Thoroughly cleans the roller brush with a unique shaft-centered water supply system!
We would like to introduce the "Dual-Sided Scrub Cleaning Device" that we handle. This device performs scrub cleaning on both sides of the workpiece using detergent and pure water after polishing. Following this, a complex cleaning process is carried out, including two-fluid cleaning, acid and alkali chemical cleaning, and megasonic shower cleaning, with spin drying as the final step. The device accommodates work sizes from Φ2" to 12" wafers and 100 to 320□mm, with no need for setup changes when switching sizes. It offers the option of horizontal dual-sided scrub cleaning or vertical cleaning. 【Device Configuration】 ■ Loader: Immersion tank (Dry-in compatible) ■ Scrub Cleaning: Dual-sided scrub cleaning with PVA or nylon brushes (detergent and pure water cleaning) ■ Spin Cleaning: Two-fluid cleaning, DHF/SC-1/SPM cleaning (optional) ■ Rinse: MS shower, O3 cleaning ■ Back Rinse: DIW cleaning ■ Drying: N2 spin drying ■ Unloader: 1-2 cassettes or FOUP *For more details, please download the PDF or feel free to contact us.
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【Specifications (Partial)】 ■ Brush Pressure - Automatic correction function that controls the pressing force in 0.1mm increments according to brush wear - Capable of addressing the edges of the workpiece ■ Brush Cleaning Machine - Automatic cleaning of the brush before scrub cleaning (timing can be set as desired) - Thorough cleaning of roller brushes with a unique shaft-centered water supply method ■ Chemical supply tank and waste liquid tank can be built into both sides of the main body *For more details, please download the PDF or feel free to contact us.
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