flow rates, with options for the presence or absence of a valve. They do not require a power supply and can be installed in various locations, making them suitable for air sampling, purge systems, and monitoring conditions in factories where air is used. 【Features】 - Capable of measuring gases (Air/N2) and liquids (H2O) - The "RK20T" supports small flow rates from 0.05 to 0.5 L/min (Air/N2) - The "RK50T" supports large flow rates from 30 to 300 L/min (Air/N2) - A large stock is available, allowing for short delivery times and low prices - Simple and highly visible design *For more details, please refer to the documentation. Feel free to contact us with any inquiries.

• Other measurement, recording and measuring instruments

Koflock has been exploring measurement and control technology primarily in the micro flow range of fluids for over 70 years, with the motto of "Science of Fluids." We have built trust across various fields and now boast top-class market shares in various sectors in Japan. On this page, we are offering a comprehensive catalog of 'Fluid Measurement and Control Equipment' handled by Koflock Co., Ltd. It also includes principles and selection guides for various fluid measurement devices, which we hope will assist you in product selection. [Contents] ■ Mass Flow Controllers/Meters (Electronic Flow Meters) ■ Flow Meters ■ Flow Control Valves ■ Pressure Control Valves ■ Other Piping Components ■ Gas Generation Devices/Engineering Equipment <We will be exhibiting at SEMICON Japan 2023!> We will demonstrate micro flow control of liquids using a clean control system currently under development for processes requiring cleanliness, such as semiconductor cleaning equipment. We invite you to take this opportunity to see our actual products. [Exhibition Information] <SEMICON Japan 2023> Date: December 13 (Wed) - 15 (Fri), 2023 Venue: Tokyo Big Sight (Booth Number: 6720)

• Flow Meter

The "EXE-FLOW MODEL EX-700R SERIES" is a digital mass flow meter with an integrated display that allows for various functions to be used. If equipped with a needle valve, flow control is also possible. It features RS485 communication, an analog output of 4-20mA (which can be changed to 0-5VDC/1-5VDC), and cumulative pulse output. 【Features】 ■ Target fluid: Gas N2 (Air, H2, He, Ar, O2, CO2, CH4/C.F. switching) ■ Maximum flow rate: Gas 10 SCCM to 500 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Gas types with C.F. values from 0.50 to 1.50 can be registered additionally by the customer ■ Flow output signal can be changed via the display (default 4-20mA) *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

The "MODEL EX-250S SERIES" is a compact digital mass flow controller/meter that allows for the switching of gas types using a rotary switch. It features RS485 communication capabilities and offers selectable analog input/output of 0-5VDC/4-20mA, as well as power supply options of ±15VDC/24VDC. The total flow control range has a response time of within 1 second. Please feel free to consult us when you need assistance. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 5 SCCM to 10 SLM ■ Accuracy: ±1% F.S. ■ Compact design ■ Gas type switching possible with a rotary switch *For more details, please refer to the PDF materials or feel free to contact us.

• Flow Meter

The "MODEL EX-550 SERIES" is a metal-sealed digital mass flow controller/meter that allows for gas type switching via a rotary switch. It enables high-precision measurement with S.P. accuracy, and the entire flow control range responds within 1 second. It features RS485 communication capabilities and allows for the selection of analog input/output of 0-5VDC/4-20mA and power supply of ±15VDC/24VDC. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: 10 SCCM to 5 SLM ■ Accuracy: ±1% S.P. (25-100% F.S.), ±0.25% F.S. (up to 25% F.S.) ■ High-precision measurement is possible with S.P. accuracy ■ Gas type switching is possible via a rotary switch *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

The "MODEL 8700 SERIES" is a mass flow controller/meter with a display that accommodates a wide range of flow rates. Various functions (instantaneous/integrated flow display, alarm settings) are available. The target fluids include gases such as N2, Air, H2, He, Ar, O2, and CO2. Additionally, it features RS485 communication capabilities and analog input/output of 0-5VDC (which can be changed to 4-20mA). 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM when converted to N2) ■ Analog input/output can be changed via the display (0-5VDC at the time of shipment) *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

We would like to introduce our standard mass flow controller, the 'MODEL 3660 SERIES'. It supports a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 10 SCCM to 100 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM, converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

We would like to introduce our standard mass flow meter, the 'MODEL 3760 SERIES'. It supports a wide flow range from F.S. 10 SCCM to F.S. 100 SLM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 10 SCCM to 100 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

The "MODEL 3200 SERIES" is a high-grade mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume through a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

We would like to introduce our high-grade mass flow meter, the 'MODEL 3100 SERIES'. It supports very low flow rates starting from F.S. 1 SCCM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. Please feel free to consult us when you need assistance. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (starting from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

The "MODEL 5100 SERIES" is a metal-sealed mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume with a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

We would like to introduce our metal seal mass flow meter, the 'MODEL 5410 SERIES.' It is designed for gases such as N2, Air, H2, He, Ar, O2, CO2, etc. The maximum flow rate ranges from 10 SCCM to 20 SLM, with an accuracy of ±1% F.S. Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal Wire Sensor ■ Maximum Inlet Pressure: 500 kPa (G) ■ Allowable Ambient Temperature: 0 to 50℃ ■ Contact Gas Material: SUS316L, Ni, PTFE ■ Electrical Connection: D-sub 9-pin KFC standard (compliant with SEMI standard) ■ Weight: Approximately 800g *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

The "MODEL 3810DSII SERIES" is a low-cost mass flow meter with an integrated display. It offers various functions such as instantaneous/total flow display and alarm settings. You can choose between analog outputs of 4-20mA or 1-5VDC. Additionally, if equipped with a needle valve, flow control is also possible. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±2-3% F.S. ■ Integrated display ■ Selectable analog output of 4-20mA or 1-5VDC ■ Flow control possible if equipped with a needle valve *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

We would like to introduce our low-cost mass flow sensor, the 'MODEL 3810 SERIES'. It is designed for gases such as N2, Air, H2, He, Ar, O2, CO2, etc. The maximum flow rate ranges from 10 SCCM to 50 SLM, with an accuracy of ±3-5% F.S. Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal Wire Sensor ■ Maximum Inlet Pressure: 500 kPa (G) ■ Allowable Ambient Temperature: 5-45℃ ■ Gas Contact Material: SUS303, PTFE, FKM (Optional NBR or CR) ■ Electrical Connection: AMP 171826-5 (Cable side 171822-5) ■ Weight: Approximately 250g, Approximately 350g *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

We would like to introduce our high-flow mass flow controller, 'MODEL HFC-303 SERIES'. It supports high flow rates up to F.S. 1000SLM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc. (gases), with a maximum flow rate ranging from 100 to 1000SLM (gases). Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal wire sensor ■ Valve Type: Proportional solenoid + Pneumatic two-stage valve (closed when not energized) ■ Accuracy: ±1% F.S. (at 25°C) ■ Allowable Ambient Temperature: 5 to 45°C ■ Electrical Connection: D-sub 15 pin ■ Weight: Approximately 2400g *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

We would like to introduce our high-flow mass flow meter, the 'MODEL HFC-303 SERIES'. It supports high flow rates up to F.S. 1000SLM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 100 to 1000SLM. Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal Wire Sensor ■ Allowable Ambient Temperature: 5 to 45℃ ■ Gas Contact Materials: SUS316, Ni, SUS302, FKM ■ Electrical Connection: D-sub 15-pin ■ Weight: Approximately 1600g *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

We would like to introduce our mass flow meter for large flow rates with low pressure loss, the 'MODEL HFM-200W/LS SERIES'. It supports large flow rates up to F.S. 15000SLM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with an accuracy of ±3-5% F.S. Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal Wire Sensor ■ Repeatability: ±0.5% F.S. ■ Allowable Ambient Temperature: 5-45℃ ■ Allowable Ambient Humidity: 10-90% RH (without condensation) ■ Electrical Connection: D-sub 15 pin *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter

"FLOW COMPO" is a handy mass flow control/measurement unit that docks the lead-out unit "CR-400B" with a mass flow controller/meter. The target fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 <FCC4000-3660> ■ Mounted MFC/MFM: 3660 (MFC) ■ Full-scale flow rate (N2 equivalent): 10 SCCM to 20 SLM ■ Accuracy: ±1% F.S. (at 25°C) *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "MODEL CR-400B" is a power supply and flow rate display for mass flow controllers/meters. It offers various functions such as instantaneous/integrated flow rate display, alarm settings, and forced opening and closing of the mass flow controller's valve. It also allows external operation via RS485 communication and analog input/output of 0-5VDC. 【Features】 ■ Power supply and flow rate display for mass flow controllers/meters ■ Various functions can be used through display operation ■ RS485 communication function ■ External operation is also possible via analog input/output of 0-5VDC *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "MODEL CK SERIES" is a flow setter for mass flow controllers. The input is 5VDC, and the output is divided with 5V as the full scale. The setting accuracy is 0.1% of full scale. Please feel free to consult us when you need assistance. 【Standard Specifications】 ■ Input: 5VDC ■ Output: Divided with 5V as the full scale ■ Resistance value: 10kΩ (standard) ■ Setting accuracy: 0.1% of full scale *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "MODEL DPM-3" is an instantaneous flow display for mass flow controllers/meters. It features a 7-segment LED display with 3.5 digits. The power supply is 5VDC, and it is designed for panel mounting. Please feel free to consult us when you need assistance. 【Standard Specifications】 ■ Display: 7-segment LED, 3.5 digits ■ Power Supply: 5VDC ■ Mounting: Panel mount *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

We would like to introduce our power supply for mass flow controllers/meters, the 'MODEL PSK-FB SERIES'. The 1FB can supply power to 1 system, the 3FB to 3 systems, and the 6FB to 6 systems. The input voltage (frequency) is 85–132VAC (47–66Hz), and it can be used at temperatures from 0 to 40°C. 【Standard Specifications (Excerpt)】 ■ Electrical Connection - D-sub 9-pin Female (MF main unit side) - D-sub 15-pin Female (display and setting unit side) ■ Weight - PSK-1FB: Approximately 800g - PSK-3FB: Approximately 1300g - PSK-6FB: Approximately 1700g *For more details, please refer to the PDF document or feel free to contact us.

• power supply