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  4. Product Information: Pressure-Based Metal Seal Mass Flow Controller 'GP200 Series'
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  • Aug 21, 2025
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Aug 21, 2025

Product Information: Pressure-Based Metal Seal Mass Flow Controller 'GP200 Series'

ITWジャパン ITWジャパン
"Maximizing the Best Performance" This is the industry's first fully pressure-insensitive type of pressure-based mass flow controller (P-MFC) specifically designed for advanced etching and deposition processes in semiconductor manufacturing. The GP200 series P-MFC adopts a patented architecture that overcomes the limitations of conventional P-MFCs, enabling high-precision process gas supply even with low vapor pressure process gases. It also features a built-in differential pressure sensor and a unique design that places the valve downstream, allowing for high-precision process gas supply across the widest range of operating conditions in the industry. Due to its compatibility with a wide range of process conditions, it can be used as a replacement or upgrade for conventional P-MFCs and thermal MFCs. Additionally, by eliminating the need for components such as pressure regulators and converters, it simplifies the gas supply system and reduces costs. [Main Applications] ■ Semiconductor Manufacturing ■ Etching ■ CVD ■ Gas flow control applications requiring high-purity all-metal flow paths
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[Official Site] GP200 Series Pressure-Based Metal-Sealed Mass Flow Controller
[Video] Brooks Instrument Pressure-based Mass Flow Controllers - Theory of Operation

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Pressure-based mass flow controller "GP200 series"

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.

  • Other measurement, recording and measuring instruments

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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Flow Meter
  • Flow Control
  • Safety Controller

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001.PNG

Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!

The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.

This document is a comprehensive catalog featuring Brooks Instrument's flow, pressure, steam, and vacuum products. It includes pressure controllers such as the "SLA Series," which eliminates closed-loop, boost, and hysteresis, as well as thermal mass flow devices like the "GF40 Series," which can cover multiple gas types and flow ranges with a single unit, along with area flow meters, pressure/vacuum products, and more. This is a very informative book, so please take a look when considering implementation. 【Contents】 ■ Mass Flow & Pressure Controllers ■ Area Flow Meters ■ Pressure/Vacuum Products ■ Secondary Electronics & Software ■ Communication Protocols ■ Service & Support *For more details, please download the PDF or feel free to contact us.

  • Flow Meter
  • Pressure Control
  • Safety Controller

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Service & Support

Reliable products, highly specialized services! We restore equipment to "like-new condition"!

Our company has experienced technical support members with deep knowledge of flow control, a strong background in electrical and mechanical engineering, and a profound understanding of control systems in the field of biotechnology. With decades of extensive experience, we restore equipment to "like-new condition." Our calibration service experts issue calibration certificates. Please feel free to contact us with your service and installation requests. 【Features】 ■ All repairs use factory-certified new parts ■ All repair services come with a warranty period ■ Calibration service experts issue calibration certificates ■ Global service locations ■ Hardware upgrades are possible via digital protocols *For more details, please refer to the PDF materials or feel free to contact us.

  • Flow Meter
  • Pressure
  • Calibration and repair

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[Cast Iron Repair] We will repair cracks that have occurred in metal equipment without applying heat.

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The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact on the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

May 08, 2026

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[Cast Iron Crack Repair] We repair cracks in metal products without applying heat.

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  • COMPANY

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

May 08, 2026

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Aluminum prototype: Lost wax casting sand mold layered 3D printer prototype.

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  • COMPANY

● The production time for casting prototypes can be shortened! Since model production is not required, the time needed to create prototypes, which previously took about a month, can be significantly reduced. ● Model costs can be reduced! By directly producing sand molds from 3D data, there is no need for model production costs. If changes to the model are necessary, they can be addressed by modifying the 3D data. ● Similar products with different shapes and dimensions can be prototyped simultaneously! With one molding process, different products with similar shapes or varying dimensions can be molded at the same time. This allows for the verification of multiple types in a short period.

May 08, 2026

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[To the design office] Are you struggling to explain "safety" to the client using only drawings?

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  • CATALOG

Are you struggling to explain "safety" to the client using just drawings? - The risks in blind spots are difficult to convey to the client through drawings alone. - Safety measures often become a target for cost reduction, making it hard to communicate their necessity. - There is a concern that the client might say, "It's more dangerous than I thought," after completion. Risks that are visible to design professionals are not easily understood intuitively by clients who are outside the field. This document is not just a simple explanation of sensor functions; it is a guide to visually explain "why sensors are necessary in that location." It can be used directly as explanatory material for the client. Here are three key points for utilizing this document: 1. Visualization of Risks Blind spots during vehicle departure and contact risks within the site are illustrated clearly. 2. Clarification of Selection Criteria A comparison table outlines the differences between complex sensor types such as infrared, ultrasonic, and loop coils. 3. Diagram of System Configuration It illustrates not just the sensors alone, but how they combine with components like rotating lights and control panels, providing practical assistance for electrical equipment design. Please make use of this to prevent "rework after completion" and "accident risks."

May 08, 2026

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[Free Catalog Distribution] Measures against "Near Misses" in Nursing and Care Settings. Prevent tripping and disconnection with codes! Wireless Series Bed Exit Sensors Linked to Nurse Call Systems.

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  • CATALOG

In facilities operating nurse call systems, we have made the bed exit sensor wireless, allowing it to notify in conjunction with the nurse call system. By simply connecting the mat sensor "Foldable Thin Matt-kun," the body movement call "Ugo-kun," and the wheelchair body movement call "Ayumi-chan" to the transmitter HB-RS, you can make the bed exit sensor wireless. The infrared sensor "Just Place Pole-kun" has the transmitter HB-RS built-in. This helps prevent accidents caused by falls, slips, or wandering, contributing to the efficiency of medical operations. 【Features】 ○ Wireless conversion by simply connecting existing sensors to the transmitter HB-WSK. ○ The bed exit sensor notifies wirelessly in conjunction with the nurse call system. ○ Up to 5 transmitters can be registered with a single receiver. ○ The communication distance between the transmitter and receiver is approximately 10 meters. ◎ For more details, please contact us or download the catalog.

May 08, 2026

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  • 展示会出展等の販売促進に必要な費用を助成します! 最大300万円 助成率1/2以内 市場開拓助成事業 展示会等参加費・印刷物制作費・動画制作費 など 申請受付:令和8年 5/15(金)~5/29(金)
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