GaAs etching equipment

Automatically mixes the chemical solution and delivers the required amount to the etching tank! It employs a sequencer control method.

The product is a device that automatically transports and etches GaAs wafers using a dedicated basket. When GaAs wafers placed in the basket from the loader section are introduced, they are automatically transported by a conveyor from the loader section to the etching tank, rinse tank, and unloader section. Additionally, there is a chemical supply tank located at the bottom of the device, which automatically mixes the chemicals and supplies the necessary amount to the etching tank. 【Main Specifications】 ■ Heated material: GaAs (Gallium Arsenide) block ■ Cassette: Dedicated PTFE cassette ■ Conveyor: Automatic robot transport (servo motor driven) ■ Control method: Sequencer control *For more details, please refer to the PDF document or feel free to contact us.

Etching Equipment