サーマプレシジョン List of Products and Services

The "CMS (Cerma Micro Stepper) - Ck" is a projection exposure device capable of fine pattern exposure, compatible with full-size substrates of 650×550mm. It uses a UV-LED light source as the standard light source. It is suitable for applications that require high precision, high resolution (L/S) of 2μm, and high productivity, starting with interposers. 【Features】 ■ Supports mass production processes from L/S = 1.4/1.4μm ■ Die-by-die alignment & global alignment methods ■ Capable of chip-first processes ■ Equipped with a tilt mechanism for each shot to improve yield *For more details, please refer to the documentation. Additionally, we have a clean room where our products can be evaluated. If you would like a demo, please feel free to contact us. (We can accommodate surrounding processes including lamination, coating, and development.)

The UV-LED light source "ULA Series" for exposure machines is a UV-LED lamp designed for exposure equipment. 【Features】 ■ Customizable for various optical specifications ■ Wavelengths: 365nm, 385nm, and 405nm can be mixed ■ Can replace the light source of proximity/contact aligners ■ High production: Achieves equal or greater illuminance compared to mercury lamps ■ Reduced power consumption: Achieves overwhelming reduction in running costs ■ Space-saving: Separation of UV-LED light source and power supply unit is possible ■ High-speed responsiveness: Electronic control for on/off irradiation timing (Mercury lamps are always on with a mechanical shutter) *For more details, please contact us or download the PDF to view.