スピードファムクリーンシステム Product Lineup

Compatible with small substrates! Double-sided scrub cleaning device ■□■ Features ■□■ ■ No restrictions on the shape of the workpiece ■ Easy double-sided scrubbing just by placing it ■ Can be operated while sitting ■ Equipped with a convenient work storage tank ■ Transparent table for easy maintenance ■ No setup changes needed for thicknesses from 0.05 to 1mm ■ Equipped with a soft yet powerful 20μ ultra-fine brush ■ Compact size similar to an office desk ■ Easy to move with casters ■ Ultrasonic feature under the scrub Achieves powerful combination cleaning with brushing and ultrasonic ■ For other functions and details, please download the catalog or contact us.

• Other cleaning machines
• Ultrasonic Oscillator

Always proposing the "best cleaning" Speed Fam Clean System's "HDD Parts Cleaning Service" ■□■ Cleaning Process ■□■ 【1】Cleaning after processing 【2】Cleaning before and after surface treatment 【3】Cleaning before assembly 【4】Cleaning before shipment 【5】Case cleaning ■□■ Cleaning Methods ■□■ ■ Flow Scrub (PAT.PEND) ■ Flow Ultrasonic Cleaning (PAT.) ■ Ultrasonic Combined 4-Sided Overflow Cleaning ■ Shower Cleaning with QDR (Quick Dump Rinse) ■□■ Drying Methods ■□■ ■ NEO Drying ■ Warm Pure Water Lift Drying (PAT.) ■ IPA Vapor Drying ■ Spin Drying ■ Vacuum Drying ■ Warm Air Drying ■ For more details, please download the catalog or contact us.

• Other cleaning machines
• Surface treatment contract service

Always proposing the "best cleaning" Speed Fam Clean System's "Hard Disk Cleaning Service" ■□■ Cleaning Process ■□■ 【1】Cleaning after polishing 【2】Cleaning before and after tempered glass treatment 【3】Cleaning before sputtering 【4】Cleaning after texturing 【5】Cleaning of the cassette ■□■ Cleaning Methods ■□■ ■ Flow Scrub (PAT.PEND) ■ Flow Ultrasonic Cleaning (PAT.) ■ Ultrasonic combined with 4-sided overflow cleaning ■ QDR (Quick Dump Rinse) with shower cleaning ■□■ Drying Methods ■□■ ■ NEO Drying ■ Warm Pure Water Lift Drying (PAT.) ■ IPA Vapor Drying ■ Spin Drying ■ Vacuum Drying ■ Warm Air Drying ■ For more details, please download the catalog or contact us.

• Other cleaning machines
• Surface treatment contract service

Always proposing "the best cleaning" Speed Fam Clean System's "Cleaning Services for Optical and Electronic Components" ■□■ Cleaning Process ■□■ 【1】Cleaning after polishing 【2】Cleaning before assembly 【3】Cleaning before film formation 【4】Cleaning after dicing 【5】Cleaning after resist stripping 【6】Wax cleaning 【7】Cleaning of polishing blocks ■□■ Cleaning Methods ■□■ ■ Ultrasonic combined, simultaneous dual-side scrub cleaning ■ Cup-type disc brush cleaning ■ Roll brush cleaning ■ Ultrasonic cleaning ■ Two-fluid cleaning ■ Ultrasonic shower cleaning ■ High-pressure spray cleaning ■□■ Drying Methods ■□■ ■ Air knife ■ IR ■ For more details, please download the catalog or contact us.

• Other cleaning machines
• Surface treatment contract service

Always proposing the "best cleaning" Speed Fam Clean System's "Cleaning of Flat Panel Displays" ■□■ Cleaning Process ■□■ 【1】Cleaning after cutting and beveling 【2】Cleaning before sputtering 【3】Cleaning before the process 【4】Developing, etching, and stripping 【5】Cleaning after liquid crystal injection and sealing ■□■ Cleaning Methods ■□■ ■ Ultrasonic combined, simultaneous double-sided scrub cleaning ■ Cup-type disc brush cleaning ■ Roll brush cleaning ■ Ultrasonic cleaning ■ Two-fluid cleaning ■ Ultrasonic shower cleaning ■ High-pressure spray cleaning ■□■ Drying Methods ■□■ ■ Air knife ■ IR ■ For more details, please download the catalog or contact us.

• Other cleaning machines
• Surface treatment contract service

High-density special brush adopted! Simultaneous double-sided! Ultrasonic combined scrubber ■□■ Features ■□■ ■ Prevents accumulation of contamination on the brush by scrubbing in water ■ Immersion scrub method that prevents reattachment of dirt to the substrate ■ No need to change setup for sizes from 0.1mm to 1mm ■ Double cleaning with scrub + ultrasonic ■ Cassette-to-cassette method adopted ■ Applicable workpieces: Φ3” to 6”Φ, 0.1mm to 1mm square, round ■ For other functions and details, please download the catalog or contact us.

• Other cleaning machines
• Ultrasonic Oscillator