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  4. Product Information: Pressure-Based Metal Seal Mass Flow Controller 'GP200 Series'
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  • Aug 21, 2025
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Aug 21, 2025

Product Information: Pressure-Based Metal Seal Mass Flow Controller 'GP200 Series'

ITWジャパン ITWジャパン
"Maximizing the Best Performance" This is the industry's first fully pressure-insensitive type of pressure-based mass flow controller (P-MFC) specifically designed for advanced etching and deposition processes in semiconductor manufacturing. The GP200 series P-MFC adopts a patented architecture that overcomes the limitations of conventional P-MFCs, enabling high-precision process gas supply even with low vapor pressure process gases. It also features a built-in differential pressure sensor and a unique design that places the valve downstream, allowing for high-precision process gas supply across the widest range of operating conditions in the industry. Due to its compatibility with a wide range of process conditions, it can be used as a replacement or upgrade for conventional P-MFCs and thermal MFCs. Additionally, by eliminating the need for components such as pressure regulators and converters, it simplifies the gas supply system and reduces costs. [Main Applications] ■ Semiconductor Manufacturing ■ Etching ■ CVD ■ Gas flow control applications requiring high-purity all-metal flow paths
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[Official Site] GP200 Series Pressure-Based Metal-Sealed Mass Flow Controller
[Video] Brooks Instrument Pressure-based Mass Flow Controllers - Theory of Operation

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Pressure-based mass flow controller "GP200 series"

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.

  • Other measurement, recording and measuring instruments

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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Flow Meter
  • Flow Control
  • Safety Controller

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001.PNG

Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!

The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.

This document is a comprehensive catalog featuring Brooks Instrument's flow, pressure, steam, and vacuum products. It includes pressure controllers such as the "SLA Series," which eliminates closed-loop, boost, and hysteresis, as well as thermal mass flow devices like the "GF40 Series," which can cover multiple gas types and flow ranges with a single unit, along with area flow meters, pressure/vacuum products, and more. This is a very informative book, so please take a look when considering implementation. 【Contents】 ■ Mass Flow & Pressure Controllers ■ Area Flow Meters ■ Pressure/Vacuum Products ■ Secondary Electronics & Software ■ Communication Protocols ■ Service & Support *For more details, please download the PDF or feel free to contact us.

  • Flow Meter
  • Pressure Control
  • Safety Controller

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Service & Support

Reliable products, highly specialized services! We restore equipment to "like-new condition"!

Our company has experienced technical support members with deep knowledge of flow control, a strong background in electrical and mechanical engineering, and a profound understanding of control systems in the field of biotechnology. With decades of extensive experience, we restore equipment to "like-new condition." Our calibration service experts issue calibration certificates. Please feel free to contact us with your service and installation requests. 【Features】 ■ All repairs use factory-certified new parts ■ All repair services come with a warranty period ■ Calibration service experts issue calibration certificates ■ Global service locations ■ Hardware upgrades are possible via digital protocols *For more details, please refer to the PDF materials or feel free to contact us.

  • Flow Meter
  • Pressure
  • Calibration and repair

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Notice of Summer Vacation 2026

  • NEW
  • COMPANY

Dear Sir/Madam, I hope this message finds you well and thriving. I would like to express my sincere gratitude for your continued support. We would like to inform you that our company will be closed for summer vacation during the following period: ■ Summer Vacation Period From Saturday, August 8, 2026, to Sunday, August 16, 2026. We will resume normal operations on Monday, August 17, 2026. Inquiries received during the vacation period will be addressed sequentially after the start of business. We apologize for any inconvenience this may cause and appreciate your understanding.

Jul 01, 2026

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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

  • NEW
  • PRODUCT

Fukuda Co., Ltd. has been pursuing leak detection for 60 years and is committed to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing properties. We will propose the appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Jun 30, 2026

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Hyper CLT flooring panel

CLT flooring method expanding into civil engineering | Hyper CLT flooring

  • NEW
  • PRODUCT

In civil engineering sites, the use of sheet piling methods is essential for safely utilizing the site, including temporary roads, access roads, heavy machinery work yards, material storage areas, and worker pathways. Traditionally, steel plates have been widely used, but due to their weight, they can be cumbersome to transport, install, and remove. Hyper CLT sheet piles are civil engineering materials made from wooden CLT for civil use. The 5×10 panel weighs approximately 230 kg, and the 5×20 panel weighs about 460 kg, making them lightweight and easy to handle with small machinery, contributing to reduced burdens during installation and improved work efficiency. They can be utilized in a wide range of civil engineering sites for measures against muddy conditions, ground protection, heavy machinery scaffolding, and ensuring pedestrian pathways. As a registered technology under the Ministry of Land, Infrastructure, Transport and Tourism NETIS "TH-250021-A," it is also recommended as a material for innovative ideas, safety measures, and environmental considerations in public works.

Jun 30, 2026

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■■ Air Leak Tester | FLA-0200 / FLA-0201 series ■■ Fukuda's new flagship model. Equipped with mastering correction function, it enables high-precision measurements in a short time.

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Fukuda's new flagship model. - Masterless type (FLA-0200 series) - General type (FLA-0201 series) Two models of air leak testers. With the mastering correction function, high-precision measurements can be achieved in a short time. Please take a look at the catalog.

Jun 30, 2026

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Please take a look at the technical document for the leak test, the "Technical Manual"!

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  • CATALOG

Fukuda Co., Ltd., which develops, manufactures, and sells leak testing equipment to inspect airtightness and sealing performance, provides a technical document that clearly explains the methods and theories of airtight testing, titled "Technical Manual." We are offering it as a PDF file. Please take this opportunity to download and view it!

Jun 30, 2026

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