ウシオ電機 List of Products and Services

This is an introduction to practical examples of Ushio's light sources for optical heating, which have a solid and abundant track record (impurity diffusion). 【Features】 ○ Light sources used: Xenon flash lamp, halogen heater lamp ○ In the semiconductor process, implantation is performed on the source drain, followed by an annealing process to activate the doped impurities. ○ Utilizing the characteristics of the xenon flash lamp, it is possible to perform high-temperature annealing in a very short time frame measured in milliseconds, allowing for extremely shallow areas (on the order of nm) compared to the depth of the previous active layer, thus preventing impurity diffusion. ● For other functions and details, please contact us.

This is an introduction to practical examples of Ushio's light sources for light heating (heating/thin film deposition), which has a tradition and a wealth of achievements. 【Features】 ○ Light source used: Halogen lamp heater ○ Optimal as a heat source for CVD and sputtering equipment used in the manufacturing processes of semiconductors, FPDs, and solar cells for the formation of metal films and insulating films. ○ Additionally, by using halogen lamp heaters for moisture removal and preheating before film deposition, it achieves improved throughput and high-quality film formation. ● For other functions and details, please contact us.

This is an introduction to practical examples of Ushio's light sources for light heating (high-speed temperature rise and fall) with a tradition and rich track record. 【Features】 ○ Light source used: Halogen lamp heater ○ With a small heat capacity, it is an excellent heat source for high temperature/rapid temperature rise characteristics, emitting radiation light from filaments above 3000K. ○ Used in many processes such as oxide film formation, impurity diffusion, silicide formation, and electrode firing in the thermal processing of semiconductors and durable batteries. ● For other functions and details, please contact us.

This catalog features light heating products centered around infrared halogen heaters. We offer a lineup that includes the straight tube halogen heater lamp "QIR," which can heat a wide area uniformly, and the circle-shaped halogen heater lamp "QIR Circle," suitable for high-temperature heating devices for silicon wafers. Additionally, we also introduce the "Flash Lamp Annealing Device SUS980 Series" and "LED Annealing Device." [Contents (partial)] ■ What is light heating? ■ Infrared halogen heaters ■ Applications of infrared halogen heaters ■ Types and special processing of infrared halogen heaters ■ Straight tube halogen heater lamp QIR *For more details, please refer to the PDF document or feel free to contact us.

The "Flash Lamp Annealing Device" is a light-based heating device that instantly anneals objects within one second. Using the light from a xenon flash lamp that has a continuous wavelength range from UV to visible and infrared, it can be variably adjusted within a range of 0.1 to 60 milliseconds. It can be used for a variety of applications utilizing a wide spectrum, such as sintering, peeling, and surface modification. 【Features】 ■ Spectrum - Wide wavelength characteristics from ultraviolet to visible and infrared regions ■ High output and large area processing (shortened tact time, high uniformity) - Multiple flash lamps can be arranged according to the work size, allowing for large area simultaneous irradiation with high intensity (Max 70 J/cm²). *For more details, please refer to the PDF materials or feel free to contact us.

Molecules that make up a substance maintain the temperature of the substance itself by constantly repeating vibrations. When a constant light is applied to this motion, the vibrations become larger, and the heat generated increases proportionally. This is known as the "principle of light heating." Heat transfer is physically limited to three types, and light heating falls under "radiative heat transfer." The fields and processes where light heating excels include heat treatment, degassing, reactions, deposition, and drying. 【Three Principles of Heat Transfer】 ■ Conduction - A phenomenon where heat moves based on temperature differences without the transport of energy through the movement or radiation of substances within the material. ■ Convective Heat Transfer - A phenomenon where heat is transferred by the actual flow of fluids. ■ Radiative Heat Transfer - A phenomenon where heat is transferred through thermal radiation and thermal absorption. *For more details, please refer to the related links or feel free to contact us.

The "halogen lamp heater" is a highly efficient lamp-type radiant heating source that converts over 85% of the input power into infrared radiation. Reducing power consumption achieves lower running costs. Using a tungsten filament with a small heat capacity as the heating element allows for non-contact rapid temperature rise and fall. Additionally, unlike resistance heating sources that continuously consume power, it can be turned ON when needed and OFF when not, reducing running costs. 【Features】 ■ High-efficiency energy source ■ Excellent temperature rise and fall performance ■ Light wavelength matched to material absorption characteristics ■ High control performance ■ Compact and clean heat source ■ Long lifespan with consistent energy radiation *For more details, please refer to the related links or feel free to contact us.

We would like to introduce the "Flash Lamp," which enables high throughput through bulk irradiation of large-area substrates. The light heating from this product utilizes the "absorption" characteristic of materials, allowing for self-heating by leveraging their properties of "reflection," "transmission," and "absorption." Additionally, since it is non-contact, it maintains a clean atmosphere and is not limited by the heating environment, whether in the atmosphere or in a vacuum. 【Features】 ■ Bulk irradiation of large areas - Enables high throughput through bulk irradiation of large-area substrates. ■ High efficiency / energy-saving - The wavelength from this product matches the absorption characteristics of Si, allowing for efficient heating. ■ Control of processing depth through pulse control - Minimizes thermal damage to the substrate and allows for heating of only the surface layer. *For more details, please refer to the related links or feel free to contact us.

Electromagnetic waves with wavelengths ranging from 10 nm (10×10^-9 m) to 100,000 nm are referred to as "light," and all radiating bodies that emit electromagnetic waves in this wavelength range are called "light sources." When we commonly refer to light, we are talking about visible light, which has wavelengths between 400 nm and 750 nm. Light with shorter wavelengths (10 nm to 400 nm) is called ultraviolet light, while light with longer wavelengths (750 nm to 100,000 nm) is referred to as infrared light. For more information, please see the related links. [Contents (partial)] 1. Light and Halogen Bulbs 2. Halogen Bulbs (HALOGEN LAMP) 3. Features of Halogen Bulbs 4. Composition of Halogen Bulbs 5. Structure of Halogen Bulbs and Names of Each Part *Detailed content of this paper can be viewed through the related links. For more information, please feel free to contact us.

The main causes of halogen lamp failure are as follows: (1) Decrease in illuminance due to blackening (2) Filament breakage (3) Coil pitch short due to sag (4) Seal failure Among these, it was known that the first three causes of lifespan factors are related to the halogen cycle, but the understanding of this was quite poor. However, recently, measurements of gas phases that contribute to these lifespan factors have been reported using Fourier Transform Infrared (FT-IR) Spectroscopy, and the kinematic model for lifespan has become considerably clearer. [Contents (partial)] ■1. Introduction ■2. Behavior of CO and HBr gases during operation ■3. Oxygen release and lifespan during lamp operation ■4. CO levels and lifespan ■5. HBr levels and lifespan *For detailed content of this paper, please refer to the related links. For more information, feel free to contact us.

The "Infrared Halogen Heater" is utilized in various fields, including resin molding, automotive, photovoltaic, and semiconductor industries, leveraging its excellent characteristics. It is capable of heating materials such as silicon, glass, steel plates, and carbon fibers. In the resin molding field, the heating targets include PET materials and aspheric lenses, and it is used for preheating molds and molding PET bottles. 【Features】 ■ High-efficiency energy source ■ Quick startup and shutdown ■ High controllability due to being light-based ■ Compact and clean heat source ■ Compatible with various heat distribution patterns and heating speeds *For more details, please refer to the PDF document or feel free to contact us.

We would like to introduce the types of infrared halogen heaters and special processing. As a heat source incorporated into heating devices and units, customization is possible according to purpose, application, and usage environment. We offer a selection of heater units that can be chosen based on the shape of the heating target and the irradiation range. 【Types of Heater Lamps】 ■ Circular heater lamp ■ Straight tube heater lamp ■ Spot heater lamp ■ Single-end heater lamp *For more details, please refer to the PDF materials or feel free to contact us.

The "Straight Tube Halogen Heater Lamp QIR" allows for linear heating and can be used in multiple units to achieve flat heating over a wide area. It is also suitable as a heat source for heating devices such as glass and building materials. Designs can be tailored to various sizes and characteristics, from short to long lengths. In the custom-made system, it can be designed to any dimension, wavelength, installation conditions, and characteristics up to a maximum length of 2200mm. 【Features】 ■ In addition to linear heating, it can be used in multiple units to achieve flat heating over a wide area ■ Suitable as a heat source for heating devices such as glass and building materials ■ Designs can be tailored to various sizes and characteristics, from short to long lengths ■ Can be designed to any dimension, wavelength, installation conditions, and characteristics up to a maximum length of 2200mm *For more details, please refer to the PDF document or feel free to contact us.

The "QIR Circle Halogen Heater Lamp" is a circular lamp suitable for high-temperature heating devices such as silicon wafer heaters. It can be utilized when heating in a circular shape or within a circular range is required. Custom designs can be made according to desired sizes and characteristics, and processing for vacuum compatibility is also possible. In the custom-made system, any dimensions, wavelengths, installation conditions, and characteristics can be designed up to a maximum circle diameter of 500mm. 【Features】 ■ A circular lamp suitable for high-temperature heating devices such as silicon wafer heaters ■ Can be utilized when heating in a circular shape or within a circular range is required ■ Custom designs can be made according to desired sizes and characteristics, and processing for vacuum compatibility is also possible ■ Can be designed for any dimensions, wavelengths, installation conditions, and characteristics up to a maximum circle diameter of 500mm *For more details, please refer to the PDF document or feel free to contact us.

We would like to introduce the "U-shaped Halogen Heater Lamp" that we handle. In accordance with your heating plan, we can accommodate various shapes and sizes of enclosures, such as U-shaped and arc-shaped, as well as filament design requests. We offer "QIR400V2500WU" and "QIR400V3500WU." Please feel free to contact us when you need assistance. 【QIR400V2500WU Specifications (Excerpt)】 ■ Rated Voltage: 400V ■ Power Consumption: 2500W ■ Rated Life: 5000h ■ Color Temperature: 2800K ■ Total Length (between contacts): 250mm ■ Tube Diameter: 10Φmm *For more details, please refer to the PDF document or feel free to contact us.

The "Straight Tube Double Tube Halogen Heater Lamp QIRT" is a lamp that can directly heat liquids such as water, chemicals, and oil by enhancing airtightness through its double tube structure. Additionally, the double tube structure increases safety by preventing scattering in the event of lamp breakage, making it suitable as a heat source for food heating applications such as fryers. In the custom-made system, it can be designed according to any dimensions, wavelengths, installation conditions, and characteristics. 【Lineup】 ■QIRT100V500W ■QIRT100V700W ■QIRT200V2000W ■QIRT200V2000WL *For more details, please refer to the PDF materials or feel free to contact us.

In special processing of lamps, customization is possible according to the application and purpose, such as heat distribution, strength distribution, required wavelength, and the environment in which they will be used. When changing the spread of light (heat), we can accommodate this with "reflective film coating," "heat distribution design," and "frosted processing." Additionally, we can change the wavelength of light (heat) with "black coating that emits far infrared radiation," and adapt to the usage environment with "dimple processing that allows omnidirectional lighting." 【Processing Examples (Excerpt)】 ■ Reflective film coating ■ Heat distribution design ■ Frosted processing ■ Black coating that emits far infrared radiation ■ Adjusting to the required wavelength *For more details, please refer to the PDF materials or feel free to contact us.

We will introduce the wavelength and lifespan of infrared halogen heaters. The peak wavelength can be calculated using 2897 divided by the color temperature (K), and by changing the color temperature of the halogen heater, it is possible to correspond to various wavelengths. The lifespan is affected not only by the breaking of the filament but also by failures in the sealing part. The "halogen cycle" helps to suppress the blackening of the bulb wall and prevents the wear of the filament. Compact and long-lasting, these are the characteristics of halogen lamps. 【Features】 ■ The wavelength peaks in the near-infrared range (approximately 1.2μm) ■ The peak wavelength can be calculated using 2897 divided by the color temperature (K) ■ By changing the color temperature of the halogen heater, it is possible to correspond to various wavelengths *For more details, please refer to the PDF document or feel free to contact us.

We will introduce the control methods for infrared halogen heaters. The typical lighting control methods used when turning on a halogen heater are the "phase control method with soft start function" and the "cycle control method with zero-cross function." The "phase control method with soft start function" controls the conduction time (phase angle) for each half cycle of the AC power supply. In the "cycle control method with zero-cross function," the heat generation of the halogen heater is controlled by adjusting the ratio of the on period to the off period within a fixed cycle (usually selectable). 【Features of the Phase Control Method with Soft Start Function】 ■ Controls the conduction time (phase angle) for each half cycle of the AC power supply to regulate the heat generation of the halogen heater. ■ Allows for gradual voltage adjustment, enabling soft start control. ■ Minimizes the impact of inrush current. ■ There is a risk of causing malfunction in surrounding electronic devices due to the generation of harmonics, so caution is needed. *For more details, please refer to the PDF document or feel free to contact us.

The "Line Heater Unit" combines a heater lamp and a mirror, demonstrating its effectiveness in line heating and heating large areas. By narrowing down the dimensions and characteristics for standardization, it offers high cost performance, making it easy to introduce for prototype verification and experiments. Additionally, we also accommodate custom orders tailored to the required specifications. Please feel free to contact us when needed. 【Features】 ■ Combines a heater lamp and a mirror, demonstrating effectiveness in line heating and heating large areas ■ Standardized by narrowing down dimensions and characteristics ■ High cost performance ■ Easy to introduce for prototype verification and experiments ■ Accommodates custom orders tailored to required specifications *For more details, please refer to the PDF document or feel free to contact us.

The "High Power Line Heater Unit (Custom Made)" is a high-output product that enables light control in high-temperature ranges exceeding 500°C. We select lamps, mirror shapes, and cooling methods tailored to the user's desired temperature, output, and dimensions, providing a completely custom-made solution. Mirror shapes available include the focus type, parabolic type P, and parabolic type N (compact type with gold-plated mirror specifications). 【Features】 ■ High-output line heater unit that enables light control in high-temperature ranges exceeding 500°C ■ Completely custom-made solutions by selecting lamps, mirror shapes, and cooling methods tailored to specific characteristics ■ Available in focus type, parabolic type P, and parabolic type N ■ Parabolic type can uniformly irradiate a wide area *For more details, please refer to the PDF document or feel free to contact us.

The "Circle Heater Unit" is a product that is particularly suitable for rapid heating of silicon wafers and pre-heating of glass lenses before molding. The reflector and lamp, designed through 3D reflection light simulation, are appropriately arranged. It has excellent heating uniformity and temperature rise performance. Please feel free to contact us when you need assistance. 【UL-HU-CH36KW/STD Specifications (Excerpt)】 ■ Rated Voltage: 200V ■ Power Consumption: 36kW ■ Unit Outer Diameter: 470mm ■ Unit Depth: 235.5mm ■ Weight: 30kg *For more details, please refer to the PDF document or feel free to contact us.

The "Spot Heater Unit" is a product that combines a high-efficiency reflective mirror and a halogen heater lamp to enhance the directionality of heat rays. It is a compact and lightweight design that can be easily installed anywhere as a spot type. Please feel free to contact us when you need assistance. 【Features】 ■ Combination of high-efficiency reflective mirror and halogen heater lamp ■ Product that enhances the directionality of heat rays ■ Compact and lightweight design ■ Easily installable anywhere ■ Spot type *For more details, please refer to the PDF materials or feel free to contact us.

The "Far Infrared Snow Melting Heater Unit" is a product that demonstrates high snow melting effectiveness by using a halogen heater as a heat source, which has a high thermal conversion efficiency and enables radiant heating through light (far infrared rays). Since it does not require a complex system, the installation cost is reduced. It can be easily installed in various locations, including existing building walls and balls. Being electrically controlled, it also allows for automation through snow sensors and timers. You can establish a snow melting system with reduced running costs. 【Features】 ■ High-efficiency spot snow melting with light heating ■ Easy installation in various locations ■ Support for low-cost installation ■ Compatible with snow melting automation *For more details, please refer to the PDF document or feel free to contact us.

We would like to introduce our "Control Panel for Halogen Heater Units." This is a temperature control system using halogen heaters, featuring high functionality in a compact size. With detailed recipes (sensor switching, control modes), flexible temperature control is also possible. We support everything from experimental research applications to mass production. 【Simplified Experimental Model Specifications (Excerpt)】 ■ Application: Experiment/Research ■ Connection Method: Standalone ■ Power Control Method: Phase Control ■ Output Adjustment Method: Manual ■ Recipe: None *For more details, please refer to the PDF materials or feel free to contact us.

The "SUS980 Series" is a flash lamp annealing device that can be used for applications such as crystallization, peeling, and oxide film formation. By controlling the current flowing through the lamp with a semiconductor switch to turn it ON/OFF, the pulse width of the lamp current can be adjusted, allowing for control of the heating depth (0.1 to 60 msec). Depending on the work size, multiple flash lamps can be arranged for large area irradiation, enabling high irradiation. 【Features】 ■ Depth control (pulse control) ■ ON/OFF control of the current flowing through the lamp using a semiconductor switch ■ Adjustable lamp current pulse width for controlling heating depth (0.1 to 60 msec) ■ Multiple pulse irradiation is also possible ■ High output and large area processing (shortened tact time, high uniformity) *For more details, please refer to the PDF document or feel free to contact us.

The "LED Annealing Device" is the third light heating source following halogen heaters and flash lamps. It achieves energy savings through improved heating efficiency and reduces thermal budget with high-speed responsiveness. Real-time temperature measurement using a radiation thermometer is possible. Additionally, it can heat the surface of substrates and demonstrates excellent heating efficiency for metal materials. 【Features】 ■ Improved heating efficiency ■ High-speed responsiveness ■ High-precision temperature measurement ■ High uniformity ■ Capable of heating substrate surfaces *For more details, please refer to the PDF materials or feel free to contact us.