セイコーフューチャークリエーション Company Profile

We will be exhibiting at the commercial exhibition of the "43rd Nano Testing Symposium NANOTS 2023" with the theme of "Introduction of IC wiring modification and circuit modification using FIB, and foreign object detection technology through three-dimensional cross-sectional observation using FIB/TEM." This exhibition is a great opportunity to obtain various information that can be applied in various semiconductor scenarios. We sincerely look forward to your visit. 【Exhibition Overview】 43rd Nano Testing Symposium NANOTS 2023 ● Official Website: 43rd Nano Testing Symposium NANOTS 2023 ● Date and Time: November 7, 2023 (Tuesday) 13:00~17:00 November 8, 2023 (Wednesday) 9:30~17:00 November 9, 2023 (Thursday) 9:30~16:00 ● Venue: Senri Life Science Center (Toyonaka City, Osaka Prefecture) ● Booth Number: 21 ● Seiko Future Creation Exhibition Content: - IC wiring modification processing - Probing PAD fabrication - FIB-3D processing TEM analysis - Compound semiconductor TEM analysis

The focused ion beam (FIB) device irradiates a focused ion beam onto a sample for processing and observation. Additionally, the FIB-SEM is equipped with a high-resolution FE-SEM (field emission scanning electron microscope), allowing for simultaneous high-resolution observation and processing. This video demonstrates the observation of "plating defects" using the Slice & View and 3D construction functions of the FIB-SEM (Thermo Fisher Scientific: Helios 5 CX). The Slice & View function shows how the defects spread from their origin, while the 3D construction allows for confirmation of the shape of the defects.

We have introduced the latest model of the focused ion beam scanning electron microscope (FIB-SEM), the Thermo Scientific DualBeam Helios 5 CX manufactured by Thermo Fisher Scientific. This device combines high-resolution imaging of the scanning electron microscope with milling capabilities of the focused ion beam, enabling high-quality subsurface analysis and 3D analysis. It also comes with an energy-dispersive X-ray spectroscopy (EDS) system, allowing for 3D analysis of detected elements. If you would like to know more about this device, or if you have any requests or inquiries regarding analysis and processing, please feel free to contact us. ● Email: sfc-tr1@seiko-sfc.co.jp ● Phone number: 047-391-2298