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  4. Product Information: Steam Supply Module "VDM300"
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  • Apr 17, 2025
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Apr 17, 2025

Product Information: Steam Supply Module "VDM300"

ITWジャパン ITWジャパン
"Achieving the highest flow accuracy in ultra-high purity DI steam supply" The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-high purity vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions, eliminating the influence of pure water, thus ensuring high reliability and high purity manufacturing. An independent service port and intuitive GUI provide user-friendly data logging and diagnostic capabilities. Applications: ■ Post-process for metal etching of silicon semiconductors ■ Metal strip process for silicon semiconductors ■ Ultra-high purity humidification in low atmospheric pressure environments For more details, please visit https://www.brooksinstrument.com/ja-jp/products/vaporization/vapor-delivery-modules/vdm300
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Steam Supply Module "VDM300"

Achieving the highest flow accuracy in ultra-high purity DI steam supply.

The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-pure vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions and eliminates the influence of pure water, ensuring high reliability and cleanliness in manufacturing. An independent service port and an intuitive GUI (graphic user interface) provide user-friendly data logging and diagnostic capabilities. **Benefits** - Utilizes proven and reliable thermal mass flow measurement and control technology - Compatible with various water supply pressures - Enhanced corrosion resistance - Clean manufacturing - Tool interface using analog or digital communication - Direct interface for enhanced data collection or troubleshooting *For more details, please download the PDF or feel free to contact us.*

  • Flow Meter
  • Flow Control

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Service & Support

Reliable products, highly specialized services! We restore equipment to "like-new condition"!

Our company has experienced technical support members with deep knowledge of flow control, a strong background in electrical and mechanical engineering, and a profound understanding of control systems in the field of biotechnology. With decades of extensive experience, we restore equipment to "like-new condition." Our calibration service experts issue calibration certificates. Please feel free to contact us with your service and installation requests. 【Features】 ■ All repairs use factory-certified new parts ■ All repair services come with a warranty period ■ Calibration service experts issue calibration certificates ■ Global service locations ■ Hardware upgrades are possible via digital protocols *For more details, please refer to the PDF materials or feel free to contact us.

  • Flow Meter
  • Pressure
  • Calibration and repair

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Related catalog(4)

Introduction to VDM300

Introduction to VDM300

TECHNICAL
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Deionized Water Vapor Delivery Module "VDM300"

Deionized Water Vapor Delivery Module "VDM300"

PRODUCT
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Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

CATALOG
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Service & Support

Service & Support

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【Metal Crack Repair】We repair cracks in metal products without applying heat.

  • NEW
  • CATALOG

The "Mechanical Stitch Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Mar 20, 2026

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Aluminum casting repair: Metal crack repair without applying heat.

  • NEW
  • PRODUCT

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact on the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Mar 20, 2026

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AAEON ArrowLake equipped industrial COM module Type 6 standard

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Features: ● Equipped with Intel Core Ultra 7 255H/7 155H/5 225H/5 125H ● LPDDR5x 16GB/32GB/64GB onboard ● M.2 NVMe 256GB onboard ● USB 2.0 x 8, USB 3.2 (10Gbps) x 4 ● PCIe Gen 4 [x8] x 1, PCIe Gen 3 [x1] x 4, PCIe Gen 3 [x4] x 1 (2 lanes co-lay with SATA; BOM option) ● 2.5GbE x 2 ● COM-HPC Mini standard, size 95mm x 70mm ● Optional items ECB-980A: Development carrier board HPC-ARHm-FAN01: CPU fan HPC-ARHm-HSP01: Heat spreader (Note: heat dissipation is required in the enclosure)

Mar 19, 2026

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AAEON ArrowLake-equipped industrial COM module COM-HPC R1.2 Mini standard

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  • PRODUCT

Features: ● Equipped with Jetson AGX Orin 32GB/64GB ● Gigabit LAN ×1, 10Gigabit LAN ×1 ● USB 3.2 Gen 2 (Type-A) ×4 ● DB-9 connector ×1 (for DIO 8 channels) ● DB-9 connector ×2 (supports RS-232/422/485: Rx/Tx/RTS/CTS) ● Jetpack 6.0.0 pre-installed

Mar 19, 2026

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AAEON Amston Lake equipped industrial COM module NANOCOM-ASL Type 10 standard

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  • PRODUCT

Features: ● Equipped with Intel Atom x7835RE/x7433RE ● LPDDR5x 8GB/16GB onboard ● eMMC 32GB/64GB onboard ● LVDS x 1, DDI x 1 ● USB 2.0 x 8, USB 3.2 Gen 2 x 2 ● PCIe x1 x 4 ● COMe Type 10 standard, 84mm x 55mm size ● Operating temperature -40 to 85℃ ● Optional items ECB-920A-0001: Development carrier board NANOCOM-ADN-FAN01: CPU fan NANOCOM-ADN-HSP01: Heat spreader (※ Heat dissipation is required in the enclosure)

Mar 19, 2026

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