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  3. プレテック 静岡製作所
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プレテック 静岡製作所

addressShizuoka/Yaizu-shi/Oshima 1143
phone054-623-3741
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last updated:Nov 07, 2025
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精密洗浄装置 精密洗浄装置
ファインシリーズ洗浄ユニット ファインシリーズ洗浄ユニット
ウルトラソニック洗浄ユニット​ ウルトラソニック洗浄ユニット​
スピンソニッククリーナー スピンソニッククリーナー
スピンソニッククリーナー

スピンソニッククリーナー

サブミクロンのパーティクルまでも非接触でウェハー両面を同時洗浄。 ウェハー横置き、枚葉式ファインジェット方式の採用で高い洗浄能力を実現。 スピンソニッククリーナーは、サブミクロンのパーティクルまでも取り除きます。 さらに工程数をカットし、薬液管理およびヒーターが不要に。 洗浄時間の短縮、ランニングコストの節約などを可能とするすぐれたパフォーマンスを発揮します。

LEO Unit PT-0878LEO

Achieving long-duration running! A cleaning liquid treatment unit equipped with deep ultraviolet LEDs for a dehydrated mercury-free society.

The "LEO Unit PT-0878LEO" is a high-power infrared (UV) LED cleaning unit that features a compact design and localized ultraviolet irradiation, enabling process treatment at low flow rates. It achieves long running times compared to mercury lamps. By combining deep ultraviolet light with ozone water, it generates highly efficient OH radicals, contributing to the breakdown of organic substances. This product is expected to be utilized in the medical and food sectors due to its high sterilization power against viruses and other pathogens. 【Features】 ■ Achieves a cleaning liquid processing unit equipped with deep ultraviolet LEDs for a mercury-free society ■ Achieves long running times compared to mercury lamps ■ Realizes a compact design and localized ultraviolet irradiation, enabling process treatment at low flow rates *For more details, please download the PDF or feel free to contact us.

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