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  3. エムエス機器
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エムエス機器

number of employees98
addressOsaka/Yodogawa-ku, Osaka-shi/2-12-4 Sangoku Honmachi
phone06-6396-0510
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last updated:Feb 18, 2022
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エムエス機器 List of Products and Services

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Non-Freon Peltier cooler: compact, lightweight, low noise, low vibration, energy-saving!

Energy-saving effects for carbon neutrality, carbon pricing measures! Contributing to environmental issues with greenhouse gas-free solutions! Recommended for compact and embedded devices!

This chiller combines a highly reliable high-performance Peltier module with a unique patented heat exchange plate developed by Solid State Cooling Systems, demonstrating high cooling capacity while being very compact. It does not use any refrigerants, eliminating the need for usage restrictions due to GWP regulations and inspection work for refrigerant management. Additionally, since it does not have a compressor, it produces less vibration and noise, reducing issues caused by wear and degradation. It is also suitable for integration into devices and is highly recommended. <Features of our Peltier chiller> - Free of greenhouse gases, with no negative impact on the environment - Compact and lightweight with extremely low noise and vibration - Can be used with minimal power consumption - Excellent temperature responsiveness and stability - Low failure rate due to fewer mechanical parts *Please contact us for detailed product information. 【Exhibition Information】 ■Exhibition Name: SEMICON JAPAN 2022 ■Date: December 14 (Wednesday) to December 16 (Friday), 2022 ■Venue: Tokyo Big Sight (East Exhibition Hall and Conference Hall) ■Booth Number: Hall 1 1416

  • Chiller

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Energy-saving, refrigerant gas countermeasure chiller *Replacement case handbook provided

Achieve carbon neutrality through energy-saving effects and carbon pricing measures! Contribute to environmental issues with greenhouse gas-free solutions!

The Peltier chiller from Solid State Cooling Systems combines high-performance Peltier elements with a high-efficiency heat exchange plate developed using proprietary technology, utilizing a liquid medium to maximize the characteristics of Peltier elements, which excel in temperature stability and response. Compared to the inefficient temperature control methods using compressors and heaters found in conventional chillers, it offers numerous innovations and advantages, such as energy savings, space efficiency, low noise, low vibration, and the elimination of freon. It has a rich track record of deliveries in markets that require particularly stringent temperature control, including semiconductors, laser devices, analytical instruments, medical equipment, storage, aerospace technology, and the military industry. **Features of the Peltier Chiller:** - Free of greenhouse gases, with no negative impact on the environment - Compact and lightweight, with extremely low noise and vibration - Can be used in a way that minimizes power consumption - Excellent temperature response and stability - Low failure rate due to fewer mechanical parts *We have prepared a handbook summarizing replacement case studies:* - Energy-saving effects - Safety measures - Freon countermeasures - Aging countermeasures - Space-saving effects - Low vibration effects

  • Other environmental equipment
  • Other semiconductor manufacturing equipment

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Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

This is a chiller that can reduce the usage of valuable fluorinated solvents, which have become difficult to obtain recently.

Fluorinated solvents are widely used as temperature control circulating fluids in semiconductor manufacturing equipment and various measuring devices due to their high insulation properties. Additionally, they are suitable for cooling equipment in clean rooms because they are non-flammable, inert, and highly safe. There are specially designed chillers for these fluorinated circulating fluids. <Peltier Chillers> ThermoRack1201/1801 ThermoCube NIKOLA3K/5K <Refrigeration Chillers> M-75HFE - Compatible with many fluorinated solvents such as Fluorinert (FC-3283, etc.), Novec (HFE-7100, HFE-7200, etc.), Galden (HT-200, etc.), and Opteon (SF10, etc.) - The tank capacity and internal piping capacity are minimal, allowing for a reduction in the amount of expensive fluorinated solvents used, thereby lowering initial costs. - The sealed structure makes it difficult for valuable fluorinated solvents to evaporate, helping to reduce running costs. - The Peltier chiller models have high airtightness, preventing moisture from entering due to condensation. They are also suitable for fluorinated solvents that cannot be dehydrated with solvents like IPA.

  • Other environmental equipment
  • Other semiconductor manufacturing equipment

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Plasma Etcher Chiller ThermoRack 1201/1801

Ideal for plasma etching in semiconductor manufacturing processes! Up to 93% reduction in power consumption! Also prevents noise and vibration!

The "ThermoRack1201/1801" is a temperature control chiller that uses no refrigerants and can control cooling and heating with rapid temperature response and a temperature stability of ±0.05℃. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it operates while maintaining about 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Compact, lightweight, low noise, low vibration, non-freon Peltier chiller.

A non-freon Peltier chiller with a compact design that can be integrated into devices, featuring a cooling capacity of 160W to 600W and a powerful pump.

This chiller combines a highly reliable high-performance Peltier module with a unique patented heat exchange plate developed by Solid State Cooling Systems, demonstrating high cooling capacity in a very compact design. It does not use any refrigerants, eliminating the need for usage restrictions due to GWP regulations and inspection work for refrigerant management. Additionally, it uses very few mechanical parts, resulting in less vibration and noise, and reducing issues caused by wear and degradation. It is also ideal for integration into devices. You can choose the optimal unit from multiple lineups according to your required specifications. - Cooling capacity: 160W to 600W - Pump: Selectable based on application (ThermoCube) - Wetted material: Material selection considering corrosion prevention with dissimilar metals is possible (UC, TCube edge, ThermoCube) - Circulating fluid: Water/ethylene glycol solution, Koolance, fluorinated solvents are also available (ThermoCube) * Air-cooled and water-cooled models are also available (ThermoCube)

  • Chiller

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Used chiller manufactured by Thermo Fisher Scientific.

This is a refurbished unit of a used chiller manufactured by Thermo Fisher Scientific, overhauled using genuine parts.

We have started selling refurbished Thermo Fisher Scientific used chillers that have been overhauled using genuine parts. The delivery time is approximately two months from order to delivery, and a manufacturer's warranty of six months is included.

  • Other semiconductor manufacturing equipment

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Chiller for semiconductor manufacturing equipment

This is a chiller designed for semiconductor manufacturing equipment.

Many devices used in the semiconductor manufacturing process require cooling equipment (chillers) to remove the heat generated and maintain a constant temperature. Thermo Fisher Scientific's chillers for semiconductor manufacturing are designed to provide: - High productivity - Long-term reliability - Simple operability that does not induce operational errors These are OEM models designed according to the specifications of various equipment manufacturers.

  • Other semiconductor manufacturing equipment

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Significant reduction in power consumption! Peltier chiller 'ThermoRack1801'

Optimal for plasma etching in semiconductor manufacturing! Up to 93% reduction in power consumption! Also prevents noise and vibration!

The "ThermoRack1801" is a temperature control chiller that can control cooling and heating with a quick temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining about 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Have you completed the measures against fluorocarbons? 'ThermoRack1201'

Peltier chiller without refrigerant gas, suitable for plasma etching in semiconductor manufacturing processes!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerant gases. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. Compatible with products from major etcher manufacturers! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it operates while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Have you completed your measures against refrigerants? Peltier cooler ThermoCube.

Compact! Significant reduction in power consumption! Low noise and low vibration! No use of freon gas! Peltier cooling chiller.

The ThermoCube with cooling capacities of 200W, 300W, 400W, and 600W maintains whisper-quiet operation and low vibration, achieving a temperature stability of ±0.05°C even near room temperature. The core electronic temperature control module has a lifespan exceeding 200,000 hours and is equipped with a universal power supply compatible with power sources worldwide. It offers numerous options and features a design that allows for easy customization. This chiller is environmentally friendly and does not use refrigerants. *Please inquire about options. 【Features】 ■ Temperature control for semiconductor manufacturing equipment ■ Cooling for lasers ■ Temperature control for gas containers ■ Scanning electron microscopes

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Significantly Reduced Power Consumption Peltier Chiller TCubeEdge

Compact! Accurate temperature control! Excellent cost performance Peltier cooling chiller.

The TCubeEdge, with a maximum cooling capacity of 290W, optimizes the performance of your equipment with excellent temperature reliability, resulting in high profitability. The TCubeEdge quickly responds to temperature changes in circulating water, achieving a reproducibility of ±0.05°C even near room temperature in temperature control from 0°C to 65°C. The centrifugal pump, which ensures smooth flow, operates without vibration, making it suitable for temperature control in various applications such as lasers, optics, and analytical instruments. Equipped with an electronic temperature control module with a lifespan exceeding 200,000 hours, the TCubeEdge operates with minimal noise and vibration due to the absence of a compressor and very few moving parts. It is an environmentally friendly product as it does not use Freon.

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Low vibration, low noise Peltier chiller "ThermoRack401"

Ideal for temperature control of laser devices with low vibration, low noise, and excellent temperature stability! Power consumption can also be reduced!

The ThermoRack401 offers high reliability and is ideal for laser applications. The ThermoRack400, with a cooling capacity of 400W, maintains a temperature accuracy of ±0.05℃ even near room temperature. With only two drive components, it achieves whisper-quiet operation and vibration-free performance, meeting the temperature control requirements for advanced optical and laser applications. The core electronic temperature control module has a lifespan exceeding 200,000 hours and is equipped with a universal power supply compatible with power sources worldwide. 【Features】 ■ Quick temperature response and excellent temperature stability ■ Compact size fitting into a 4U standard 19-inch rack ■ Temperature stability: ±0.05℃ (under no load or constant load) ■ No use of CFC refrigerants ■ Significant reduction in power consumption ■ Reduced noise and vibration

  • Etching Equipment

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Plasma Etcher Chiller NIKOLA3K/5K

High cooling capacity Peltier chiller without refrigerant gas - perfect for plasma etching in semiconductor manufacturing processes! Reduces power consumption by up to 60%! Prevents noise and vibration!

The "NIKOLA3K/5K" is a high cooling capacity Peltier chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. Compatible with major etcher manufacturers' products! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining about 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration

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Fluorine-based solvent chiller M-75HFE

Chiller for fluorine-based solutions with high temperature stability and responsiveness.

Fluorinated solvents (Fluorinert, Novec, Galden, OptiOn) have a high level of insulation, making them very effective in preventing electrolysis and facilitating easy maintenance of equipment. Additionally, they are non-flammable and have high safety, making them suitable for cooling equipment in clean rooms. (Features of fluorinated solvents) - High electrical insulation - High thermal conductivity - High thermal stability - High chemical stability and inertness - Low toxicity and high safety due to non-flammability

  • Other environmental equipment
  • Other semiconductor manufacturing equipment

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Optimal for laser devices! Peltier chiller 'ThermoRack800'

Optimal for laser temperature control!

The ThermoRack800 offers high reliability and is ideal for laser applications. With a cooling capacity of 700 to 900W, the ThermoRack800 maintains a temperature accuracy of ±0.05℃ even near room temperature. It features only two drive components, achieving whisper-quiet operation and vibration-free performance, making it suitable for the temperature control required in advanced optical and laser applications. The core electronic temperature control module has a lifespan exceeding 200,000 hours. 【Features】 ■ Fast temperature response and high temperature stability ■ Compact size fitting in a 6U standard 19-inch rack ■ Temperature stability: ±0.05℃ (under no load or constant load) ■ No use of CFC refrigerants ■ Significant reduction in power consumption ■ Reduced noise and vibration

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Liquid Temperature Control System CLEANSTREAM

By directly controlling the temperature of the medication flow tube, we can reduce power consumption by 95% compared to conventional indirect temperature control methods!

Temperature management of the cleaning solution used in semiconductor manufacturing is a crucial factor that affects product quality and productivity. This device, utilizing a Peltier module, controls the temperature of the cleaning solution to ±0.05°C. It is a very compact module that directly controls the temperature of the flow path tube, allowing for a reduction in usage by 10-30% compared to traditional tanks that regulate the solution temperature. Furthermore, due to its simple structure with no moving parts, it operates without vibration or noise and requires almost no maintenance. Temperature control is managed with a separately sold dedicated controller.

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Fogging Test System

Horizon Fog Testing System compatible with various methods in the automotive industry.

The "Horizon Fog Testing System" by ThermoFisher Scientific reproduces the phenomenon where volatile components emitted from automotive interior materials (rubber, plastic, textiles) and additives or adhesives used in building interior materials adhere to glass surfaces due to temperature differences, obstructing visibility. By measuring the amount of volatile substances and the reflection angles caused by their adhesion to glass, it is possible to evaluate interior materials.

  • Testing Equipment and Devices

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Significant reduction in power consumption! Peltier chiller 'NIKOLA3K/5K'

High cooling capacity Peltier chiller without refrigerant gas - Ideal for plasma etching in semiconductor manufacturing processes! Reduces power consumption by up to 60%! Prevents noise and vibration!

The "NIKOLA3K/5K" is a high cooling capacity Peltier chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. Compatible with products from major etcher manufacturers! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration

  • Chiller

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Temperature Control Chiller 'NIKOLA3K/5K'

High cooling capacity Peltier chiller without refrigerant gas, ideal for plasma etching in semiconductor manufacturing processes! Reduces power consumption by up to 60%! Prevents noise and vibration as well!

The "NIKOLA3K/5K" is a high-cooling capacity Peltier chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. Compatible with major etcher manufacturers' products! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration

  • Chiller

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Significant reduction in power consumption! Peltier chiller ThermoCube

Compact! Significant reduction in power consumption! Low noise and low vibration! No use of freon gas! Peltier cooling chiller.

The ThermoCube with cooling capacities of 200W, 300W, 400W, and 600W operates with whisper-like quietness and low vibration, maintaining a temperature stability of ±0.05°C even near room temperature. The core electronic temperature control module has a lifespan exceeding 200,000 hours and is equipped with a universal power supply compatible with power sources worldwide. It offers numerous options and features a design that allows for easy customization. This chiller is environmentally friendly and does not use refrigerant gases. *Please contact us for information regarding options.

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Optimal Peltier Chiller for Laser Equipment - ThermoCube

Compact! Significant reduction in power consumption! Low noise and low vibration! No use of freon gas! Peltier cooling chiller.

The ThermoCube with cooling capacities of 200W, 300W, 400W, and 600W maintains whisper-quiet operation and low vibration, achieving a temperature stability of ±0.05°C even near room temperature. The core electronic temperature control module has a lifespan exceeding 200,000 hours and is equipped with a universal power supply compatible with power sources worldwide. It offers numerous options and features a design that allows for easy customization. It is an environmentally friendly chiller that does not use refrigerant gases. *Please contact us for information regarding options.

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Have you completed your measures against fluorocarbons? Peltier cooler TCubeEdge.

Compact! Accurate temperature control! Freon-free! Peltier cooling chip.

The TCubeEdge, with a maximum cooling capacity of 290W, optimizes the performance of your equipment with excellent temperature reliability, resulting in high profitability. The TCubeEdge quickly responds to changes in the temperature of circulating water, achieving a reproducibility of ±0.05°C even near room temperature in temperature control from 0°C to 65°C. The centrifugal pump, which ensures smooth flow, operates without vibration and can meet the temperature control requirements for various applications in lasers, optics, and analytical instruments. Equipped with an electronic temperature control module that lasts over 200,000 hours, the TCubeEdge operates with minimal noise and vibration due to the absence of a compressor and very few moving parts. It is also an environmentally friendly product as it does not use freon.

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Peltier Cooling Chiller TCubeEdge

Compact! Accurate temperature control! Excellent cost performance Peltier cooling chiller.

The TCubeEdge, with a maximum cooling capacity of 290W, optimizes the performance of your equipment with excellent temperature reliability, resulting in high profitability. The TCubeEdge quickly responds to changes in the temperature of circulating water, achieving a reproducibility of ±0.05°C even near room temperature in temperature control ranging from 0°C to 65°C. The centrifugal pump, which ensures smooth flow, operates without vibrations and can meet the temperature control requirements for various applications in lasers, optics, and analytical instruments. The TCubeEdge, equipped with an electronic temperature control module with a lifespan exceeding 200,000 hours, operates with minimal noise and vibration due to the absence of a compressor and very few moving parts. It is an environmentally friendly product as it does not use freon.

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Plasma Etcher Chiller "ThermoRack1201"

Optimal for plasma etching in semiconductor manufacturing processes! Up to 93% reduction in power consumption! Prevents noise and vibration as well!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without the use of refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan for the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Have you completed your measures against refrigerants? Peltier cooler UC series.

Super compact! Quiet operation! Accurate temperature control! Freon-free! Peltier cooling chip.

Ultra-compact, quiet operation. It provides precise temperature control with the most reliable electronic temperature control module. It quickly responds to changes in circulating water temperature, maintaining temperature stability of ±0.1℃ even near room temperature. This palm-sized chiller can be easily installed inside or on top of equipment. Additionally, the standard RS232C interface allows for easy external control. It is an environmentally friendly chiller that does not use refrigerant gases.

  • Chiller

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Ideal for small laser devices! Peltier chiller TCubeEdge

Compact! Low noise, low vibration, and precise temperature control! Excellent cost performance for Peltier cooling chillers!

The TCubeEdge, with a maximum cooling capacity of 290W, optimizes the performance of your equipment with excellent temperature reliability, resulting in high profitability. The TCubeEdge quickly responds to temperature changes in circulating water, achieving a reproducibility of ±0.05°C even near room temperature in temperature control ranging from 0°C to 65°C. The centrifugal pump, which ensures smooth flow, operates without vibration, making it suitable for various applications requiring temperature control in lasers, optics, and analytical instruments. Equipped with an electronic temperature control module that lasts over 200,000 hours, the TCubeEdge operates with minimal noise and vibration due to the absence of a compressor and very few moving parts. It is also an environmentally friendly product as it does not use Freon.

  • Chiller

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Have you completed your measures against fluorocarbons? 'NIKOLA3K/5K'

High cooling capacity Peltier chiller without refrigerant gas - Ideal for plasma etching in semiconductor manufacturing processes! Reduces power consumption by up to 60%! Prevents noise and vibration!

The "NIKOLA3K/5K" is a high cooling capacity Peltier chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerant gases. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. Compatible with products from major etcher manufacturers! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 60% ■ Simple design with only a pump and cooling fan for the drive unit ■ Reduces noise and vibration

  • Chiller

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Chiller circulating fluid

It has been treated to suppress corrosion, scale, and microbial growth, so you can use it as is without adding anything.

The standard circulating fluid recommended by Thermo Scientific, Thermo Scientific Treated Water, is a 20 L (5-gallon) package of circulating fluid that can be safely used as a chiller circulating fluid. 【Components and Effects】 The main component is water. - Molybdate - Carbon steel corrosion protection - Silica - Aluminum corrosion protection - Borate - pH buffer - Azole - Copper corrosion protection - Isothiazolone - Preservative In cooling systems, it is important to minimize corrosion and water contamination.

  • Other consumables

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High-Power Laser Device Cooling "ThermoFlex Series"

By selecting the specifications for the circulation pump and power supply, as well as equipping various options, we can flexibly accommodate a variety of applications for laser devices.

The "ThermoFlex Series" circulation cooling devices from Thermo Fisher Scientific offer a compact design with cooling capacities ranging from 900 W to 24,000 W, thanks to improvements in cooling and circulation systems, with a lineup of 10 models. 【Features】 ○ Excellent temperature stability of ±0.1℃ ○ Equipped with a powerful circulation pump (supports maximum discharge pressure up to 0.69 MPa) ○ Cooling capacity of 900 W to 24,000 W ○ High-efficiency operation with a heat exchanger ○ Large water inlet and easy-to-read level indicator ○ Options for air-cooled or water-cooled models (TF 900, 15000, 20000 are air-cooled only) ○ A variety of options available, including communication interfaces *For more details, please download the catalog or contact us.

  • Cooling system

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Ideal for small laser devices! Peltier chiller UC series

Ultra-compact! Low vibration, low noise, and high temperature stability. Ideal Peltier temperature control chiller for small laser devices.

Ultra-compact, quiet operation. It provides precise temperature control with the most reliable electronic temperature control module. It quickly responds to changes in circulating water temperature, maintaining temperature stability of ±0.1℃ even near room temperature. This palm-sized chiller can be easily installed inside or on top of equipment. Additionally, the standard RS232C interface allows for easy external control. 【Features】 ■ CCD Camera ■ Diode Laser ■ Medical Equipment ■ Research Equipment ■ Microplate Temperature Control

  • Chiller

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Optimal for laser devices! Peltier chiller 'ThermoRack401'

Ideal for temperature control of laser devices with low vibration, low noise, and excellent temperature stability! Power consumption can also be reduced!

The ThermoRack401 offers high reliability and is ideal for laser applications. The ThermoRack400, with a cooling capacity of 400W, maintains a temperature accuracy of ±0.05℃ even near room temperature. With only two drive components, it achieves whisper-quiet operation and low vibration, meeting the temperature control requirements for advanced optical and laser applications. The core electronic temperature control module has a lifespan exceeding 200,000 hours. 【Features】 ■ Fast temperature response and excellent temperature stability ■ Compact size fitting in a 4U standard 19-inch rack ■ Temperature stability: ±0.05℃ (under no load or constant load) ■ No use of CFC refrigerants ■ Significant reduction in power consumption ■ Reduced noise and vibration

  • Etching Equipment

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Temperature control chiller "ThermoRack1201"

Optimal for plasma etching in semiconductor manufacturing processes! Up to 93% reduction in power consumption! Prevents noise and vibration as well!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Chiller dedicated to bioprocessing

This is an optimal chiller for single-use in bioprocessing.

In recent years, the introduction of single-use technology has rapidly progressed to reduce risks and improve efficiency in bioprocessing. In the manufacturing of biopharmaceuticals, plastic culture bags are used instead of traditional stainless steel culture tanks. By utilizing this new technology, it is expected to streamline biopharmaceutical production by omitting in-place cleaning and sterilization processes, enabling quick responses to multi-product manufacturing, and preventing contamination in the production of highly pharmacologically active drugs.

  • Other semiconductor manufacturing equipment

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Significant reduction in power consumption! Chemical solution temperature control system

By directly controlling the temperature of the drug solution flow tube, we can reduce power consumption by 95% compared to conventional indirect temperature control methods!

Temperature management of the cleaning solution used in semiconductor manufacturing processes is a crucial factor that affects product quality and productivity. This device, which uses a Peltier module, controls the temperature of the cleaning solution to within ±0.05°C. It is a very compact module that directly controls the temperature of the flow path tube, allowing for a reduction in usage by 10-30% compared to traditional methods that use a tank to regulate the solution's temperature. Furthermore, due to its simple structure with no moving parts, it operates without vibration or noise and requires almost no maintenance. ● For more details, please contact us.

  • Chiller

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Thermo Wrap Kit

A groundbreaking product that is environmentally friendly and cost-effective for MOCVD has been introduced!

The Thermo Wrap Kit, which includes a small Peltier chiller and a dedicated heat exchange pad, controls the temperature of the bubbler with an accuracy of ±0.1°C without using a conventional compressor-type open bath. 【Features】 - Precisely controls the temperature of the bubbler at ±0.1°C - Capable of cooling, heating, and controlling around room temperature - Since it is a closed circulation system, there is no evaporation of the coolant, and expensive fluorinated refrigerants are not used - Very easy to use, as you simply wrap the bubbler with the wrap - By using a Peltier chiller, power consumption can be reduced by 80% compared to traditional bath types - Does not use any refrigerants that fall under the revised fluorocarbon law (2015)

  • Chiller

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Significant reduction in power consumption! Peltier chiller 'ThermoRack800'

Optimal for laser temperature control!

The ThermoRack800 offers high reliability and is ideal for laser applications. With a cooling capacity of 700 to 900W, the ThermoRack800 maintains a temperature accuracy of ±0.05℃ even near room temperature. It features only two drive components, achieving whisper-quiet operation and vibration-free performance, making it suitable for the temperature control required in advanced optical and laser applications. The core electronic temperature control module has a lifespan exceeding 200,000 hours. 【Features】 ■ Fast temperature response and high temperature stability ■ Compact size fitting in a 6U standard 19-inch rack ■ Temperature stability: ±0.05℃ (under no load or constant load) ■ No use of fluorocarbon refrigerants ■ Significant reduction in power consumption ■ Reduced noise and vibration

  • Chiller

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Significant reduction in power consumption! Peltier chiller 'ThermoRack401'

Ideal for temperature control of laser devices with low vibration, low noise, and excellent temperature stability! Power consumption can also be reduced!

The ThermoRack401 offers high reliability and is ideal for laser applications. The ThermoRack400, with a cooling capacity of 400W, maintains a temperature accuracy of ±0.05℃ even near room temperature. With only two drive components, it achieves whisper-quiet operation and vibration-free performance, meeting the temperature control requirements for advanced optical and laser applications. The core electronic temperature control module has a lifespan exceeding 200,000 hours. 【Features】 ■ Fast temperature response and excellent temperature stability ■ Compact size fitting in a 4U standard 19-inch rack ■ Temperature stability: ±0.05℃ (under no load or constant load) ■ No use of fluorocarbon refrigerants ■ Significant reduction in power consumption ■ Reduced noise and vibration

  • Etching Equipment

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Significant Power Consumption Reduction Peltier Chiller UC Series

Super compact! Quiet operation! Accurate temperature control! Peltier cooling chip.

Ultra-compact, quiet operation. It provides precise temperature control with the most reliable electronic temperature control module. It quickly responds to changes in circulating water temperature, maintaining temperature stability of ±0.1℃ even in the vicinity of room temperature. This palm-sized chiller can be easily installed inside or on top of equipment. Additionally, the standard RS232C interface allows for easy external control.

  • Chiller

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Low vibration, low noise Peltier chiller ThermoRack800

Optimal for laser temperature control!

The ThermoRack800 offers high reliability and is ideal for laser applications. With a cooling capacity of 700 to 900W, the ThermoRack800 maintains a temperature accuracy of ±0.05℃ even near room temperature. It features only two drive components, achieving whisper-quiet operation and vibration-free performance, making it suitable for the temperature control required in advanced optical and laser applications. The core electronic temperature control module has a lifespan exceeding 200,000 hours. 【Features】 ■ Fast temperature response and high temperature stability ■ Compact size fitting in a 6U standard 19-inch rack ■ Temperature stability: ±0.05℃ (under no load or constant load) ■ No use of CFC refrigerants ■ Significant reduction in power consumption ■ Reduced noise and vibration

  • Etching Equipment

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Significant reduction in power consumption! Peltier chiller 'ThermoRack1201'

Optimal for plasma etching in semiconductor manufacturing! Up to 93% reduction in power consumption! Prevents noise and vibration as well!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with quick temperature responsiveness and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving quality variations between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Peltier Cooling Chiller UC Series

Super compact! Quiet operation! Accurate temperature control! Peltier cooling chip.

Ultra-compact, quiet operation. It provides precise temperature control thanks to the most reliable electronic temperature control module. It quickly responds to changes in circulating water temperature, maintaining temperature stability around room temperature within ±0.1℃. This palm-sized chiller can be easily installed inside or on top of the equipment. Additionally, the standard RS232C interface allows for easy external control.

  • Chiller

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Low Temperature Bus Circulator VersaCool

Compact yet provides ample workspace.

- A compact housing without controller heads or cooling coils inside the bus. - Energy-saving operation achieved by adopting an inverter compressor, stepper valve, and speed-adjustable DC fan. - Equipped with a 5.7-inch color touchscreen for excellent operability. *For more details, please download the catalog or contact us.*

  • Cooling system

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Low Temperature Bus Circulator ARCTIC Series

It is possible to freely combine 5 types of controllers with 10 types of bus bodies.

Environmentally Friendly Design Up to 80% Energy Reduction ● All units are RoHS compliant ● Use of recycled materials Safe Operation All units are UL/CSA compliant, ensuring safe operation under all conditions ● IQ/OQ compliance Easy Operation Adoption of an easy-to-use interface ● Quick start ● Controller can be installed in any orientation

  • Piping Materials

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Constant Temperature Bath Circulator SAHARA Series

It is possible to freely combine 5 types of controllers with 14 types of bus bodies.

5 Types of Controllers ● ~ +200℃ ● ±0.01 ℃ Acrylic Bath Made of high-quality acrylic resin, it is ideal for applications that require observation within the tank. *Operating temperature range: ~60℃ Polyphenylene Oxide Bath Made of polyphenylene oxide resin, it excels in heat retention, insulation, impact resistance, and cost-effectiveness. *Operating temperature range: ~100℃ Stainless Steel Bath Made of stainless steel, it offers excellent heat resistance and durability, and is easy to clean. *Operating temperature range: ~200℃

  • Piping Materials

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Bus Circulator ThermoTemp Series

A wide variety of combinations is possible. Compatible with various applications.

The "Thermo Temp Series" bath circulators from Thermo Fisher Scientific allow for flexible combinations of controllers, bath bodies, accessories, and optional services, enabling configurations tailored to specific applications. The diverse combinations make it possible to accommodate a wide range of applications.

  • incubator

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