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  5. Resist Device
  6. Decompression drying device "VD-500S"

Decompression drying device "VD-500S"

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VD-500S

last updated:Dec 11, 2025

イーエッチシー
イーエッチシー
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It is a vacuum drying device that allows recipe operation through touch panel control.

The "VD-500S" is a vacuum chamber designed for vacuum drying glass substrates after resist coating. It features a chamber size that is larger than that of the "VD-400." 【Features】 - Simplified operation through touch panel control - Recipe operation available (allows for reproduction of operating procedures) - Implementation of drying that suppresses wind patterns and foaming through two-stage exhaust - Adoption of a butterfly valve allows for the setting of vacuum exhaust capacity 【Main Specifications】 ○ Chamber: External dimensions 580mm x 480mm, height 103mm (when lid is closed) Internal dimensions 530mm x 430mm, height 53mm ○ Vacuum: Achievable vacuum level of approximately 1Pa or lower (under no load) *For more details, please contact us or download the catalog.

    Resist Device
減圧乾燥装置バナー用写真_EHC.jpg

Decompression drying device "VD-500S"

減圧乾燥装置バナー用写真_EHC.jpg
減圧乾燥装置バナー用写真_EHC.jpg s_減圧乾燥装置3.jpg s_減圧乾燥装置1.jpg s_減圧乾燥装置4.jpg IPROS2397893973774203700_220x220.jpg IMG_1906.JPG IMG_1923.JPG IMG_1925.JPG IMG_1927.JPG IMG_1928.JPG
  • Related Link - http://www.jehc.co.jp/products/view/85/%E6%B8%9B%E…
  • Special site - Product/service details - https://pr.mono.ipros.com/EHC/product/

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basic information

【Specifications】 〇Chamber: External dimensions 580mm x 480mm, height 103mm (when lid is closed) Internal dimensions 530mm x 430mm, height 50mm 〇Vacuum system: Achievable vacuum level below 1Pa (without sample) Dry pump 600L/min 〇Decompression method: Pressure mode - automatically releases to atmosphere when set pressure is reached Time mode - automatically releases to atmosphere after set time of decompression Pressure & time - decompresses to set pressure and holds pressure, automatically releases to atmosphere after set time 〇Utilities: 3Φ AC200~240V/15A 50/60Hz Dry air 0.4~0.6MPa Connection for vacuum exhaust duct 〇External dimensions: (W) 1200 x (L) 1000mm x (H) 950mm 〇Device weight: Approximately 250Kg *The above items can be changed according to requirements. ●For more details, please contact us or download the catalog.

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Applications/Examples of results

Vacuum drying of glass substrates coated with color resist Thin film formation on substrates coated with organic solvents It is possible to dry samples that are sensitive to powder and heat at low temperatures.

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イーエッチシー

イーエッチシー

Electronic Components and Semiconductors

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Since our founding in 1972, we have supported engineers and researchers involved in displays. We manufacture and sell various glass substrates and world-standard EHC cells both domestically and internationally, which are the core of our business. In recent years, there has been a growing demand for diverse metal deposition substrates and high-resolution patterned glass substrates. As peripheral equipment, we provide custom small LCD panel assembly systems, wet process equipment, and measurement and inspection devices for organic EL and solar cells, either as dedicated systems or including simple jigs and other components.

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