Supports RCA cleaning and various etching! Significantly reduces the usage of chemicals and pure water as well as the footprint.
The product is a "multi-chamber wafer cleaning system" that offers both carrierless and carrier types. The carrierless type supports high-purity cleaning, significantly reducing the usage of chemicals and pure water, as well as the footprint. The carrier type allows for the selection of 1 or 2 cassettes for transporting a single batch. It is possible to configure the equipment for processes using acidic, alkaline, or organic chemical treatments. 【Features of the Multi-Chamber Carrierless System】 ■ Compatible with work sizes of 6-inch, 8-inch, and 12-inch wafers ■ Supports high-purity cleaning such as pre-coating cleaning through carrierless transport ■ Significantly reduces the usage of chemicals and pure water ■ Greatly minimizes the footprint ■ Drying options include IPA drying, warm water lift & IR drying, and Marangoni drying ■ Loaders and unloaders are compatible with cassettes or FOUPs *For more details, please download the PDF or feel free to contact us.
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【Features of Multi-Slot Carrier Type】 ■ Supports work sizes from 2-inch to 12-inch wafers ■ Choose between 1 or 2 cassettes for one batch transport ■ Drying options include spin dryer or IPA drying ■ Number of cassettes for loader and unloader can be customized as per request *For more details, please download the PDF or feel free to contact us.
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【Examples of Use】 ■RCA Cleaning ■Removal of Nitride Film ■Removal of Oxide Film ■Removal of Polymer ■Resist Stripping ■Silicon Etching ■Sacrificial Layer Etching ■Metal Etching ■Development *For more details, please download the PDF or feel free to contact us.
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