Molecular Pump - Company Ranking(4 companyies in total)
Last Updated： Aggregation Period:Jul 09, 2025〜Aug 05, 2025
This ranking is based on the number of page views on our site.
Display Company Information
| Company Name | Featured Products | ||
|---|---|---|---|
| Product Image, Product Name, Price Range | overview | Application/Performance example | |
| 【Features】 ○ The upper part uses magnetic bearings and the lower part uses pivot bearings, completely eliminating mechanical contact during high-speed rotation. → This makes bearing and oil replacement unnecessary, achieving a longer lifespan for the bearings. ○ High-speed rotation is achieved with a fine dynamic balance rotor designed with a unique blade arrangement and high-performance bearings, enabling exhaust performance for low molecular weight gases such as H2 and He (high compression ratio). ○ By adopting pivot bearings and fluorinated oil (chemically stable and low vapor pressure oil), an environment that is nearly oil-free is realized. → This enables the achievement of clean ultra-high vacuum. ○ The use of fine dynamic balance rotors and high-performance bearings results in low noise and low vibration. ● For more details, please contact us or download the catalog. | 【Applications】 ○ Main exhaust systems for analytical devices, research and development equipment, experimental apparatus, etc. ○ Main exhaust systems for low molecular weight gases such as H2 and He ○ Main exhaust systems for analytical devices and evaluation equipment that are sensitive to vibrations ● For more details, please contact us or download the catalog. | ||
| 【Features】 ○ A wide range from 350L/s to the world's largest (digital magnetic bearing type) 6300L/s ○ Maintains stable exhaust characteristics against changes in back pressure (FH series) ○ Options available such as an internal heating system that manages rotor temperature and reduces the adhesion of by-products (FW series) ○ Excellent corrosion-resistant surface treatment (excluding 3303FH and 6300FH) → Special surface treatments (Ni plating + cationic electrodeposition coating, special laminated coatings, anodizing, etc.) are also available as options if needed ○ Can be mounted in all directions ○ Equipped with a speed variable system, allowing pump rotation speed to be varied from 25% to 100% ○ With the coupling-free system and tuning-free system, combinations of power supply and pump body or changes in cable length are flexible ○ By adopting a battery-free system, the backup power during a power outage uses self-generated energy from regenerative energy (no battery replacement needed) ○ Equipped with monitoring and self-diagnosis functions, as well as communication capabilities, enabling compatibility with centralized monitoring systems ● For more details, please contact us or download the catalog. | 【Applications】 [UTM-FH Series] ○ Main exhaust for light to middle processes without by-products from reactions in deposition devices, sputtering devices, dry etching devices, etc. ○ Main exhaust systems for analytical devices, research and development devices, experimental devices, etc. ○ Main exhaust systems for light gases such as H2 and He in the above exhaust systems. ○ Applications using multiple TMPs with centralized exhaust for backing pumps. [UTM-FW Series] ○ Main exhaust systems for middle to hard processes in dry etching devices, CVD devices, etc. ○ High flow gas exhaust applications for dry etching devices, CVD devices, sputtering devices, etc. ○ Main exhaust systems for analytical devices, research and development devices, experimental devices, etc. ● For more details, please contact us or download the catalog. | ||
| 【Features】 ○ Free installation direction → There are no restrictions on the installation direction, allowing for greater design flexibility of the device. ○ Equipped with an onboard controller → The controller is mounted on the turbo body, which is effective for reducing wiring and downsizing the exhaust system. ○ High compression ratio and high back pressure → The high compression ratio allows for operation under high back pressure, enabling the downsizing of auxiliary pumps. ○ Three types of flanges available → You can choose from three types of intake flanges: VG100, ICF152, and ISO100-K. ○ Clean vacuum → Designed to minimize hydrocarbon backflow not only during operation but also when the pump is stopped. ○ Low noise → The noise level during no-load operation is below 50 dB, making it quiet (measured value for ISO-100K flange type). ○ Compliance standards → CE, NRTL compliant. ● For more details, please contact us or download the catalog. | 【Applications】 ○ Main exhaust systems for analysis devices, research and development devices, experimental devices, etc. ○ Main exhaust systems for deposition devices, sputtering devices, etc. ○ Main exhaust systems for light gases such as H2 and He. ● For more details, please contact us or download the catalog. | ||
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アルバック／ULVAC, Inc.
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- Featured Products
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Pivot Bearing Type Turbo Molecular Pump UTM Series
- overview
- 【Features】 ○ The upper part uses magnetic bearings and the lower part uses pivot bearings, completely eliminating mechanical contact during high-speed rotation. → This makes bearing and oil replacement unnecessary, achieving a longer lifespan for the bearings. ○ High-speed rotation is achieved with a fine dynamic balance rotor designed with a unique blade arrangement and high-performance bearings, enabling exhaust performance for low molecular weight gases such as H2 and He (high compression ratio). ○ By adopting pivot bearings and fluorinated oil (chemically stable and low vapor pressure oil), an environment that is nearly oil-free is realized. → This enables the achievement of clean ultra-high vacuum. ○ The use of fine dynamic balance rotors and high-performance bearings results in low noise and low vibration. ● For more details, please contact us or download the catalog.
- Application/Performance example
- 【Applications】 ○ Main exhaust systems for analytical devices, research and development equipment, experimental apparatus, etc. ○ Main exhaust systems for low molecular weight gases such as H2 and He ○ Main exhaust systems for analytical devices and evaluation equipment that are sensitive to vibrations ● For more details, please contact us or download the catalog.
Digital Magnetic Bearing Turbo Molecular Pump UTM-FH/FW Series
- overview
- 【Features】 ○ A wide range from 350L/s to the world's largest (digital magnetic bearing type) 6300L/s ○ Maintains stable exhaust characteristics against changes in back pressure (FH series) ○ Options available such as an internal heating system that manages rotor temperature and reduces the adhesion of by-products (FW series) ○ Excellent corrosion-resistant surface treatment (excluding 3303FH and 6300FH) → Special surface treatments (Ni plating + cationic electrodeposition coating, special laminated coatings, anodizing, etc.) are also available as options if needed ○ Can be mounted in all directions ○ Equipped with a speed variable system, allowing pump rotation speed to be varied from 25% to 100% ○ With the coupling-free system and tuning-free system, combinations of power supply and pump body or changes in cable length are flexible ○ By adopting a battery-free system, the backup power during a power outage uses self-generated energy from regenerative energy (no battery replacement needed) ○ Equipped with monitoring and self-diagnosis functions, as well as communication capabilities, enabling compatibility with centralized monitoring systems ● For more details, please contact us or download the catalog.
- Application/Performance example
- 【Applications】 [UTM-FH Series] ○ Main exhaust for light to middle processes without by-products from reactions in deposition devices, sputtering devices, dry etching devices, etc. ○ Main exhaust systems for analytical devices, research and development devices, experimental devices, etc. ○ Main exhaust systems for light gases such as H2 and He in the above exhaust systems. ○ Applications using multiple TMPs with centralized exhaust for backing pumps. [UTM-FW Series] ○ Main exhaust systems for middle to hard processes in dry etching devices, CVD devices, etc. ○ High flow gas exhaust applications for dry etching devices, CVD devices, sputtering devices, etc. ○ Main exhaust systems for analytical devices, research and development devices, experimental devices, etc. ● For more details, please contact us or download the catalog.
Ceramic ball bearing turbo molecular pump UTM300B
- overview
- 【Features】 ○ Free installation direction → There are no restrictions on the installation direction, allowing for greater design flexibility of the device. ○ Equipped with an onboard controller → The controller is mounted on the turbo body, which is effective for reducing wiring and downsizing the exhaust system. ○ High compression ratio and high back pressure → The high compression ratio allows for operation under high back pressure, enabling the downsizing of auxiliary pumps. ○ Three types of flanges available → You can choose from three types of intake flanges: VG100, ICF152, and ISO100-K. ○ Clean vacuum → Designed to minimize hydrocarbon backflow not only during operation but also when the pump is stopped. ○ Low noise → The noise level during no-load operation is below 50 dB, making it quiet (measured value for ISO-100K flange type). ○ Compliance standards → CE, NRTL compliant. ● For more details, please contact us or download the catalog.
- Application/Performance example
- 【Applications】 ○ Main exhaust systems for analysis devices, research and development devices, experimental devices, etc. ○ Main exhaust systems for deposition devices, sputtering devices, etc. ○ Main exhaust systems for light gases such as H2 and He. ● For more details, please contact us or download the catalog.
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アルバック／ULVAC, Inc.
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