大和機器工業 Product Lineup

The "VPS Series" is a shutter that can protect the viewport from deposition without affecting high vacuum. The shutter mechanism is a flapper type, and the allowable baking temperature is 200°C. We offer a lineup including the "VPS-070" with a mass of 0.8 kg, as well as the "VPS-114" and "VPS-152," which weigh 1.8 kg. 【Features】 ■ Protects the viewport from deposition without affecting high vacuum ■ Shutter mechanism: Flapper ■ Operating pressure range: Atmospheric pressure to 10^-8 Pa ■ Allowable baking temperature: Auto metal 200°C ■ Leak rate: Below 2×10^-11 Pa·m3/sec *For more details, please refer to the PDF document or feel free to contact us.

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The "TR Series" is a transfer rod compatible with ultra-high vacuum environments. It offers a wide range of movement and easy maintenance. It is used when rotation and linear movement are required within vacuum equipment. Models such as "TR-070/500" with a linear movement distance of 500mm and "TR-070/750" with 750mm are available. It features a magnetic coupling type that utilizes samarium cobalt in the magnetic circuit. 【Features】 ■ Compatible with ultra-high vacuum ■ Wide range of movement ■ Easy maintenance ■ Used when rotation and linear movement are required within vacuum equipment ■ Magnetic coupling type utilizing samarium cobalt in the magnetic circuit *For more details, please refer to the PDF materials or feel free to contact us.

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The "RFD Series" is a bellows-type rotary feedthrough that provides smooth rotational motion. The transmission torque ranges from 0.5 Nm to 1.6 Nm, and the bakeable temperature is 300°C. It is made entirely of metal, making it suitable for ultra-high vacuum applications. We offer connection flanges such as "RFD-034" for ICF34 and "RFD-070" for ICF70. 【Features】 ■ Provides smooth rotational motion ■ Transmission torque ranges from 0.5 Nm to 1.6 Nm ■ Bakeable temperature is 300°C ■ Made entirely of metal, suitable for ultra-high vacuum ■ Custom shapes available *For more details, please refer to the PDF document or feel free to contact us.

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• Other machine elements