シナノ精機 List of Products and Services

Our company is engaged in the assembly and on-site startup of JEL-manufactured robots (certified factory), spin etchers, and hard disk scrubbing equipment. Shinano Seiki has developed its business under the management philosophy of "pursuing customer satisfaction and technological capability to the utmost and contributing to society." With the motto "advanced technology is born from the field," we adhere to a field-oriented approach as our guiding principle and strive daily. 【Business Activities】 ■ Semiconductor manufacturing equipment ■ Vacuum equipment ■ Design, manufacturing, and sales of various industrial/experimental equipment and jigs ■ Installation, adjustment, and maintenance of various equipment at customer sites ■ Modification and overhaul of various equipment ■ Others *For more details, please download the PDF or feel free to contact us.

• Other assembly machines

Our company specializes in the modification and overhaul of various types of equipment. Each member of our group is committed to our management philosophy, bringing high technical skills, a desire for improvement, and a professional mindset to contribute to customer satisfaction and societal development. With the motto "Advanced technology is born from the field," we adhere to a field-oriented approach as our guiding principle and strive for continuous improvement every day. 【Business Activities】 ■ Semiconductor manufacturing equipment ■ Vacuum equipment ■ Design, manufacturing, and sales of various industrial/experimental equipment and jigs ■ Installation, adjustment, and maintenance of various equipment at customer sites ■ Modification and overhaul of various equipment ■ Others *For more details, please download the PDF or feel free to contact us.

• Other plant design, development and maintenance

We provide installation, adjustment, and maintenance of various equipment at customer sites. Shinano Seiki has developed its business under the management philosophy of "pursuing customer satisfaction and technical expertise to the utmost, and contributing to society." Each member of the group is united in their commitment to customer satisfaction and the development of society, based on our management philosophy, with high technical skills, a desire for improvement, and a professional mindset. 【Business Activities】 ■ Semiconductor manufacturing equipment ■ Vacuum equipment ■ Design, manufacturing, and sales of various industrial/experimental equipment and jigs ■ Installation, adjustment, and maintenance of various equipment at customer sites ■ Modification and overhaul of various equipment ■ Others *For more details, please download the PDF or feel free to contact us.

• Other plant design, development and maintenance

Our company designs, manufactures, and sells various industrial and experimental equipment and tools. Shinano Seiki has developed its business under the management philosophy of "pursuing customer satisfaction and technological capability to the fullest and contributing to society." With the motto "advanced technology is born from the field," we adhere to a field-oriented approach and strive daily. 【Business Activities】 ■ Semiconductor manufacturing equipment ■ Vacuum equipment ■ Design, manufacture, and sale of various industrial and experimental equipment and tools ■ Installation, adjustment, and maintenance of various equipment at customer sites ■ Modification and overhaul of various equipment ■ Others *For more details, please download the PDF or feel free to contact us.

• Other experimental equipment
• Contract manufacturing

Our company designs, manufactures, and sells "vacuum equipment," including deposition systems, sputtering systems, heating/cooling systems, and vacuum prober systems. Each member of our group is committed to our management philosophy, bringing high technical skills, a desire for improvement, and a professional mindset to contribute to customer satisfaction and societal development. With the motto "Cutting-edge technology is born from the field," we adhere to a field-oriented approach as our guiding principle and strive for continuous improvement every day. 【Business Activities】 ■ Semiconductor manufacturing equipment ■ Vacuum equipment ■ Design, manufacturing, and sales of various industrial/experimental equipment and jigs ■ Installation, adjustment, and maintenance of various equipment at customer sites ■ Modification and overhaul of various equipment ■ Others *For more details, please download the PDF or feel free to contact us.

• Vacuum Equipment
• Evaporation Equipment
• Sputtering Equipment

Our company engages in OEM for semiconductor manufacturing equipment, including ALD equipment, PE-CVD equipment, and wafer cleaning equipment. Shinano Seiki has developed its business under the management philosophy of "pursuing customer satisfaction and technological capability to the utmost, and contributing to society." Each member of the group is united in their commitment to high technology, a desire for improvement, and a professional mindset, all based on our management philosophy, to contribute to customer satisfaction and societal development. 【Business Activities】 ■ Semiconductor manufacturing equipment ■ Vacuum equipment ■ Design, manufacturing, and sales of various industrial/experimental equipment and jigs ■ Installation, adjustment, and maintenance of various equipment at customer sites ■ Modification and overhaul of various equipment ■ Others *For more details, please download the PDF or feel free to contact us.

• CVD Equipment
• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment

We would like to introduce the main equipment held by our company at the factory. We have a variety of equipment, including three clean booths measuring W5000×D5000×H4000mm, general-purpose lathes, milling machines, drill presses, and forklifts capable of handling 2.8 tons. Please feel free to contact us when you need assistance. 【Equipment Owned (Partial)】 ■ Clean Booths ■ Dedicated Booth for Robot Overhaul ■ Crane ■ Forklift ■ Helium Leak Detector *For more details, please download the PDF or feel free to contact us.

• Clean Booth
• crane
• lift

We would like to introduce a case study of our "Precision Cleaning Equipment." This equipment is used for cleaning precision components such as semiconductor wafers and hard disks, employing a batch format to remove contamination from particles, chemicals, and metals. Since it cleans wafers one by one, it is suitable for small-batch production of various types and high-functionality cleaning. 【Product Specifications】 ■ Semiconductor wafers (SiC, GaN, silicon, sapphire, etc.), MEMS ■ Wafer materials: SiC, Si, GaAs, GaN, glass, LT substrates ■ Wafer sizes: 2 to 12 inches ■ Number of processing chambers: 1 to 4 ■ Chemicals: Up to 2 types (optional: 3 types) *For more details, please download the PDF or feel free to contact us.

• Other cleaning equipment

We would like to introduce examples of our company's "design and manufacturing equipment." Starting with a load-lock type sputtering and deposition device equipped with a multi-stage stocker, we also produce plasma treatment devices suitable for mass production and continuous operation, as well as atmosphere control devices that can be used for managing moisture and oxygen levels. Shinano Seiki supports the entire lifecycle of the equipment, from design to after-sales service, through collaboration with partner companies. 【Equipment Details (Partial)】 ■ Load-lock type sputtering and deposition device - Manual transport / Roller transport - Equipped with multi-stage stocker ■ Plasma treatment device - Plasma etching treatment of pipe-shaped workpieces - Suitable for mass production and continuous operation *For more details, please download the PDF or feel free to contact us.

• Sputtering Equipment
• Plasma surface treatment equipment

We would like to introduce a case of the small batch-type sputtering device "SPB-311" developed as a film-forming apparatus. It features a clean exhaust system with a cryopump as the main pump and is equipped with a magnetron cathode. It allows for the selection of RF/DC power supplies. Shinano Seiki supports the entire lifecycle of the device, from design to after-sales service, through collaboration with partner companies. 【Main Specifications】 ■ Clean exhaust system with a cryopump as the main pump ■ Equipped with a magnetron cathode (up to 3 units) ■ Selection of RF/DC power supplies available ■ Substrate rotation mechanism ■ Fully automatic touch panel sequence with manual operation available *For more details, please download the PDF or feel free to contact us.

• Sputtering Equipment

- Can process workpieces with weak mechanical strength - Non-contact treatment that does not damage the workpiece - Does not use liquids - Can process not only metals but also resins - Only Ar gas and water are required for the process - Does not produce dust or waste - Can be installed in clean rooms (excluding vacuum pumps)

• Other processing machines