イーエッチシー List of Products and Services

The "VD-400" is a vacuum chamber designed for vacuum drying glass substrates after resist coating. 【Features】 - Simplified operation through touch panel control - Recipe operation available (allows for reproduction of operating procedures) - Two-stage exhaust to implement drying while suppressing wind patterns and foaming - Adoption of a butterfly valve allows for setting vacuum exhaust capacity 【Main Specifications】 ○ Chamber: External dimensions 400mm x 400mm, height 103mm (when lid is closed) Internal dimensions 350mm x 350mm, height 30mm ○ Vacuum: Achievable vacuum level of approximately 1Pa or lower (under no load) *For more details, please contact us or download the catalog.

The automatic conveyance development device "ACT-300A2S" is a machine that performs spray development while rotating substrates up to 6 inches in size. It is equipped with two systems for developing solution, one system for rinsing, and an air knife, allowing recipe settings to be operated via a touch panel, enabling automatic development processing of up to 25 pieces. *There is also a sheet-type model available without automatic processing. 【Main Specifications】 ○ Processing Capacity: Capable of continuous processing of up to 25 round substrates of 6 inches ○ Process: Developing solution: 2 systems, Rinsing: 1 system, Air knife: 1 system ○ Chemicals Used: Alkaline developing solution, deionized cleaning water For more details, please contact us or download the catalog.

The "VD-500S" is a vacuum chamber designed for vacuum drying glass substrates after resist coating. It features a chamber size that is larger than that of the "VD-400." 【Features】 - Simplified operation through touch panel control - Recipe operation available (allows for reproduction of operating procedures) - Implementation of drying that suppresses wind patterns and foaming through two-stage exhaust - Adoption of a butterfly valve allows for the setting of vacuum exhaust capacity 【Main Specifications】 ○ Chamber: External dimensions 580mm x 480mm, height 103mm (when lid is closed) Internal dimensions 530mm x 430mm, height 53mm ○ Vacuum: Achievable vacuum level of approximately 1Pa or lower (under no load) *For more details, please contact us or download the catalog.