HUGパワー List of Products and Services

The "Core Module" is a two-fluid cleaning module that supersonically injects steam and liquid from a nozzle to generate cavitation on the surface of the target object. During the impact of water droplets, two shock waves generated when cavitation bursts can remove even nano-level fine foreign substances. The steam generation device and nozzle can be selected according to the application. Currently, we are offering a document summarizing features and test results as a gift. * A handy type has been developed. It is a gun type, so it can be easily carried anywhere. This allows for work in tight spaces and enables operations without moving parts! 【New technology born from the semiconductor industry】 - Shock waves generated by supersonic injection of steam (cavitation) and shear force can remove dirt and fine foreign substances. - Since no chemicals are used, waste liquid disposal is easy, achieving low costs. - Cleaning is done with water only, making it environmentally friendly and safe. - Non-contact operation results in fewer consumables. - Can also remove oil-based markers, oils, and fats. * For more details, please refer to the document. Feel free to contact us with any inquiries.

• Other cleaning machines

= New Technology Born from the Semiconductor Industry = By injecting steam at supersonic speeds, shock waves (cavitation) are generated, which can remove foreign substances and dirt through shear force. This is a compact, mobile steam two-fluid cleaning device created for experimental purposes. It is ideal for testing various objects within a factory. It can operate using only electricity, pure water, and compressed air (or nitrogen). 《Features of the New Product》 ■ Gun-type design allows for easy portability Enables work in tight spaces without moving parts! ■ Uses only water, making it environmentally friendly and safe! ■ No chemicals are used, simplifying waste liquid disposal and achieving low costs Can be used in conjunction with small amounts of chemical solutions ■ Maintenance costs can be reduced as there are no consumables ■ Effective for removing oil (video available showing it can even remove oil-based markers!!) *For more details, please download the catalog or contact us.

• Other cleaning machines

The "Steam 2 Fluid Cleaning Device Handgun Type" is a device that removes foreign substances and dirt through shock waves (cavitation) and shear force generated by the supersonic injection of water droplets and steam. It can operate using electricity, pure water, and compressed air (or nitrogen). Being a handgun type allows for precise removal of dirt, and the device is equipped with casters for easy mobility. 【Features】 ■ Utilizes the effects of cavitation to remove dirt ■ An environmentally friendly product that does not use chemicals, making waste liquid disposal easy ■ Operating temperature is below 80°C at atmospheric pressure ■ Effectively removes oil-based markers even at low pressure *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• Other semiconductor manufacturing equipment

The supersonic steam two-phase fluid cleaning device sprays a two-phase flow of steam (gas) and water (liquid) at supersonic speeds from a supersonic injection nozzle, generating micro-cavitation on the surface of the target object and performing cleaning through the resulting shock waves. As for applications, we have received many inquiries such as the following: <Examples of Applications> - Simplification of pre-cleaning processes before painting - Automation and labor-saving in the cleaning of food manufacturing equipment - Reduction of labor hours in dishwashing tasks - Applications in beauty devices and health equipment - Applications in semiconductor cleaning *We have published papers on applications to the human body (medical uses, etc.). For more details, please contact us or refer to the attached PDF.

• Other cleaning machines

The steam two-fluid cleaning unit injects steam and liquid fluids at supersonic speeds from a supersonic injection nozzle, generating micro-cavitation on the surface of the target object for cleaning. By mixing liquid with steam, it creates a two-fluid system that significantly enhances cleaning power. To suppress metal contamination and the occurrence of fine foreign substances, a special material is coated on the surface, generating high-purity steam. 【Features】 ■ No consumables like brushes, significantly reducing running costs ■ Only "pure water" is used ■ Significantly reduces the amount of chemical agents used ■ Greatly enhances cleaning power ■ Also used for semiconductor cleaning *For details, please request materials or view the PDF data from the download.

• Other cleaning machines

The steam two-fluid cleaning unit "SSC series" injects steam and liquid fluids at supersonic speeds from a supersonic injection nozzle, generating micro-cavitation on the surface of the target object for cleaning. By mixing liquid with steam, a two-fluid system is created, significantly enhancing the cleaning power. To suppress metal contamination and the generation of fine foreign substances, a special coating is applied to the surface using specific materials, producing high-purity steam. On this page, we are publishing graph data comparing the foreign substance removal rates of our products with ultrasonic + high-pressure cleaning, specifically targeting organic EL. 【Features】 ■ No consumables like brushes, significantly reducing running costs ■ Only "pure water" is used ■ Significantly reduces the amount of chemical agents used ■ Greatly improves cleaning power ■ Also suitable for semiconductor cleaning *For more details, please request documentation or view the PDF data available for download.

• Other cleaning machines

The steam two-fluid cleaning unit "SSC series" injects steam and liquid fluids at supersonic speeds from a supersonic injection nozzle, generating micro-cavitation on the surface of the target object for cleaning. By mixing liquid with steam, a two-fluid system is created, significantly enhancing cleaning power. To suppress metal contamination and the occurrence of fine foreign substances, a special coating is applied to the surface using specific materials, generating high-purity steam. This page includes comparative materials before and after cleaning in semiconductor processes (platinum residue). 【Features】 ■ No consumables like brushes, significantly reducing running costs ■ Only "pure water" is used ■ Substantially reduces the amount of chemical agents used ■ Greatly improves cleaning power ■ Also suitable for semiconductor cleaning *For details, please request materials or view the PDF data from the download.

• Other cleaning machines

The steam two-fluid cleaning unit "SSC series" injects steam and liquid fluids at supersonic speeds from a supersonic injection nozzle, generating micro-cavitation on the surface of the target object for cleaning. By mixing liquid with steam, a two-fluid system is created, significantly enhancing cleaning power. To suppress metal contamination and the generation of fine foreign substances, a special coating is applied to the surface using specific materials, producing high-purity steam. This page includes comparative materials on the penetration of water into the resin before and after treatment. 【Features】 ■ No consumables such as brushes, significantly reducing running costs ■ Only "pure water" is used ■ Substantially reduces the amount of chemical agents used ■ Greatly improves cleaning power ■ Also used for semiconductor cleaning *For details, please request materials or view the PDF data available for download.

• Other cleaning machines

The steam two-fluid cleaning unit "SSC series" injects steam and liquid fluids at supersonic speeds from a supersonic injection nozzle, generating micro-cavitation on the surface of the target object for cleaning. By mixing liquid with steam, a two-fluid system is created, significantly enhancing cleaning power. To suppress metal contamination and the generation of fine foreign substances, a special coating is applied to the surface using specific materials, producing high-purity steam. This page includes comparative materials before and after the cleaning treatment of beer halls. 【Features】 ■ No consumables like brushes, significantly reducing running costs ■ Only "pure water" is used ■ Substantially reduces the amount of chemicals used ■ Greatly enhances cleaning power ■ Also used for semiconductor cleaning *For details, please request materials or view the PDF data from the download section.

• Other cleaning machines

The steam two-fluid cleaning unit "SSC series" injects steam and liquid fluid at supersonic speeds from a supersonic injection nozzle, generating micro-cavitation on the surface of the target object for cleaning. By mixing liquid with steam, a two-fluid system is created, significantly enhancing cleaning power. To suppress metal contamination and the occurrence of microscopic foreign substances, a special coating is applied to the surface using specific materials, generating high-purity steam. This page contains data materials on contact angle measurements of cleaned glass surfaces. 【Features】 ■ No consumables like brushes, significantly reducing running costs ■ Only "pure water" is used ■ Substantially reduces the use of chemical agents ■ Greatly enhances cleaning power ■ Also used for semiconductor cleaning *For details, please request materials or view the PDF data from the download section.

• Other cleaning machines

The steam two-fluid cleaning unit "SSC series" injects steam and liquid fluids at supersonic speeds from a supersonic injection nozzle, generating micro-cavitation on the surface of the target object for cleaning. By mixing liquid with steam, a two-fluid system is created, significantly enhancing cleaning power. To suppress metal contamination and the occurrence of fine foreign substances, a special coating is applied to the surface using specific materials, generating high-purity steam. This page contains data materials related to the removal treatment of cutting powder from silicon substrates for solar cells. 【Features】 ■ No consumables like brushes, significantly reducing running costs ■ Only "pure water" is used ■ Significantly reduces the amount of chemical agents used ■ Greatly improves cleaning power ■ Also used for semiconductor cleaning *For details, please request materials or view the PDF data from the download section.

• Other cleaning machines

"BEUGA" is a steam two-fluid cleaning device equipped with a multi-channel supersonic nozzle that can perform gold lift-off and resist stripping. Since it does not require expensive chemicals, it contributes to cost reduction, and in the gold lift-off process, a gold recovery rate of over 95% is achievable. The raw material is "water," which allows for a reduction in chemical use, contributing to cost reduction and a decrease in environmental impact. [Features] ■ Cost reduction ■ Improved gold recovery rate ■ Reduced environmental impact *For more details, please feel free to contact us.

• Other cleaning machines

"VALIUS" is a steam two-fluid cleaning device equipped with a multi-channel supersonic nozzle that can remove resist and paste. Since it does not require expensive chemical solutions, it contributes to cost reduction and achieves a compact installation area (main unit). It is capable of ultra-high-speed processing of over 500 sheets per hour in continuous operation. As the raw material is "water," it is an environmentally friendly device that significantly reduces the use of chemical agents. 【Features】 ■ Cost reduction ■ Compact design ■ Ultra-high-speed processing capability ■ Reduced environmental impact *For more details, please feel free to contact us.

• Other cleaning machines

"AURORA" is a low-temperature resist stripping device that can remove resist after ion implantation. By combining plasma treatment and ozone water treatment, it can strip without residue, and it also supports stripping of underlying films (such as Si, SiO2) without film edge issues. Additionally, by eliminating chemical cleaning processes such as sulfuric peroxide and ammonia peroxide, it is possible to reduce running costs and the number of processes. A fast removal rate (2-4μm/min) achieves high throughput. [Features] ■ Stripping performance ■ Cost reduction ■ Reduction of process steps ■ Reduction of installation area *For more details, please feel free to contact us.

• Other cleaning machines

"ASTE" is a vapor two-fluid cleaning device that can remove polymers after etching and foreign substances on wafers (replacing brush scrubbers) without metal contamination. It can simultaneously remove polymers and resists without using expensive amine-based stripping agents, leading to significant cost reductions. Since the raw material is "water," it is an environmentally friendly cleaning device. 【Features】 ■ Cost reduction ■ Reduction in the number of processes ■ Reduction of environmental impact *For more details, please feel free to contact us.

• Other cleaning machines