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ITWジャパン

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Smart mass flow meter (with controller) explosion-proof structure electrical machinery equipment type certification approval.

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[Instruction Manual] Thermal Mass Flow Controller/Mass Flow Meter 'SLAMF Series'

User’s manual（manual）

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Thermal Mass Flow Controller/Mass Flow Meter "SLAMF Series"

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Gas flow control supports the development of decarbonization and environmental technologies (Brooks Instrument's solutions).

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Area flow meters selected by application (Brooks product comparison guide)

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SLA series (supports CCUS, exhaust gas treatment, hydrogen utilization, and thermal treatment processes)

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GF series (supports multi-gas and multi-range evaluation to high purity and high temperature processes)

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[New Product] GC Series (Ultra-Compact MEMS Mass Flow Controller)

Product catalog

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[New Products] BCU Series / New Quantim QMC Series (For liquid flow management in environmental, bio, and materials processes)

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Product Catalog: GC Series Mass Flow Controller

Product catalog

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[Instruction Manual] GC Series Mass Flow Controller

User’s manual（manual）

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EtherNet/IP Communication Clamp-On Ultrasonic Liquid Flow Meter 'BCU Series'

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Mass Flow Controller Explosion-Proof Structure Electrical Machinery Equipment Type Certification Approval Certificate

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Mass flow meter explosion-proof structure electrical machinery equipment type certification approval certificate

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Realizing Precision Control in Energy Innovation (Brooks Instrument Solutions Supporting a Sustainable Future)

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Coriolis mass flow and high-temperature mass flow [*New Product Panel Material*]

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[Panel Material] Contributing to Scale-Up and Automation

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Micro flow Coriolis mass flow meter for liquids and gases / controller 'Quantim(R) QMC series'

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Basic Knowledge of Thin Film Technology: "PVD and CVD Technologies" *Materials Provided

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Basic Knowledge of Thin Film Technology: "Glass Coating" *Materials Provided

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Basic Knowledge of Thin Film Technology: "What is Thin Film Technology?" *Materials Provided

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[Published in Measurement Technology December 2022] Overview of the MEMS Pirani Vacuum Gauge VersaTorr Series and its Applications in Advanced Semiconductor Processes.

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Lead-out unit '0251 / 0254'

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Enhancement of drug delivery systems through high-precision measurement and control of supercritical CO2 using a Coriolis mass flow meter.

Application note

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Digital mass flow controller and Ethernet-based network protocol

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Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>

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Glass tube area flow meter / Metal tube area flow meter

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Area-type flow meter <Flow solution for EPC>

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Service & Support

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Flow and pressure measurement equipment <Biopharmaceuticals and Life Sciences industry>

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Factors Affecting the Performance of MFC in Biopharmaceutical Process Systems【Biotechnology eBook】

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Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

General catalog

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Thermal Mass Flow Controller / Mass Flow Meter "SLA5800 Series"

Product catalog

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[Instruction Manual] Thermal Mass Flow 'SLA5800 Series'

User’s manual（manual）

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Software Manual

User’s manual（manual）

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[Certificate of Compliance] Explosion-proof Structure Electrical Machinery and Equipment Type Test (Domestic Explosion-proof: DEK20.0062X)

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Pressure Controller "SLA/SLAMf Series"

Product catalog

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Mass Flow Controller / Mass Flow Meter "SLAMf Series [NEMA4X/IP66 Standard]"

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Thermal Mass Flow Controller / Mass Flow Meter "GF40"

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Pressure-based gas mass flow controller "GP200 series"

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Metal Seal Mass Flow Controller/ Meter 'GF100/GF120/GF125'

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Metal Tube Area Flow Meter "MT3809G Series"

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Glass Tube Area Flow Meter "Model GT1600"

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Glass tube area flow meter (rotameter) 'Sho-Rate Series Models 1358'

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Glass tube area flow meter Show Rate model '1350G, 1355G'

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