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  4. Product Information: Pressure-Based Metal Seal Mass Flow Controller 'GP200 Series'
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  • Aug 21, 2025
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Aug 21, 2025

Product Information: Pressure-Based Metal Seal Mass Flow Controller 'GP200 Series'

ITWジャパン ITWジャパン
"Maximizing the Best Performance" This is the industry's first fully pressure-insensitive type of pressure-based mass flow controller (P-MFC) specifically designed for advanced etching and deposition processes in semiconductor manufacturing. The GP200 series P-MFC adopts a patented architecture that overcomes the limitations of conventional P-MFCs, enabling high-precision process gas supply even with low vapor pressure process gases. It also features a built-in differential pressure sensor and a unique design that places the valve downstream, allowing for high-precision process gas supply across the widest range of operating conditions in the industry. Due to its compatibility with a wide range of process conditions, it can be used as a replacement or upgrade for conventional P-MFCs and thermal MFCs. Additionally, by eliminating the need for components such as pressure regulators and converters, it simplifies the gas supply system and reduces costs. [Main Applications] ■ Semiconductor Manufacturing ■ Etching ■ CVD ■ Gas flow control applications requiring high-purity all-metal flow paths
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[Official Site] GP200 Series Pressure-Based Metal-Sealed Mass Flow Controller
[Video] Brooks Instrument Pressure-based Mass Flow Controllers - Theory of Operation

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Pressure-based mass flow controller "GP200 series"

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.

  • Other measurement, recording and measuring instruments

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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Flow Meter
  • Flow Control
  • Safety Controller

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Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!

The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.

This document is a comprehensive catalog featuring Brooks Instrument's flow, pressure, steam, and vacuum products. It includes pressure controllers such as the "SLA Series," which eliminates closed-loop, boost, and hysteresis, as well as thermal mass flow devices like the "GF40 Series," which can cover multiple gas types and flow ranges with a single unit, along with area flow meters, pressure/vacuum products, and more. This is a very informative book, so please take a look when considering implementation. 【Contents】 ■ Mass Flow & Pressure Controllers ■ Area Flow Meters ■ Pressure/Vacuum Products ■ Secondary Electronics & Software ■ Communication Protocols ■ Service & Support *For more details, please download the PDF or feel free to contact us.

  • Flow Meter
  • Pressure Control
  • Safety Controller

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Service & Support

Reliable products, highly specialized services! We restore equipment to "like-new condition"!

Our company has experienced technical support members with deep knowledge of flow control, a strong background in electrical and mechanical engineering, and a profound understanding of control systems in the field of biotechnology. With decades of extensive experience, we restore equipment to "like-new condition." Our calibration service experts issue calibration certificates. Please feel free to contact us with your service and installation requests. 【Features】 ■ All repairs use factory-certified new parts ■ All repair services come with a warranty period ■ Calibration service experts issue calibration certificates ■ Global service locations ■ Hardware upgrades are possible via digital protocols *For more details, please refer to the PDF materials or feel free to contact us.

  • Flow Meter
  • Pressure
  • Calibration and repair

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【Metal Crack Repair】We repair cracks in metal products without applying heat.

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  • CATALOG

The "Mechanical Stitch Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Mar 20, 2026

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Aluminum casting repair: Metal crack repair without applying heat.

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  • PRODUCT

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact on the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Mar 20, 2026

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Human Body Day 2025 Event Report - Nack Image Technology

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  • COMPANY

On November 6th (Thursday) to 7th (Friday), 2025, we held the "Human Body Day 2025" at the NAC Image Technology Akasaka Multi-Purpose Space. We have uploaded videos of the highlights from each company and the presentations that took place on the day to our website. We encourage you to take a look. ---[Report on Human Body Day 2025 is here]------------------- https://info.nacinc.jp/jintaiday2025-report ------------------------------------------------------------------------- On the day of the event, participants were able to experience a wide range of products in a hands-on session format, including motion capture, force plates, eye tracking, and human body analysis software. We received numerous comments from attendees expressing high satisfaction, saying, "It was great to gain various information all at once," which makes us very happy. NAC Image Technology will continue to provide "valuable products to our customers." We hope you will join us for our next event as well.

Mar 20, 2026

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AAEON ArrowLake equipped industrial COM module Type 6 standard

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  • PRODUCT

Features: ● Equipped with Intel Core Ultra 7 255H/7 155H/5 225H/5 125H ● LPDDR5x 16GB/32GB/64GB onboard ● M.2 NVMe 256GB onboard ● USB 2.0 x 8, USB 3.2 (10Gbps) x 4 ● PCIe Gen 4 [x8] x 1, PCIe Gen 3 [x1] x 4, PCIe Gen 3 [x4] x 1 (2 lanes co-lay with SATA; BOM option) ● 2.5GbE x 2 ● COM-HPC Mini standard, size 95mm x 70mm ● Optional items ECB-980A: Development carrier board HPC-ARHm-FAN01: CPU fan HPC-ARHm-HSP01: Heat spreader (Note: heat dissipation is required in the enclosure)

Mar 19, 2026

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AAEON ArrowLake-equipped industrial COM module COM-HPC R1.2 Mini standard

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Features: ● Equipped with Jetson AGX Orin 32GB/64GB ● Gigabit LAN ×1, 10Gigabit LAN ×1 ● USB 3.2 Gen 2 (Type-A) ×4 ● DB-9 connector ×1 (for DIO 8 channels) ● DB-9 connector ×2 (supports RS-232/422/485: Rx/Tx/RTS/CTS) ● Jetpack 6.0.0 pre-installed

Mar 19, 2026

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