日酸TANAKA List of Products and Services

The "S-TORRV02 series" is a very compact pressure regulator with a body diameter of φ35 and a standard distance between faces of 70.5mm. By eliminating the threaded structure in the gas contact area and applying electrolytic polishing as standard, it achieves very high moisture replacement characteristics and particle reduction. All units undergo shipping inspections, including helium leak tests. For corrosive gases, we offer the "SH series," which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts in contact with the gas. 【Features】 ■ Compact model ■ The connection between the body and fittings is welded, and a metal seal structure is adopted for the external seal of the diaphragm section ■ High external sealing capability allows for safe use, especially with high-purity gases ■ Design of a compact outlet panel is possible ■ Suitable for integration into equipment *For more details, please refer to the PDF materials or feel free to contact us.

The "S-TORRV30/30SH series" is a pressure regulator for ultra-high purity gases that incorporates a filter in the flow path of the primary chamber, reducing internal leakage. The connection between the main body and the fittings is welded, and a metal seal structure is used for the external seal of the diaphragm section. With high external sealing performance, it can be safely used even with gases of very high purity. As a standard model for low pressure on the primary side, it is widely used in low-pressure piping, outlet panels, and cylinder cabinets for compressed gases with low filling pressures. 【Features】 ■ Standard model for low pressure on the primary side ■ Developed based on the TORR regulator ■ Eliminates threaded structures in the gas contact area and comes standard with electropolishing ■ Achieves very high moisture replacement characteristics and particle reduction ■ Conducts shipping inspections on all units, including He leak tests *For more details, please refer to the PDF materials or feel free to contact us.

The "S-TORRV50/50SH series" is a pressure regulator developed based on the TORR regulator, which has gained immense trust in semiconductor process gas lines, specifically for ultra-high purity gases. For corrosive gases, we offer the "SH series," which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts in contact with the gas. We conduct a complete inspection, including He leak tests, on all units before shipment. This model is widely used in low-pressure piping and outlet panels that require higher flow rates than the "STV30," as well as in liquefied gas cylinder cabinets. 【Features】 ■ Medium flow model for low pressure on the primary side ■ Eliminates threaded structures in gas contact parts and comes standard with electropolishing ■ Achieves very high moisture replacement characteristics and particle reduction ■ The connection between the main body and fittings is welded, and the external seal of the diaphragm section employs a metal seal structure ■ High external sealing capability allows for safe use, especially with high-purity gases *For more details, please refer to the PDF document or feel free to contact us.

The "S-TORRV1300 series" is a pressure regulator for ultra-high purity gases, widely used in primary pressure reduction equipment such as cylinder cabinets as a standard model for primary high pressure. The connection between the main body and fittings is welded, and a metal seal structure is adopted for the external seal of the diaphragm section. With high external sealing performance, it can be used safely even with gases of high purity. A filter is built into the flow path of the primary chamber to reduce internal leak occurrences. 【Features】 ■ Standard model for primary side high pressure ■ Developed based on the TORR regulator ■ Eliminates threaded structures in gas contact areas and comes standard with electropolishing ■ Achieves very high moisture replacement characteristics and particle reduction ■ Conducts shipping inspections on all units, including He leak tests *For more details, please refer to the PDF document or feel free to contact us.

The "S-TORRV2300 series" is a pressure regulator developed based on the TORR regulators, which have gained immense trust in semiconductor process gas lines, designed for ultra-high purity gases. By eliminating the threaded structure in the gas contact area and applying electrolytic polishing as standard, it achieves very high moisture replacement characteristics and particle reduction. A helium leak test is conducted for all units as part of the shipping inspection. For corrosive gases, we offer the "SH series," which uses a highly corrosion-resistant Ni-Cr-Mo alloy. Please contact us for more information. 【Features】 ■ Medium flow model for high pressure on the primary side ■ The connection between the main body and fittings is welded, and a metal seal structure is adopted for the external seal of the diaphragm section ■ High external sealing capability allows for safe use even with gases of high purity ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrences ■ Widely used in primary pressure reduction equipment such as cylinder cabinets *For more details, please refer to the PDF document or feel free to contact us.

The "S-TORRV2300SH/2300AH series" is a pressure regulator for corrosive gases. The "STV2300SH series" uses highly corrosion-resistant Ni-Cr-Mo alloy for components that are particularly affected by corrosive gases, referred to as key components, while the "STV2300AH series" employs this alloy for all metal parts in contact with the gas of the regulator body. By eliminating the threaded structure in the gas contact area and applying electropolishing as standard, we achieve very high moisture replacement characteristics and particle reduction. 【Features】 ■ Models for corrosive gases ■ Developed based on TORR regulators ■ The connection between the body and fittings is welded, and a metal seal structure is used for the external seal of the diaphragm section ■ High external sealing capability allows for safe use even with highly pure gases ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrences *For more details, please refer to the PDF document or feel free to contact us.

The "S-TORRVA10 series" is a pressure regulator compatible with negative pressure control, designed for use in cylinder cabinets that supply low vapor pressure liquefied gases under negative pressure. By eliminating springs from the gas contact area, the risk of particle generation is reduced. It employs a tide diaphragm type. For corrosive gases, we offer the "SH series," which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts in contact with gas. 【Features】 ■ Developed based on the TORR regulator ■ Eliminates screw structures in the gas contact area and comes standard with electropolishing ■ Achieves very high moisture replacement characteristics and reduces particles ■ Incorporates a filter in the flow path of the primary chamber to reduce internal leak occurrence ■ Conducts shipping inspections, including He leak tests, on all units *For more details, please refer to the PDF materials or feel free to contact us.

The "S-TORRVT50 series" is a pressure regulator designed for ultra-high purity gases, featuring a structure that is robust for the supply of liquefied gases, utilizing a tide diaphragm system. By eliminating the threaded structure in the gas contact area and applying electrolytic polishing as standard, it achieves very high moisture replacement characteristics and particle reduction. The removal of springs from the gas contact area reduces the risk of particle generation. By providing heated supply, it can accommodate gases with a vapor pressure of 1.0 MPa or higher, with a maximum operating pressure of 2.5 MPa. 【Features】 ■ Tide diaphragm type for liquefied gases ■ Developed based on the TORR regulator ■ Incorporates a filter in the flow path of the primary chamber to reduce internal leak occurrences ■ Conducts a complete inspection, including He leak tests, for all units shipped *For more details, please refer to the PDF document or feel free to contact us.

The "S-TORRV1900 Series" is a pressure regulator specifically designed for diborane, engineered to operate at an optimal intermediate pressure that minimizes internal leaks and makes it difficult to generate decaborane. The connection between the main body and fittings is welded, and the external seal of the diaphragm section employs a metal seal structure. With high external sealing performance, it can be used safely even with high-purity gases. The S-TORR regulator is a high-purity gas pressure regulator developed based on the TORR regulator, which has gained immense trust in semiconductor process gas lines. 【Features】 ■ Two-stage pressure reduction model exclusively for diborane ■ Elimination of threaded structures in the gas contact area, with standard electropolishing ■ Achieves very high moisture replacement characteristics and particle reduction ■ Comprehensive shipping inspection, including He leak tests, conducted on all units ■ Designed to operate at an optimal intermediate pressure that minimizes internal leaks and makes it difficult to generate decaborane *For more details, please refer to the PDF materials or feel free to contact us.

The "TORR-30 Series" is a high-purity gas pressure regulator designed for use in various applications after pressure reduction, such as valve boxes and piping down to indoor areas, serving as a standard model for low-pressure primary use. Production of electropolished specifications is also possible. Assembly is conducted in a clean room with a class 1000 standard at 0.3μm for all units. The TORR series is known as the "representative of semiconductor gas pressure regulators," earning high trust due to its long track record. 【Features】 ■ Standard model for low-pressure primary side ■ Assembly conducted in a clean room with a class 1000 standard at 0.3μm for all units ■ Built-in filter in the primary chamber flow path to reduce internal leak occurrence ■ Comprehensive shipping inspection, including He leak tests, conducted on all units ■ Production of electropolished specifications is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-50/80 Series" is a high-purity gas pressure regulator that undergoes a complete inspection, including He leak testing, for all units shipped. Assembly is conducted in a clean room with a class 1000 standard at 0.3μm for all units. A filter is built into the flow path of the primary chamber to reduce the occurrence of internal leaks. It can be used as a medium flow model for low pressure on the primary side, suitable for applications such as primary pressure reduction of liquefied gases and regulators used in piping that requires flow control. 【Features】 ■ Medium flow model for low pressure on the primary side ■ Assembly is conducted in a clean room with a class 1000 standard at 0.3μm for all units ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrence ■ Complete inspection, including He leak testing, is conducted for all units shipped ■ Custom manufacturing of electropolished products is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-150 series" is a high-purity gas pressure regulator with a gas-contact metal surface roughness of Ra 0.25 μm, and it is also capable of producing electropolished specifications. The TORR series is known as the "standard for semiconductor gas pressure regulators" due to its long-standing track record and high reliability. All units undergo a complete shipping inspection, including a He leak test. It can be used for applications such as primary pressure reduction of liquefied gases and regulators for piping that requires high flow rates, as a large flow model for low primary pressure. 【Features】 ■ Medium flow model for low primary pressure ■ Assembly is conducted in a clean room with a class 1000 standard at 0.3 μm ■ Complete shipping inspection, including He leak tests, is performed on all units ■ Electropolished specifications can also be produced (gas-contact metal surface roughness Ra 0.25 μm) *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-350 Series" is a pressure regulator designed for high flow rates in low-pressure primary applications, suitable for use in large flow supply systems for liquefied gases and large-diameter piping. Production of electropolished specifications is also possible. We conduct shipping inspections, including He leak tests, on all units. Assembly is performed in a clean room with a class 1000 rating at 0.3μm for all units, and since there is no built-in filter, please install a filter in the piping. 【Features】 ■ High flow rate model for low-pressure primary side ■ Assembly is performed in a clean room with a class 1000 rating at 0.3μm for all units ■ Shipping inspections, including He leak tests, are conducted on all units ■ Production of electropolished specifications is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) ■ Usable in large flow supply systems for liquefied gases and large-diameter piping *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-800 Series" is one of the largest pressure regulators in the TORR series. You can choose between the "TORR-800G Series," which features a pressure adjustment handle that operates with the same feel as a standard pressure regulator, and the "TORR-800M Series," which is a pilot-operated model capable of supplying a larger flow rate. Additionally, there is the "TORR-800F Series," which can supply an even larger flow rate than the "TORR-800M Series." Please contact us if you require a higher flow rate. 【Features】 ■ High flow rate model for low pressure on the primary side ■ Assembly is conducted in a clean room with a class 1000 standard for all units ■ Comprehensive shipping inspections, including He leak tests, are performed on all units ■ One of the largest sizes in the TORR series *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-1300 Series" is a pressure regulator that is synonymous with "pressure regulators for semiconductor gas," having earned high trust due to its long track record. It incorporates a filter in the flow path of the primary chamber to reduce internal leakage. Assembly is conducted in a clean room with a class 1000 standard for all units. It is widely used as a standard model for primary pressure reduction equipment such as cylinder cabinets. 【Features】 ■ Standard model for high pressure on the primary side ■ Assembly is conducted in a clean room with a class 1000 standard for all units ■ Incorporates a filter in the flow path of the primary chamber to reduce internal leakage ■ Conducts shipping inspections, including He leak tests, for all units ■ Custom manufacturing of electropolished products is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-2300 series" is a pressure regulator for high-purity gases that can also be manufactured with an electropolished specification. The TORR series is a pressure regulator that has earned high trust due to its long track record, often referred to as the "symbol of pressure regulators for semiconductor gases." It conducts a complete inspection, including He leak tests, on all units before shipment. As a medium flow model for primary high pressure, it is used in primary pressure reduction equipment that requires higher flow than the "TORR-1300," as well as in primary pressure reduction equipment for liquefied gases with high vapor pressure. 【Features】 ■ Medium flow model for primary high pressure ■ Assembly is conducted in a clean room with a class 1000 standard at 0.3μm ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrence ■ Complete inspection, including He leak tests, is conducted on all units before shipment ■ Electropolished specifications can also be manufactured (surface roughness of gas-contacting metal parts Ra0.25μm) *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-2500 series" is a pressure regulator that is synonymous with "pressure regulators for semiconductor gas" and has earned high trust due to its long track record. It can be used in gas supply systems that require higher flow rates than the "TORR-2300" model, designed for high-pressure applications. We conduct shipping inspections on all units, including He leak tests. Assembly is performed in a clean room with a class 1000 standard at 0.3μm, and since it does not have a built-in filter, please install a filter in the piping. 【Features】 ■ High-flow model for primary high pressure ■ Assembly is performed in a clean room with a class 1000 standard at 0.3μm ■ Built-in filter in the primary chamber flow path reduces internal leak occurrences ■ Shipping inspections, including He leak tests, are conducted on all units ■ Usable in gas supply systems that require higher flow rates than the "TORR-2300" *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-3300 series" is a high-flow model for primary high pressure, capable of supplying up to 220m3/h (nor). All units undergo shipping inspections, including He leak tests. Since it does not have a built-in filter, please install a filter in the piping. We will manufacture according to your desired specifications, so please feel free to contact us when you need assistance. 【Features】 ■ A pressure regulator that can be called the "symbol of semiconductor gas pressure regulators" ■ All units undergo shipping inspections, including He leak tests ■ High-flow model for primary high pressure ■ Capable of supplying up to 220m3/h (nor) ■ Does not have a built-in filter *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-2800/2800SH series" is a regulator designed to supply corrosive and liquefied gases at high flow rates. A helium leak test is conducted on all units as part of the shipping inspection. Assembly is performed in a clean room with a class 1000 standard at 0.3μm for all units. A filter is built into the flow path of the primary chamber to reduce internal leak occurrences. 【Features】 ■ A pressure regulator that can be called the "symbol of semiconductor gas pressure regulators" ■ Assembly is performed in a clean room with a class 1000 standard at 0.3μm for all units ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrences ■ A helium leak test is conducted on all units as part of the shipping inspection ■ A regulator designed to supply corrosive and liquefied gases at high flow rates *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-H Series" is a model capable of high-pressure control on the secondary side. It incorporates a filter in the flow path of the primary chamber to reduce internal leaks. Assembly is conducted in a clean room with a class 1000 standard for all units. Products with electropolished specifications can also be manufactured, and all units undergo shipping inspections, including He leak tests. 【Features】 ■ Assembly is conducted in a clean room with a class 1000 standard for all units ■ A filter is incorporated in the flow path of the primary chamber to reduce internal leaks ■ All units undergo shipping inspections, including He leak tests ■ Products with electropolished specifications can also be manufactured (surface roughness Ra 0.25μm for gas-contacting metal parts) ■ High-pressure control on the secondary side is possible (up to 15 MPa) *For more details, please refer to the PDF document or feel free to contact us.

The "TORR-L Series" is a regulator capable of controlling secondary low pressure. Production of electropolished specifications is also possible. Assembly is conducted in a clean room of class 1000 with a particle size of 0.3μm. We conduct shipping inspections on all units, including He leak tests. 【Features】 ■ Assembly is conducted in a clean room of class 1000 with a particle size of 0.3μm ■ Shipping inspections, including He leak tests, are conducted on all units ■ Production of electropolished specifications is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) ■ Capable of controlling secondary low pressure *For more details, please refer to the PDF document or feel free to contact us.

The "pressure gauge" is a peripheral device for ultra-high purity gas that can accommodate the megabit to gigabit era. It is manufactured under strict quality control in a clean environment. A helium leak test is included, and all units undergo inspection before shipment. Additionally, we also handle "line filters" that are compact and lightweight, allowing for reduced piping space. 【Features】 ■ Capable of accommodating the megabit to gigabit era ■ Manufactured under strict quality control in a clean environment ■ All units undergo inspection before shipment, including helium leak tests ■ Custom manufacturing of electropolished products is possible ■ Usable with S-TORR and TORR regulators *For more details, please refer to the PDF materials or feel free to contact us.

The "TPS Series" is a pressure switch that uses SUS316L and SUS316 materials. It is lightweight, compact, and easy to handle. The connection parts guarantee a helium leak rate of 1.3×10^-10 Pa·m³/sec or less due to the fully welded structure. Additionally, we also handle the vacuum generator "TE-140 Series," which obtains suction power by continuously supplying nitrogen or air. 【Features】 ■ Made of SUS316L and SUS316 materials ■ Guarantees a helium leak rate of 1.3×10^-10 Pa·m³/sec or less ■ Custom manufacturing of electropolished products is possible ■ Lightweight, compact, and easy to handle ■ Pressure settings can be changed *For more details, please refer to the PDF document or feel free to contact us.

We plan to exhibit and demonstrate our S-TORRV series pressure regulators for semiconductor material gases, as well as the automatic pipe welding machines and peripheral equipment from Germany's Orbitalum, at "Semicon Japan 2024." The "Orbitalum automatic pipe welding machine" allows us to create workpiece mock-ups using our in-house 3D printer for complex-shaped workpieces, enabling us to visually confirm the application of the welding head. Additionally, the "S-TORRV series" features a structure without a threaded design in the gas connection area, minimizing dead space as much as possible, which contributes to efficient gas supply. [Exhibited Items] ■ Exhibition and demonstration of the automatic pipe welding machines and peripheral equipment from Germany's Orbitalum ■ New products in the S-TORRV series pressure regulators for semiconductor material gases ・S-TORRV 01iF series ・S-TORRV 1301 series *For more details, please download the PDF or feel free to contact us.

We are currently offering a selection guide titled "Guide to Selecting Pressure Regulators," which summarizes information on various pressure regulators (pressure-reducing valves) that we handle. You can smoothly view information on products of interest categorized by application, such as gas cutting and welding, arc welding, analytical devices, and semiconductor manufacturing. Please make use of this guide to enhance the efficiency of selecting pressure regulators, which is becoming increasingly complex. 【Helpful Points】 ◎ Easy to find pressure regulators suitable for your application from a rich lineup ◎ Explanations on special specifications and structures are also included ◎ Click on the links within the document to immediately access detailed product information ◎ A wealth of basic knowledge (tips) such as unit conversions and terminology explanations is also included *This document can be viewed via "PDF Download." Please feel free to contact us with any inquiries.