ウシオ電機 Product Lineup

This is a case study of RTP using light sources for light heating from Ushio, a company with tradition and a wealth of achievements. In the past, semiconductor thermal processing commonly used furnaces (insulated), but for nano-order devices, thin film formation and shallow junctions are required, making RTP, which is synonymous with isothermal processes, a key technology. Additionally, in next-generation semiconductors, flash lamp annealing has become the mainstream technology as a thermal flux technique. ● For other functions and details, please contact us.

This is an introduction to examples of food warming (heating) using light sources for thermal heating from Ushio, a company with tradition and a wealth of achievements. 【Features】 ○ Halogen lamp heaters emit visible light and infrared radiation, that is, light when turned on, while also providing thermal radiation. This characteristic is utilized in showcases that serve the dual purpose of warming food. ○ Depending on the amount of energy input, it can be used not only for warming but also as a power source for heating and cooking. ● For other functions and details, please contact us.

This is a case study of bathroom drying using Ushio's light source for light heating, which has a tradition and a wealth of achievements. 【Features】 ○ Adoption of halogen heaters in bathroom dryers ○ The light from halogen heaters is emitted as radiant heat, making it less affected by the surrounding environment compared to warm air types, allowing for a warm feeling right after turning on. ○ The electrode part of the heater is designed with a waterproof structure using silicone adhesive, enabling reliable use even in high humidity environments without compromising performance. ● For other functions and details, please contact us.

This is an introduction to examples of liquid temperature maintenance and overheating using Ushio's light source for thermal heating, which has a tradition and a wealth of achievements. 【Features】 ○ Capable of maintaining temperature and humidifying pure water and chemical solutions used for cleaning silicon wafers in semiconductor manufacturing lines and glass substrates in LCD manufacturing lines. ○ Composed of halogen lamps covered with high-quality quartz glass, resulting in minimal impurity contamination and the ability to heat efficiently with an efficiency of over 95%. ● For other functions and details, please contact us.

This is a case study of electrode sintering using light sources for light heating from Ushio, a company with tradition and a wealth of achievements. By using halogen heaters, we can perform heat treatment that matches the characteristics of substrates and electrode materials due to the rapid heating capability, heat distribution, and radiation wavelength of halogen heaters. ● For other functions and details, please contact us.

This is a case study of a preheating system for a film deposition device using light sources for light heating from Ushio, a company with a wealth of experience and achievements. By using a halogen lamp heater that has non-contact and high-speed heating capabilities even in a vacuum environment, we can contribute to reducing the takt time in the film deposition processes for semiconductors, FPDs, solar cells, and more. ● For other functions and details, please contact us.