Plasma-resistant diamond
Diamond films possess exceptionally excellent properties in terms of hardness, chemical stability, and thermal conductivity. Therefore, they demonstrate very high durability even in plasma environments. By coating components of plasma etching equipment and deposition devices, especially the parts that are directly exposed to plasma, with diamond films, the lifespan of the components can be significantly extended. They show particular resistance to fluorine-based, chlorine-based, and hydrogen gases.
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Semiconductor device components, fixtures
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Our company is a manufacturer that synthesizes and produces conductive diamonds using CVD. We have conducted research focused on film formation conditions over many years, establishing know-how for durability, high conductivity, and stable film formation over large areas. Diamonds, which possess unique properties such as high hardness, refractive index, thermal conductivity, and chemical stability, are increasingly in demand as materials that can respond to technological advancements and environmental impact reduction. Please feel free to contact us if you have any inquiries.
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