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We would like to introduce technical data regarding the temperature dependence of discoloration for Ar Cleaning No. 20 (super high sensitivity type). The verification results showed a tendency for the color difference ΔE*ab to increase with higher temperature conditions. Under the same temperature conditions, it was found that the card type generally exhibited a larger color difference ΔE*ab than the label type, and this difference was more pronounced at lower temperatures. 【Overview】 ■ RF Plasma Device (manufactured by Arios Co., Ltd.) ■ RF Power: 60W ■ Ar Gas Flow Rate: 40 sccm ■ Achieved Vacuum Level: 5×10^-4 Pa ■ Processing Pressure: 10 Pa ■ Stage Temperature: 25–100℃ *For more details, please refer to the related links or feel free to contact us. *The first image is the card type, and the second image is the label type.

• Special labels, etc.

We would like to introduce technical data regarding the temperature dependence of discoloration for O2 cleaning No.3 (low sensitivity type). Both card type and label type were verified. In both cases, it was observed that the color difference ΔE*ab before and after treatment tends to increase with higher temperatures. Additionally, the "PLAZMARK O2 cleaning" used reacts with O2 radicals, making it applicable for UV cleaning and UV ozone cleaning as well. 【Overview】 ■ RF plasma device (manufactured by Arios Co., Ltd.) ■ RF power: 60W ■ O2 gas flow rate: 40sccm ■ Achieved vacuum level: 5×10^-4Pa ■ Processing pressure: 10Pa ■ Stage temperature: 25–100℃ *For more details, please refer to the related links or feel free to contact us. *The first image is the card type, and the second image is the label type.

• Special labels, etc.

We installed the wafer with a gap and evaluated the movement of reactive species entering that gap using "PLAZMARK Heat Resistant" No. 101 attached to the back of the wafer. Comparing Ar plasma treatment and O2 plasma treatment, the O2 plasma treatment caused discoloration even at the center of the back side of the wafer, suggesting the presence of long-lived oxygen radicals that can wrap around. Additionally, since the back side of the wafer did not discolor with Ar plasma treatment, it is believed that Ar ions do not wrap around to the back side. 【Discharge Conditions】 ■ RF Plasma Device (Arios Co., Ltd.) - Ar gas = 5Pa, Power = 80W, Time = 60sec - O2 gas = 5Pa, Power = 80W, Time = 30sec *For more details, please refer to the related links or feel free to contact us.

• Special labels, etc.

We will introduce the technical data from the Ar plasma treatment, where plasma indicators for O2 cleaning (No.1) and Ar cleaning (No.22) were installed on the electrode side of the substrate bias application. As the substrate bias increases (0 to 50W), the color difference of the Ar cleaning indicator, which is prone to discoloration by ions, significantly increases, while the O2 cleaning indicator, which discolors due to radicals, shows only a slight increase. It is believed that the Ar cleaning indicator is detecting the increased irradiation of Ar ions due to the bias. 【Discharge Conditions】 ■ Ar gas = 5Pa ■ Power = 80W ■ Time = 30sec *For more details, please refer to the related links or feel free to contact us.

• Special labels, etc.

We examined the effect of plasma treatment on luminescence depending on the presence or absence of an MgF2 cover. As a result of simultaneously treating indicators with and without an MgF2 cover using Ar or O2 plasma, the indicators with the MgF2 cover showed almost no discoloration. From this, we concluded that the effect of plasma luminescence on the discoloration of plasma indicators is very small. [Overview] ■ Experiment Details - Indicators with and without an MgF2 cover were simultaneously treated with Ar or O2 plasma. ■ Experiment Results - The indicators with the MgF2 cover showed almost no discoloration. ■ Conclusion - The effect of plasma luminescence on the discoloration of plasma indicators is very small. *For more details, please refer to the related links or feel free to contact us.

• Special labels, etc.

We would like to introduce the temperature dependence of discoloration in wafer-type ceramic (sapphire substrate) technical data. When the wafer-type ceramic was heated to 400°C and subjected to plasma treatment, a tendency for the color difference to decrease was observed with Ar plasma, while an increase in color difference was observed with O2 plasma. Although there is a temperature dependence on discoloration, it was confirmed that it can still be used as an indicator even at 400°C. 【Overview of Ar/O2 Plasma Treatment】 ■ Method: CCP (RF) ■ Initial Vacuum Level: 5.0×10^-4 Pa ■ RF Power: 50 W ■ Gas Flow Rate: 40 sccm ■ Treatment Gas Pressure: 10 Pa ■ Treatment Time: 10 minutes *For more details, please refer to the related links or feel free to contact us. *The first image shows Ar plasma treatment, and the second image shows O2 plasma treatment.

• Other inspection equipment and devices

We would like to introduce the temperature dependence of discoloration in wafer-type ceramic types (Si substrate) technical data. When the "PLAZMARK" wafer-type ceramic type was heated to 400°C and subjected to plasma treatment, a tendency for the color difference to decrease was observed with Ar plasma, while a tendency for the color difference to increase was observed with O2 plasma. Although there is a temperature dependence of discoloration, it has been confirmed that it can still be used as an indicator at 400°C. 【Overview of Ar/O2 Plasma Treatment】 ■ Method: CCP (RF) ■ Initial Vacuum Level: 5.0×10^-4 Pa ■ RF Power: 50 W ■ Gas Flow Rate: 40 sccm ■ Treatment Gas Pressure: 10 Pa ■ Treatment Time: 10 minutes *For more details, please refer to the related links or feel free to contact us. *The first image is from Ar plasma treatment, and the second image is from O2 plasma treatment.

• Other inspection equipment and devices

We would like to introduce the results of confirming the discoloration of the areas with and without a mask after plasma treatment, where part of "PLAZMARK" was masked. The unmasked areas showed yellow discoloration with O2 plasma and gray discoloration with Ar plasma, while no discoloration was observed in the masked areas. The conclusion is that heat-resistant NO.101 only discolors in the areas exposed to plasma, allowing us to observe the effects of patterning with a metal mask and the influence of obstructions. 【Plasma Treatment Conditions (Partial)】 ■Gas Type: O2 ・Gas Flow Rate (sccm): 40 ・Treatment Pressure (Pa): 10 ・Power (W): 100 ・Treatment Time (min): 5 *For more details, please refer to the related links or feel free to contact us.

• Special labels, etc.

We would like to introduce the temperature dependence of discoloration for O2 cleaning No.1 (high sensitivity type) technical data. In all cases, a tendency was observed that the color difference ΔE*ab before and after treatment increases with higher temperatures. "PLAZMARK O2 Cleaning" is an indicator optimized for detecting radical plasmas such as O2, N2, Air, CF4, H2, and NH3. It reacts to O2 radicals, making it applicable for UV cleaning and UV ozone cleaning as well. 【Overview (Card Type)】 ■ RF Plasma Device (Arios Co., Ltd.) ■ RF Power: 60W ■ Ar Gas Flow Rate: 40sccm ■ Achieved Vacuum Level: 5×10^-4Pa ■ Processing Pressure: 10Pa ■ Stage Temperature: 25–100℃ *For more details, please refer to the related links or feel free to contact us. *The first image is the card type, and the second image is the label type.

• Special labels, etc.

Three PLAZMARK labels were attached to plastic writing instruments and subjected to corona treatment, followed by visual inspection of the discoloration of the indicators and color difference measurement. As equipment, corona discharge was used for pre-treatment before printing on plastic writing instruments. Traditionally, a wet reagent was used for inspection at the start of operations, and if the values were outside the standard, the output value was increased, or the wire electrodes were cleaned and adjusted. As a result, the color difference was small, but it was possible to visually distinguish the intensity, making it useful for evaluating treatment distribution, which was difficult to assess with the wet reagent. [Evaluation] ■ Plasma Indicator: PLAZMARK Atmospheric Pressure Label No. 41 High Sensitivity ■ Color Difference Meter: Konica Minolta Fluorescent Spectrophotometer FD-5 (Measurement Light Source M1, Illumination System C Light Source, 2° Viewing Angle) *For more details, please refer to the related links or feel free to contact us.

• Special labels, etc.

We investigated the extent of discoloration caused by commercially available ozone disinfection and deodorization devices for general household use. As a result, when an indicator was installed on the side of the air outlet and operated overnight, there was almost no discoloration. Subsequently, when the indicator was repositioned to directly face the air outlet and operated overnight, it showed almost complete discoloration. Assuming an ozone concentration of 0.06 ppm, a simple calculation of the CT value after 14 hours of operation yields 0.06 ppm × 14 hours × 60 minutes = CT value of 50.4 ppm·min, which closely matched the discoloration observed with the experimental ozone generator. [Experiment Overview] ■ Device: A commercially available device that generates ozone adjusted to below the environmental standard (0.06 ppm) as stipulated by the Basic Environmental Law. ■ Test Conditions: An unmanned conference room of approximately 35 m² (volume about 100 m³), operated overnight without lighting. The airflow was set to "medium." *For more details, please refer to the related links or feel free to contact us.

• Special labels, etc.

We investigated the discoloration caused by ozone gas on PLAZMARK O2 cleaning cards No. 1 to 3, which react with various radical species, and long labels No. 41 and 42 for atmospheric pressure plasma. The O2 cleaning cards No. 1 to 3, designed to discolor when reacting with various radical species in vacuum plasma, also discolor when exposed to ozone gas, which is a type of reactive oxygen species, under normal temperature and pressure. When the three types of O2 cleaning cards were treated in a vacuum plasma device, the color difference was found to be No. 1 high sensitivity > No. 2 medium sensitivity > No. 3 low sensitivity; however, in response to ozone gas, the results showed No. 1 high sensitivity ≈ No. 2 medium sensitivity > No. 3 low sensitivity, indicating different responsiveness. [Discoloration Test with Ozone Gas (Partial)] ■ Ozone Generator: Ozone generator OW-5 manufactured by IHI Agritech Co., Ltd. ■ Ozone Monitor: EG-2001 manufactured by Ebara Jitsugyo Co., Ltd. ■ Color Difference Meter: FD-5 fluorescent spectrophotometer manufactured by Konica Minolta (Measurement light source M1, illumination system C light source, 2° viewing angle) *For more details, please refer to the related links or feel free to contact us.

• Plasma surface treatment equipment

We would like to introduce the technical data regarding the temperature dependence of discoloration for the heat-resistant label No. 101 (high sensitivity type). In Ar plasma treatment, the color difference ΔE*ab tends to decrease at higher temperature conditions, while in O2 plasma treatment, the color difference ΔE*ab tends to increase at higher temperature conditions, showing the opposite temperature dependence compared to Ar plasma treatment. Additionally, the "PLAZMARK heat-resistant label" has flexibility and adhesion, allowing for easy application and evaluation on substrate surfaces and within devices. 【Overview of Ar Plasma Treatment】 - RF Plasma Device (manufactured by Arios Co., Ltd.) - RF Power: 60W - Ar Gas Flow Rate: 40 sccm - Achieved Vacuum Level: 5×10^-4 Pa - Treatment Pressure: 10 Pa - Stage Temperature: 25 to 200℃ 【Overview of O2 Plasma Treatment】 - RF Plasma Device (manufactured by Arios Co., Ltd.) - RF Power: 60W - O2 Gas Flow Rate: 40 sccm - Achieved Vacuum Level: 5×10^-4 Pa - Treatment Pressure: 10 Pa - Stage Temperature: 25 to 200℃ *For more details, please refer to the related links or feel free to contact us.

• Plasma surface treatment equipment

We would like to introduce the technical data regarding the temperature dependence of discoloration for heat-resistant label No. 102 (low sensitivity type). In Ar plasma treatment, the color difference ΔE*ab tends to decrease with higher temperature conditions. In O2 plasma treatment, the color difference ΔE*ab tends to increase with higher temperature conditions, showing a temperature dependence opposite to that of Ar plasma treatment. 【Overview of Ar Plasma Treatment】 ■ RF plasma device (manufactured by Arios Co., Ltd.) ■ RF power: 60W ■ Ar gas flow rate: 40 sccm ■ Achieved vacuum level: 5×10^-4 Pa ■ Treatment pressure: 10 Pa ■ Stage temperature: 25–200℃ 【Overview of O2 Plasma Treatment】 ■ RF plasma device (manufactured by Arios Co., Ltd.) ■ RF power: 60W ■ O2 gas flow rate: 40 sccm ■ Achieved vacuum level: 5×10^-4 Pa ■ Treatment pressure: 10 Pa ■ Stage temperature: 25–200℃ *For more details, please refer to the related links or feel free to contact us.

• Plasma surface treatment equipment

We would like to introduce the technical data regarding the temperature dependence of discoloration for Ar Cleaning No. 23 (low sensitivity type). There is a tendency for the color difference ΔE*ab to increase with higher temperature conditions. Under the same temperature conditions, the card type generally shows a larger color difference ΔE*ab than the label type, and this difference is more pronounced at lower temperatures. Please feel free to contact us if you have any inquiries. 【Overview (Card Type)】 ■ RF Plasma Device (Arios Co., Ltd.) ■ RF Power: 60W ■ Ar Gas Flow Rate: 40 sccm ■ Achieved Vacuum Level: 5×10^-4 Pa ■ Processing Pressure: 10 Pa ■ Stage Temperature: 25–100℃ *For more details, please refer to the related links or feel free to contact us.

• Plasma surface treatment equipment

Using the No. 40 (ultra-high sensitivity) sheet type for "atmospheric pressure plasma," we will conduct a distribution evaluation using a torch-type atmospheric pressure plasma device. For adhesive applications, bonding is possible even if there are many "sparse" areas, as long as processing is generally completed. Therefore, to achieve efficient processing, we will increase the pitch, resulting in a treatment with many "sparse" areas. In the processing for adhesive applications, only the "dense" areas change color, confirming that the intended treatment has been achieved. Additionally, during the coating application processing, the entire area changed to a light pink color, confirming that uniform processing has been achieved. [Device Information] ■ Device Model: AP-4000R ■ Nozzle Model: RN-041835-SU ■ Color Difference Meter: Konica Minolta fluorescent spectrophotometer FD-9/MYIRO-9 (Measurement light source C, illumination system C light source, 2° field of view) *For more details, please refer to the related links or feel free to contact us.

• Plasma surface treatment equipment

Using No. 41 (high sensitivity) and No. 42 (low sensitivity) of "PLAZMARK atmospheric pressure plasma," we will confirm the color change of the indicators before and after dry air atmospheric pressure plasma treatment, as well as the contact angle of water on PET film and the color difference of the indicators. The No. 41 (high sensitivity) indicator showed a correlation with the contact angle of water on PET film under weak plasma treatment conditions, while the No. 42 (low sensitivity) indicator also showed a correlation with the contact angle of water. For detailed technical data, please refer to the related links. 【Equipment Information】 ■ Equipment Model: AP-2000 manufactured by Denshi Giken Co., Ltd. Dielectric barrier discharge atmospheric pressure plasma device ■ Color Difference Meter: Fluorescent spectrophotometer manufactured by Konica Minolta, Inc. FD-5 (Measurement light source M1, illumination system C light source, 2° viewing angle) *For more details, please refer to the related links or feel free to contact us.

• Plasma surface treatment equipment

Using the No. 41 (high sensitivity) for "atmospheric pressure plasma," we conducted a distribution evaluation of a long-type atmospheric pressure plasma device. As a result, visual inspection revealed detectable unevenness in the treatment by the atmospheric pressure plasma device. The center showed significant discoloration, indicating a bias in plasma treatment. Since we can understand the condition of the currently used device, it can also be utilized for maintenance purposes. Additionally, by using a color difference meter, numerical analysis can be performed, allowing for quantitative evaluation of the distribution within the area. 【Device Information】 ■ Device Model: AP-2000 manufactured by Denshi Giken Co., Ltd. Dielectric barrier discharge atmospheric pressure plasma device ■ Treatment Conditions: CDA: 6SLM, Output 7.5kV, Treatment Speed 300mm/min, Treatment Count 1 time ■ Color Difference Meter: Konica Minolta fluorescent spectrophotometer FD-9/MYIRO-9 (Measurement Light Source C, Illumination System C Light Source, 2° Field of View) *For more details, please refer to the related links or feel free to contact us.

• Plasma surface treatment equipment

When measuring with a color difference meter, the values do not come out the same every time. We would like to introduce a consultation regarding this concern. As for the actual performance of the indicator, our experimental results show that when the same processing is performed, there can be a variation in the color difference value ΔE of about 2 to 3. This includes various factors such as the variation of the color difference meter, the variation of the device (processing) itself, and the variation in discoloration of the indicator itself. *For more detailed information, you can view it through the related links. Please feel free to contact us for more details.

• Plasma surface treatment equipment

I would like to confirm whether the bottom surface of the workpiece has been plasma treated. How should I go about this? Here is a suggestion for your inquiry. Please try placing a large-area indicator under the workpiece during the treatment process. You can determine whether the plasma is properly reaching the bottom surface by checking for discoloration in the area where the workpiece is placed. *For more detailed information, please refer to the related links. Feel free to contact us for further inquiries.

• Plasma surface treatment equipment

The "PLAZMARK Atmospheric Pressure Plasma" is a marker-type plasma indicator that takes the form of a writing instrument. It allows for easy visualization of plasma treatment on small or complex-shaped workpieces. Being a marker type, it is easy to use and helps reduce operational costs. Additionally, it can be used to confirm plasma treatment on flexible materials such as Roll to Roll by marking. 【Features】 ■ Marker type in the shape of a writing instrument ■ Can confirm plasma treatment in narrow areas ■ Can be used on small parts and dark-colored components ■ Can be used on curved surfaces like pipes ■ Easy to use and helps reduce operational costs *For more details, please download the PDF or feel free to contact us.

• Other markings

As an evaluation tool for plasma treatment effects, "PLAZMARK(R)" has expanded its lineup since its launch in 2014 to meet customer needs. Now, as the first product for wafer processes that has been highly requested, we introduce the 'PLAZMARK(R) "Wafer Type" Ceramic Version'! It can be used for evaluating in-plane distribution in wafer processes such as etching and ashing of electronic devices. 【Features】 ■ Achieves high heat resistance (400℃) ■ Clean design suitable for processes such as LED and MEMS ■ Two types of substrates available: silicon and sapphire *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• Wafer

The "Plasma Indicator(TM) PLAZMARK(R)" is an indicator for confirming the effects of plasma treatment using color materials that change color in plasma. It changes color in stages according to plasma density, allowing the state of the plasma to be visualized in color. Since the color change is an irreversible reaction, it can be recorded as a judgment record and used for process management. Additionally, the color change can be easily quantified, allowing for correlation with other measurement results (however, a colorimeter is required for quantification). ★ We are offering free samples. Please feel free to contact us. * Please cooperate with a simple survey. (Please check the basic information at the bottom.) 【Are you facing these situations?】 As usage progresses in various fields... - Are you achieving the desired treatment effects? - Is recipe development going smoothly? - Are you spending too much time adjusting after equipment maintenance? - Are you having trouble with process management? * For more details, please contact us or download the catalog.

• Other consumables

The "Plasma Indicator(TM) PLAZMARK(R)" is an indicator for confirming the effects of plasma treatment using color materials that change color in plasma. It changes color in stages according to plasma density, allowing the state of the plasma to be visualized in color. The color change is an irreversible reaction, so it can be recorded as a judgment record and used for process management. We have launched a new high-sensitivity type (model number: No.101) with excellent color change performance as part of the PLAZMARK "heat resistance" lineup, which has been highly requested. ★ We are offering free samples. Please feel free to contact us. * Please cooperate with a simple survey. (Check the basic information below.) 【Features】 - Achieves high color change sensitivity. - Retains the characteristics of existing products. 【Are you facing these situations?】 As usage expands in various fields... - Are you achieving the desired treatment effects? - Is recipe development going smoothly? - Are you spending too much time adjusting after equipment maintenance? - Are you struggling with process management? * For more details, please contact us or download the catalog.

• Other consumables

The "Plasma Indicator(TM) PLAZMARK(R)" is an indicator used to confirm the effects of plasma treatment using color materials that change color in plasma. It changes color in stages according to plasma density, allowing the state of the plasma to be visualized through color. The color change is an irreversible reaction, so it can be recorded as a judgment record and used for process management. Additionally, the color change can be easily quantified, allowing for correlation with other measurement results (however, a colorimeter is required for quantification). The types of plasma gases include oxygen, nitrogen, argon, carbon tetrafluoride (CF4), hydrogen, chlorine, and ammonia. ★ A video explaining this in an easy-to-understand manner is available below. 【Features】 ■ Simply place it in the device; no complicated equipment operation is required. ■ You can immediately judge the results using color after treatment. ■ The gradual color change allows for detailed evaluation of in-plane distribution. ■ No expensive evaluation equipment is needed, reducing equipment costs. ■ Evaluation time is shortened, leading to an expected overall improvement in productivity. *For more details, please contact us or download the catalog.

• Other consumables

"PLAZMARK Heat Resistance" is an evaluation tool for plasma treatment effects for high-temperature processes. It uses inorganic materials for colorants and polyimide for the substrate. Despite being label-type, it achieves high heat resistance of 200°C. Due to its excellent flexibility and adhesion, it can be freely attached to substrate surfaces and within devices. 【Components】 ■ Protective film ■ Detection part (color-changing material) ■ Base material (polyimide) ■ Release film *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

• Other inspection equipment and devices

Isn't this the situation you are in? As utilization progresses in various fields... - Are you properly confirming the processing effects? - Is recipe development going smoothly? - Are you having trouble with adjustments after equipment maintenance? - Are you struggling with process management? - Are your customers requesting evidence of plasma treatment quality? The "Plasma Indicator(TM) PLAZMARK(R)" is an indicator for confirming the effects of plasma treatment using color materials that change color with plasma. It changes color in stages according to plasma density, allowing you to visualize the state of the plasma "in color." The color change is an irreversible reaction, so it can be recorded as a judgment record and used for process management. Additionally, the color change can be easily quantified, allowing for correlation with other measurement results (however, a colorimeter is required for quantification). ★ We are offering free samples. Please feel free to contact us. * For more details, please inquire or download the catalog.

• Other consumables

The Plasma Indicator TM (Product Name: PLAZMARK) has been well received since its launch two years ago as an evaluation tool that easily visualizes the effects of plasma treatment. Our product lineup has been gradually expanded to include "O2 (oxygen) cleaning," "heat-resistant labels," "Ar (argon) cleaning," and "atmospheric pressure plasma," depending on the process and usage environment. This time, we are launching a new lineup of PLAZMARK "heat-resistant" products, featuring a high-sensitivity discoloration type (Model No. 101) that has been highly requested. 【Features】 ■ Achieves high discoloration sensitivity. ■ Retains the characteristics of existing products. For more details, please contact us or download the catalog.

• Other consumables

"PLAZMARK" is an indicator for confirming the effects of plasma treatment, using color materials that change color with plasma. It gradually changes color according to the intensity of the plasma treatment, allowing the state of the plasma to be visualized in color. The color change can be easily quantified, and correlations with other measurement results can also be observed (however, a color difference meter is required for quantification). In traditional inspection methods, techniques such as "probe method," "step gauge," "contact angle meter," and "wetting reagents" required measurement technology and expertise, were time-consuming, cumbersome, and resulted in variability depending on the operator... With PLAZMARK, anyone can easily evaluate! 【Are you facing any of these situations?】 As usage expands across various fields: - Confirming treatment effects is cumbersome... - Recipe development is not going smoothly... - Concerns about the uniformity of plasma treatment... - Adjustments after equipment maintenance are labor-intensive... - Struggling with process management... - Customers are requesting evidence of plasma process management... ★ It can be introduced at an affordable cost. Free samples are currently available! * For more details, please contact us or download the catalog.

• Other consumables

The "PLAZMARK O2 Cleaning and Ar Cleaning" is an evaluation tool for the effectiveness of plasma treatment in the implementation and post-process stages. The "O2 Cleaning" is optimized for detecting radical plasma and can also be applied to UV cleaning and UV ozone cleaning. The "Ar Cleaning" efficiently detects ionic Ar plasma. In mixed systems with radical-based plasma or gases that serve as radical sources, the O2 Cleaning is more suitable. 【Usage Examples】 ■ Surface modification before plating ■ Surface modification of bonding surfaces such as wire bonding ■ Pre-cleaning before underfill after component mounting ■ Cleaning before sealing electronic devices such as LSI, memory, and MEMS *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

• Other inspection equipment and devices

Because it is invisible, we want to measure plasma accurately. This is a must-see proposal for those who have been measuring manually, aimed at improving measurement efficiency. 'PLAZMARK' is an indicator for confirming the effects of plasma treatment, using color materials that change color with plasma. It gradually changes color according to the intensity of the plasma treatment, allowing you to visualize the state of the plasma in "color." The color change can be easily quantified, and it is also possible to see correlations with other measurement results! (However, a color difference meter is required for quantification.) 【Introducing case studies by issue in PDF!】 - Defects occur about once a month. Procedures are instructed, but there is variation among workers. - Struggled with how to confirm whether the surface modification is uniform on 3D shapes. - Asked to investigate whether there are any issues with our own plasma equipment. - Pointed out variations in quality by line, and constantly busy responding to them every day. - The equipment for confirming the effects of plasma cleaning is expensive and cumbersome to measure. *Please download the PDF to view the case studies.

• Other consumables

The "PLAZMARK Ar Cleaning Type" is a plasma indicator that can be used to evaluate the effectiveness of cleaning and pretreatment processes by utilizing color materials that are sensitive to discoloration in strongly ionic plasmas, such as argon plasma. Additionally, a high-sensitivity type indicator has been commercialized to enhance the discoloration sensitivity that was previously only available in the "Ar Cleaning Type." As a result, it is now possible to use this indicator even for soft Ar plasma treatments and short-duration treatments, which were previously difficult to evaluate. 【Features】 ■ Achieves high sensitivity ■ Simple operation by just placing it in the device ■ Immediate color judgment after processing ■ Gradual color changes allow for detailed evaluation of in-plane distribution ■ Reduces costs as expensive evaluation equipment is not required *For more details, please refer to the catalog or feel free to contact us.

• Other laboratory equipment and containers

The "PLAZMARKⓇ for Desmear" is a label-type indicator that can be applied to the plasma desmear of printed circuit board via holes. It can be used not only with batch-type plasma desmear devices but also with roll-to-roll plasma desmear devices, allowing for easy evaluation of etching amounts comparable to traditional methods through color changes. Additionally, it can be used for powerful plasma treatments with high output and long duration, which may exceed the range of other PLAZMARKⓇ products. 【Features】 ■ Two sensitivity options available ■ Flexible label type ■ Quantification possible with color difference meter ■ No cumbersome weight measurement required ■ Compatible with O2 + CF4 gas *For more details, please refer to the PDF document or feel free to contact us.

• Other laboratory equipment and containers

"PLAZMARK Atmospheric Pressure Plasma" is an evaluation tool for plasma treatment effects aimed at atmospheric pressure processing and cleaning processes. Through the development of new organic color materials, it achieves detection performance specialized for radical species of atmospheric pressure plasma. It is suitable for checking large-area atmospheric pressure (normal pressure) plasma treatments, such as in printed circuit board and FPD manufacturing. It can also be applied to UV cleaning and UV ozone cleaning. *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

• Other inspection equipment and devices

This product is designed without the use of metal elements, making it a safe choice for customers concerned about metal contamination, compared to the currently available wafer-type ceramic products. The surface indicator film utilizes only organic materials, and standard silicon wafers are used as the substrate. It is designed for use in the semiconductor front-end process, ensuring it can be used in a clean process. 【Features】 - Design that does not use metal elements - Surface indicator film utilizes only organic materials - Available in 8-inch and 12-inch sizes *For more details, please refer to the PDF document or feel free to contact us.

• Plasma surface treatment equipment

The "PLAZMARK Wafer Type" is a tool for evaluating the effects of plasma treatment for wafer processes. By using an indicator with the same shape as your substrate, it is easy to visualize the in-plane distribution. Substrate size, material, and discoloration sensitivity can be customized according to your requirements. 【Features】 ■ Ensures cleanliness by using inorganic color materials ■ Reduces emitted gases to the minimum ■ Heat resistance up to 400°C ■ Substrate size and material can be customized according to your requirements *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

• Other inspection equipment and devices

We are currently offering a booklet that explains the plasma treatment effect evaluation tool "PLAZMARK," which changes color continuously according to the processing conditions of the irradiated plasma, in an easy-to-understand manga format! In addition to its usage, mechanism, and differences from general evaluation methods, we also introduce a rich lineup suitable for atmospheric pressure treatment processes, cleaning processes, assembly processes, post-processes, desmear treatment, high-temperature processes, and wafer processes. ★You can immediately view this manga material by clicking the download button. 【Features of "PLAZMARK"】 ■ Easy evaluation with "color." Simple in-plane distribution evaluation. ■ No expensive equipment required. Achieves reduced evaluation time. ■ Check for measurement differences and uniformity to improve efficiency. Contributes to quality stability. *For more details about the product, please refer to the materials or feel free to contact us. ★If you would like a sample, please apply through "Sample Request Here" or the inquiry form.

• Other laboratory equipment and containers

The "PLAZMARK O2 Cleaning and Ar Cleaning" is an evaluation tool for the effects of plasma treatment in the assembly and post-processing stages. The "O2 Cleaning" is suitable for detecting radical plasma. It can also be applied to UV cleaning and UV ozone cleaning. The "Ar Cleaning" uses color materials that have discoloration sensitivity to strongly ionic plasmas, represented by argon plasma, making it a plasma indicator that can be used to evaluate the effectiveness of cleaning and pretreatment processes. A high-sensitivity type of indicator has been commercialized to enhance the discoloration sensitivity of the previously singular "Ar Cleaning." This allows for use in soft Ar plasma treatments and short-duration treatments, which were previously difficult to evaluate. This booklet provides an easy-to-understand explanation of the plasma indicator "PLAZMARK," which uses functional color materials that change color due to active species (radicals and ions) in plasma, illustrated in a manga format.

• Other inspection equipment and devices

We are currently offering a booklet that explains the plasma treatment effect evaluation tool "PLAZMARK," which changes color continuously according to the processing conditions of the irradiated plasma, in an easy-to-understand manga format! 【Seminar Announcement】 ■ Date: Thursday, September 29, 2022 ■ Time: 16:00 - 17:00 ■ Theme: About Color Difference Measurement ■ Participation Method: Free (Pre-registration required) ★ If you wish to participate in the seminar, please apply from "Click here to register for the seminar." 【Features of "PLAZMARK"】 ■ Easy evaluation using "color." Facilitates in-plane distribution assessment. ■ No expensive equipment required. Achieves reduced evaluation time. ■ Checks for measurement differences and uniformity to improve efficiency. Contributes to quality stability. *This manga material can be viewed immediately by clicking the download button.

• Other laboratory equipment and containers

We are currently offering a booklet that explains the plasma treatment effect evaluation tool (plasma indicator) "PLAZMARK," which changes color continuously according to the processing conditions of the irradiated plasma, in an easy-to-understand manga format! In addition to its usage, mechanism, and differences from general evaluation methods, we also introduce a rich lineup for various applications, including atmospheric pressure treatment processes, cleaning processes, assembly processes, post-processing, desmear treatment, high-temperature processes, and wafer processes. ★You can immediately view this manga material by clicking the download button. 【Features of "PLAZMARK"】 ■ Easy evaluation with "color." Facilitates in-plane distribution evaluation. ■ No expensive equipment required. Achieves reduced evaluation time. ■ Checks for measurement deviation and uniformity to enhance efficiency. Contributes to quality stability. *For more details about the product, please refer to the materials or feel free to contact us. ★If you would like a sample, please apply via "Sample Request Here" or through the inquiry form.

• Other inspection equipment and devices

The "PLAZMARK Ultra High Sensitivity Type for Atmospheric Pressure" is a plasma indicator with a short processing time. In a comparison of discoloration samples and color differences after repeated mild plasma treatment, the discoloration speed is more than three times faster than previous high sensitivity types. We offer two shapes: a "Long Label Type" that can be attached, and a "Sheet Type" that allows for distribution evaluation at once. 【Suitable for the following processes】 ■ Fast scan speed (short processing time) ■ Low plasma power ■ Does not discolor with the current high sensitivity No. 41 *For more details, please refer to the related links or feel free to contact us.

• Other laboratory equipment and containers
• Other inspection equipment and devices

The "PLAZMARK Ar Cleaning Use" is a card-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning. It can efficiently detect ionic plasma such as Ar and He, which are hard to detect with O2 cleaning. In mixed systems with radical-based plasma or gases that serve as radical sources, O2 cleaning is more suitable. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Available in three shapes to suit your needs ■ Widely usable in processes such as semiconductor back-end operations *For more details, please refer to the related links or feel free to contact us.

• Other laboratory equipment and containers
• Other inspection equipment and devices

The "PLAZMARK Ar Cleaning Use" is a label-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning methods. It can efficiently detect ionic plasma such as Ar and He, which are hard to detect with O2 cleaning. In addition to this product, we offer three shapes: a "card type" that can be easily installed in areas of interest, and a "sheet type" that can capture distribution over a large area. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Three shapes to choose from according to your needs ■ Widely usable in processes such as semiconductor back-end *For more details, please refer to the related links or feel free to contact us.

• Other laboratory equipment and containers
• Other inspection equipment and devices

The "PLAZMARK Ar Cleaning Use" is a sheet-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning. It can be used in a wide range of scenarios, including surface modification before plating and cleaning before underfill after component mounting. For plasma primarily composed of radicals or in mixed systems with gases that serve as radical sources, O2 cleaning is more suitable. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Three shapes available to choose from according to your needs ■ Widely usable in processes such as semiconductor back-end operations *For more details, please refer to the related links or feel free to contact us.

• Other laboratory equipment and containers
• Other inspection equipment and devices

We would like to introduce our plasma indicator, 'PLAZMARK'. This product is an evaluation tool that uses functional color materials that change color due to active species (radicals and ions) in the plasma. It continuously changes color according to the plasma intensity, allowing for a detailed assessment of the plasma treatment effect. 【Features】 ■ Continuously changes color according to plasma intensity ■ Allows for a detailed evaluation of the plasma treatment effect *For more details, please refer to the related links or feel free to contact us.

• Plasma Generator
• Evaluation Board