LC List of Products and Services

The product is a "multi-chamber wafer cleaning system" that offers both carrierless and carrier types. The carrierless type supports high-purity cleaning, significantly reducing the usage of chemicals and pure water, as well as the footprint. The carrier type allows for the selection of 1 or 2 cassettes for transporting a single batch. It is possible to configure the equipment for processes using acidic, alkaline, or organic chemical treatments. 【Features of the Multi-Chamber Carrierless System】 ■ Compatible with work sizes of 6-inch, 8-inch, and 12-inch wafers ■ Supports high-purity cleaning such as pre-coating cleaning through carrierless transport ■ Significantly reduces the usage of chemicals and pure water ■ Greatly minimizes the footprint ■ Drying options include IPA drying, warm water lift & IR drying, and Marangoni drying ■ Loaders and unloaders are compatible with cassettes or FOUPs *For more details, please download the PDF or feel free to contact us.

• Other surface treatment equipment
• Other semiconductor manufacturing equipment

The "Sheet-type Spin Cleaning Device" can be equipped with ultrasonic spray nozzles, two-fluid spray nozzles, high-pressure jet nozzles, ozone water, and more, allowing for processing tailored to specific applications. It accommodates work sizes from 2-inch to 12-inch wafers. It can also handle square substrates up to 500mm on a side (consultation required). The device can be configured with process modules for acidic, alkaline, and organic solutions. 【Features】 ■ Versatile chamber configurations to meet various process needs ■ Compatible with work sizes from 2-inch to 12-inch wafers ■ Can also accommodate square substrates up to 500mm on a side (consultation required) ■ Configurable with process modules for acidic, alkaline, and organic solutions *For more details, please download the PDF or feel free to contact us.

• Other surface treatment equipment
• Other semiconductor manufacturing equipment