ダン科学 List of Products and Services

We would like to introduce our "Organic Solvent Cleaning Equipment." This is an automatic etching cleaning device for 6" wafer cassettes, controlled by a PLC. It consists of the main unit, pump unit, and control panel. The cleaning process is batch cleaning, with a flow direction of left to right using three robotic transports. Please feel free to contact us if you have any inquiries. 【Main Specifications】 ■ Transport: 2 cassette transport for 6" wafers ■ Cleaning Process: Batch cleaning ■ Flow Direction: Left to right with three robotic transports ■ Control Method: PLC ■ Chemical Supply Method: CCSS method *For more details, please refer to the PDF document or feel free to contact us.

• Other cleaning machines

The "Chemical Supply Device" is an automatic mixing and supply device for HF. The supply of each chemical to the device can be done directly from the manufacturer's concentrated liquid tanks or from CCSS. The supplied chemical solution is transferred to a weighing tank via a pump, where it is automatically mixed with pure water in a specified ratio. Additionally, the mixed HF is stored in a supply tank and is automatically supplied to the use points upon receiving a supply request signal. 【Main Specifications】 ■ Main Frame: Lightweight steel welded assembly, integrated structure with baked paint finish ■ Exterior Color: Ivory White ■ Exterior Coating: PVC ■ Structure: Main body draft structure, front and back with transparent PVC panels ■ Supplied Chemical: HF (with clean air supply function in the storage section) ■ Control Unit: Built-in control panel ■ Supply Tank Main Frame: - SUS welded assembly, two-part structure + corrosion-resistant resin coating in ivory white *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment

We would like to introduce our "Precision Parts Cleaning Equipment." This device is designed for degreasing and cleaning motor parts for HHD (such as hubs and cases), and consists of the following steps: detergent + ultrasonic cleaning (degreasing) → pure water rinse + ultrasonic cleaning → hot air drying → vacuum drying. We will manufacture it according to your specific needs. Please feel free to contact us when you require our services. 【Main Specifications】 ■ Items to be cleaned: Motor parts for HHD (such as hubs and cases) ■ Processing method: Dip processing using a dedicated basket ■ Processing speed: 2.5 minutes (2kg × 4 baskets) ■ Pass line: FL + 750 ± 10mm ■ Conveying method: Tact feeding *For more details, please refer to the PDF document or feel free to contact us.

• Other cleaning machines

We would like to introduce our "Vacuum Drying Equipment." This device heats the interior of a SUS304 vacuum chamber with a diameter of φ600 and a depth of D585 using three special sheath heaters, allowing for vacuum drying in an oil-free state. The front door of the vacuum chamber opens wide with a single swing, making it easy to load and unload parts. Additionally, the work placement table inside the drying furnace is custom-designed to meet customer specifications. 【Main Specifications】 ■ Drying Material: General Parts ■ Chamber Size: φ600×D585 ■ Chamber Capacity: Approximately 142L ■ External Dimensions: 850W×1049D×1800H *For more details, please refer to the PDF document or feel free to contact us.

• Drying Equipment
• Vacuum Equipment

We would like to introduce our product, the "Automatic Transport Cassette Clean Oven." It accommodates 6 sets of 25 pieces of 8" wafers in one cassette, using one clean oven along with loaders and unloaders equipped with transport robots. It is designed to process one set at a time. The transport method can be either automatic or manual, and the maximum temperature inside the clean oven is 140°C. The external dimensions are 2590 (W) × 1400 (D) × 2400 (H). 【Main Specifications】 ■ Processed wafers: 6 cassettes of 25 pieces of 8" quartz wafers ■ Transport method: Automatic / Manual ■ Maximum temperature inside the clean oven: 140°C ■ Cleanliness inside the clean oven: Class 10 at 0.3μm RT ■ External dimensions: 2590 (W) × 1400 (D) × 2400 (H) *For more details, please refer to the PDF document or feel free to contact us.

• Other conveying machines

The "Magnetic Head Cleaning Device" is a product designed for the final cleaning of magnetic heads, using a pallet with 12 trays arranged radially. It employs an alkaline hot water solution (10%) and applies ultrasonic waves from three directions for inclined intermittent rotational cleaning. The rinsing and drying process incorporates a composite rinsing and drying treatment that includes pure water dipping, QDR, pure water shower, and spin dryer all in one tank. The final drying is performed using a hot plate inside the box, consisting of one loader, two ultrasonic cleaning tanks, three rinsing tanks, one heating drying tank, and one unloader. 【Specifications】 - The standard pallet size is 50mm x 50mm, with seven other interchangeable sizes available. - The head size is 1mm square with a thickness of 0.3mm, accommodating 500 pieces within the pallet. *For more details, please refer to the PDF document or feel free to contact us.*

• Other cleaning machines

We would like to introduce the "Yutaka Drying Device" that we handle. The device dries 25 Wf sheets in a cassette using the principle of surface tension with a slow lift method. By controlling the lifter and liquid level, it ensures that there is no liquid residue when the Wf and liquid level separate, preventing the occurrence of watermarks. The pass line will be designed to match the cleaning line, so please feel free to contact us when you need assistance. 【Main Specifications】 ■ Item to be cleaned: 200mm thickness 0.75t ■ Processing method: Dip processing with a cassette ■ Processing speed: 5 minutes (variable) ■ Cleanliness inside the device: 0.1μm Class 1 ■ Pass line: Designed to match the cleaning line *For more details, please refer to the PDF document or feel free to contact us.

• Drying Equipment

We would like to introduce our "Mask Glass Cleaning Device." The mask glass is stored in an original cassette and cleaned using SPM and neutral detergent + US, followed by drying with warm water. The process is carried out in the following order: LD → Underwater → SPM → Rinse → Rinse → Neutral Detergent + US → Rinse + US → Rinse → SC-1 → Rinse → Rinse + MUS → Rinse → Warm Water Lift → ULD. 【Main Specifications】 ■ Conveying Direction: Left → Right ■ Passline: 400mm (LD, ULD) ■ Substrate Mask: min 9”×9” to max 24”×24” ■ Main Body Dimensions (Material) ・PVC Wrapped (Ivory): 8000W×2350D×2600H (2900H) ・Frame: Made of SUS304 *For more details, please refer to the PDF document or feel free to contact us.

• Other cleaning machines

We would like to introduce our "Frit Drying Furnace." This drying device is used for drying frit paste applied to glass panels and can be manufactured to match the glass size. The processing speed is 15m/min (36m/min), and it consists of a drying furnace and a cooling section, handling PDP glass in a two-row roller conveyor format, ranging from 42" (964×570) to 50" (1150×680). 【Main Specifications】 ■ Heated Object: Paste applied to PDP glass panels ■ Processing Method: Tactile transport by roller conveyor (1 stage × 2 rows) ■ Processing Speed: 15m/min (36m/min) ■ Heating Conditions: Glass surface temperature 95℃±15℃ for more than 44 seconds (guaranteed value) ■ Pass Line: FL+1150±30mm *For more details, please refer to the PDF document or feel free to contact us.

• Drying Equipment

We would like to introduce our "Wafer Transfer Device." With two carrier handlers on the left and right, it can rapidly transport 1 to 6 carriers. The alignment can be switched between upper and lower alignment via a switch. It is capable of flipping even-numbered wafers in the center, while flipping odd-numbered wafers is optional. 【Main Specifications】 ■ Target wafers: Dedicated machines for 4, 5, or 6 inches ■ Number of transfer carriers: 1 to 6 as needed ■ Alignment: Switchable between upper and lower alignment ■ Transfer time: Within 9 minutes for 6 carriers ■ Device dimensions: 1600mm x 725mm x 1450mm (for 4-inch specification) ■ Device weight: 150Kg ■ Power supply: AC100V, 15A *For more details, please refer to the PDF document or feel free to contact us.

• Other conveying machines

The "DAN-3502" is an incubator equipped with a high vibration-damping performance and an integrated inbound and outbound robot. It automatically stores crystallization plates after dispensing into a constant temperature container (incubator), retrieves the crystallization plates from the incubator for automatic observation, and can save the data as images in an integrated system. X-ray protein crystallography is performed through a series of steps including protein expression, purification, crystallization, X-ray diffraction experiments, and data processing. 【Features】 - Supports automated transport requiring vibration resistance, such as in protein crystallization research - Mechanism that prevents vibrations from the built-in robot and freezer from reaching the plates - Gentle handling with a non-grip scooper - Compatible with shelf information management and barcode management - The entry and exit gates prioritize internal atmosphere, featuring double doors to block outside air - Other specifications such as capacity, size, and control temperature and humidity range can be customized *For more details, please refer to the PDF document or feel free to contact us.

• incubator
• Thermostatic chamber

This product is a device designed for cleaning Si nuggets. Containers with the work (Si nuggets) are transferred to a dedicated cleaning basket and automatically conveyed within the cleaning equipment. Subsequently, the basket undergoes chemical polishing, acid etching, and high-quality water rinsing, during which the work is cleaned. At this time, the cleaning basket is agitated to improve cleaning efficiency. After cleaning, it is transferred to a dedicated drying basket and pre-dried with hot air at 150°C. 【Main Specifications】 ■ Items to be cleaned: Si nuggets ■ Treatment method: Water rinse ⇒ Chemical cleaning ⇒ Rinse ⇒ Pre-drying ■ Conveyance method: Automatic conveyance by a transport robot ■ Chemicals used: Hydrofluoric acid, Nitric acid *For more details, please refer to the PDF document or feel free to contact us.

• Other cleaning machines

We would like to introduce our "Cassette Cleaning Device for PDP." This automatic cleaning device transports PDP substrate cassettes through a process of high-pressure hot water showering, liquid draining, and hot air drying, designed and manufactured to fit the cassette specifications. The treatment method involves pure water high-pressure cleaning combined with hot air drying. 【Main Specifications】 ■ Heated Object: PDP Cassette (2800W x 4700D x 1500H) Weight: 1000kg ■ Treatment Method: Pure Water High-Pressure Cleaning + Hot Air Drying ■ Processing Speed: 100mm/s (Tact Time: 28min) ■ Heating Conditions: 100℃ ±5℃ ■ Pass Line: FL + 2400 *For more details, please refer to the PDF document or feel free to contact us.

• Other cleaning machines

This is an introduction to the "Processing Equipment for OLED" that we handle. We provide cleaning equipment for organic EL manufacturing lines. The substrate size we process is 370×470×1.1. The equipment consists of incoming cleaning, pure water cleaning, developing equipment, stripping equipment, Cr etching equipment, and ITO etching equipment. 【Main Specifications】 ■ Items to be cleaned: Glass substrate 370×470 thickness 0.6–1.1t ■ Processing method: Single sheet processing ■ Processing speed: 0.6–5.0m/min (variable) ■ Pass line: FL + 1100mm *For more details, please refer to the PDF document or feel free to contact us.

• Other cleaning machines
• Etching Equipment

The "IR Drying Oven" is a product that processes items using tact transport via roller conveyance. By heating the substrates after cleaning and air blowing, it evaporates the moisture on the substrates and implements drying. Glass substrates are heated and dried using a clean far-infrared heater (Class 100). 【Main Specifications】 ■ Heated Item: TFT Glass Panel (2880×3130×0.6t) ■ Processing Method: Tact transport via roller conveyance (6° incline) ■ Processing Speed: 75mm/s (Tact Time: 56sec) ■ Heating Conditions: Achieves glass surface temperature of 70 ℃ or higher ■ Pass Line: FL+1800±25mm *For more details, please refer to the PDF document or feel free to contact us.

• Drying Equipment
• Heating device

The product is a device that automatically transports and etches GaAs wafers using a dedicated basket. When GaAs wafers placed in the basket from the loader section are introduced, they are automatically transported by a conveyor from the loader section to the etching tank, rinse tank, and unloader section. Additionally, there is a chemical supply tank located at the bottom of the device, which automatically mixes the chemicals and supplies the necessary amount to the etching tank. 【Main Specifications】 ■ Heated material: GaAs (Gallium Arsenide) block ■ Cassette: Dedicated PTFE cassette ■ Conveyor: Automatic robot transport (servo motor driven) ■ Control method: Sequencer control *For more details, please refer to the PDF document or feel free to contact us.

• Etching Equipment

The "300mm Cassette-less Wafer Cleaning System" is a product used in the chemical polishing process after final polishing. It processes 50 wafers at a time by placing 25 wafers in the gaps of 25 wafers in a half-pitch arrangement, achieving a high cleanliness level of 65nμm/5 pieces. 【Main Specifications】 ■ Items to be cleaned: 300mm thickness 0.75t ■ Processing method: Cassette-less dip processing ■ Processing speed: 50 pieces/5 min (variable) ■ Cleanliness inside the device: 0.1μm Class 1 ■ Pass line: FL+900±5mm manual set with a hoop ■ Transport method: Front transport *For more details, please refer to the PDF document or feel free to contact us.

• Other cleaning machines

The "kolleii GDK-500" is a mist shower unit designed for antiviral, antibacterial, and deodorizing purposes. It is equipped with six ultrasonic humidification units, capable of atomizing at a particle size of 3μm to 4μm, with a flow rate of 3.4L per hour. When someone stops in front of the device, the mist shower is automatically sprayed. When the supply tank is low, the empty tank warning light will illuminate. In addition to the recommended spraying solution, it can also be used with various disinfectant and antibacterial liquids. 【Features】 ■ Antiviral, antibacterial, and deodorizing ■ Equipped with ultrasonic humidification units ■ Automatic spraying with a human sensor ■ Alert function to notify of supply shortages ■ Keeps various scenes clean and safe *For more details, please refer to the PDF materials or feel free to contact us.

• Other safety and hygiene products

The "kolleii GDK-500" is a mist disinfection device that can suppress the growth and spread of viruses and fungi by spraying a diluted solution of catechins onto clothing and other surfaces. Catechins are harmless food additives extracted from tea leaves. In addition to the recommended spray solution, this device can also be used with other disinfectant and antibacterial liquids. Our company is conducting an "Infection Control Support Campaign," offering a free rental for the first month for the first 10 units. Extensions and cancellations are possible on a monthly basis, so please take advantage of this opportunity. 【Campaign Overview】 ■ Target Product: Mist Disinfection Device "kolleii GDK-500" ■ Campaign Details - Monthly rental fee: 33,000 yen (tax included) ⇒ First month: 0 yen - Limited to the first 10 units - Requires a 100V outlet for installation - All shipping, pickup, installation, and return fees are covered by our company *For more details, please refer to the PDF document or feel free to contact us.

• Other safety and hygiene products

Our company offers products centered around clean technology, focusing on cleaning technology, purification technology, and measurement technology. We handle a variety of manufacturing equipment, including those for semiconductors, FPD, drying furnaces, vacuum systems, precision cleaning, and other devices. We have a wide range of products, including 5, 6, and 8-inch wafer cassette cleaning systems, CF processing equipment, vacuum drying systems, R to R thermal processing continuous drying furnaces, precision parts cleaning systems, air showers, and more. Additionally, we have newly added airborne transport cleaning systems and non-contact transport cleaning systems. 【Various Manufacturing Equipment】 ■ Semiconductors ■ FPD ■ Drying Furnaces ■ Vacuum ■ Precision Cleaning ■ Other Devices *For more details, please refer to the PDF materials or feel free to contact us.

• Other cleaning machines
• Drying Equipment

The DNCC-320 is a cleaning device that performs cleaning, rinsing, and drying processes while floating and moving a glass substrate with a fluid. It uses pure water and other cleaning media to float and clean the substrate, controlling the drive only on the vertical edges, and it is also possible to change the size in the river width direction. Unlike conventional roller transport, it does not leave scratches on the glass surface due to slip, and the cleaning solution uniformly contacts the entire glass surface without the unevenness seen in spray cleaning. **Features** - Zero roller marks on the glass substrate - Simultaneous cleaning and drying of both the front and back surfaces - Suitable for transporting thin and lightweight substrates (0.5t or less) - Functional water + ultrasonic cleaning *For more details, please refer to the PDF document or feel free to contact us.*

• Other cleaning machines
• Ultrasonic Cleaner

The "DPC-700" is a device that cleans and rinses workpieces using high-pressure pulse jet spraying, and drains water through air blow (liquid removal from piping). Optionally, it can continuously perform hot water cleaning, rinsing, and draining within the same tank. (The temperature range will be determined during consultation.) By using dedicated fixtures, it can also clean containers and lids of various sizes. It can remove dirt from sharp grooves of plastic containers and clean the backside of two-tier structures with curved surfaces and angles made of aluminum alloy using pulse jets. 【Features】 - High-pressure pulse jet cleaning that does not diminish water pressure - Cleaning of workpieces with uneven surfaces and sealed holes - Eco-friendly cleaning with minimal water usage - High-speed cleaning at speeds of 35 to 45 m/s - Adoption of a 6-axis articulated robot for cleaning that closely resembles human movement *For more details, please refer to the PDF document or feel free to contact us.

• Other cleaning machines
• High pressure cleaner

The DBC-1700 is a device that cleans and rinses containers using pure water injection, followed by air blow (liquid drainage from the piping) and high-speed rotation for water removal. It continuously processes hot water cleaning, rinsing, and water removal within the same tank. By using dedicated fixtures, it can also clean containers and lids of different sizes. The cleaning shower uses hot water controlled at 40°C and cleans with a water pressure of 0.25 MPa or higher. The cleaning solution is circulated in the tank, minimizing unnecessary consumption of pure water. 【Features】 ■ Capable of cleaning a variety of products ■ Cleaning power ■ Safety measures ■ Recipe operation *For more details, please refer to the PDF materials or feel free to contact us.

• Other cleaning machines
• Cleaning agents

The DACC-061-3L is a device designed to clean and remove various types of dirt from double-sided oval glass with patterns, ranging from 4 inches (61mm x 124mm) to 7 inches (140mm x 200mm). It is equipped with a system that generates functional water with zero content of environmental pollutants such as surfactants and chemical substances found in common detergents and cleaners, as well as BOD/COD. Despite containing 99.9% pure water, it exhibits cleaning effectiveness equivalent to or greater than that of synthetic detergents. 【Features】 - Zero roller marks on glass substrates - Capable of handling a variety of products - Excellent cleaning power - Functional water + ultrasonic cleaning *For more details, please download the PDF or feel free to contact us.

• Other cleaning machines