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  4. [Product Catalog] 'GP200 Series' Pressure-Based Gas Mass Flow Controller (Revised Edition)
CATALOG
  • Dec 05, 2025
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Dec 05, 2025

[Product Catalog] 'GP200 Series' Pressure-Based Gas Mass Flow Controller (Revised Edition)

ITWジャパン ITWジャパン
The GP200 series is the first fully pressure-independent PMFC designed specifically for semiconductor applications. With GP200's unique differential pressure technology and state-of-the-art sensor and valve configuration, it eliminates the limitations of traditional pressure-based mass flow controllers, enabling the most extensive and accurate process gas control in the industry. Brooks developed the world's first MFC that allows for the reconfiguration of gas types and flow ranges, and has continued to refresh gas models since its release, with the same functionality incorporated into the GP200. It allows for easy reconfiguration for many gas types and a wide range of flow rates, providing flexible support for a variety of processes. The ultra-fast and highly reproducible valve control of the GP200, along with its resistance to pressure fluctuations, maintains precise flow control to the chamber even in cases of extreme supply pressure variations, enabling tighter process control. The GP200 platform supports a wide range of process conditions and can replace or upgrade many traditional pressure-based mass flow controllers.
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[Official Site] GP200 Series Pressure-Based Metal-Sealed Mass Flow Controller
[Video] Brooks Instrument Pressure-based Mass Flow Controllers - Theory of Operation

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Pressure-based mass flow controller "GP200 series"

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.

  • Other measurement, recording and measuring instruments

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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Flow Meter
  • Flow Control
  • Safety Controller

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Service & Support

Reliable products, highly specialized services! We restore equipment to "like-new condition"!

Our company has experienced technical support members with deep knowledge of flow control, a strong background in electrical and mechanical engineering, and a profound understanding of control systems in the field of biotechnology. With decades of extensive experience, we restore equipment to "like-new condition." Our calibration service experts issue calibration certificates. Please feel free to contact us with your service and installation requests. 【Features】 ■ All repairs use factory-certified new parts ■ All repair services come with a warranty period ■ Calibration service experts issue calibration certificates ■ Global service locations ■ Hardware upgrades are possible via digital protocols *For more details, please refer to the PDF materials or feel free to contact us.

  • Flow Meter
  • Pressure
  • Calibration and repair

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Pressure-based gas mass flow controller "GP200 series"

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Please take a look at Fukuda's electric air regulator and regulator!

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● What is a pneumatic regulator? It is a self-developed pneumatic regulator with a control reproducibility of ±0.1%. We offer a wide range of products from low flow to high flow. ● What is a regulator? Please use it to adjust the test pressure for leak testing. By supplying a stable test pressure, it enables more accurate measurements.

Aug 20, 2026

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Please let us know your concerns regarding leaks. We may have some suggestions for you. Leak tests, leakage tests, leak inspections, leak detection, container integrity tests, packaging integrity tests...

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Fukuda Corporation has been pursuing leak detection for 60 years and is dedicated to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing performance. We will propose suitable testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Aug 20, 2026

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Fukuda's Technology Column

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This is a collection of links to Fukuda's technical columns. It covers various topics related to leak tests and more... Please check the related links for more information.

Aug 20, 2026

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Hyper CLT flooring panel

CLT flooring boards that can also be used in material yards | Hyper CLT flooring boards

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In a civil engineering site material yard, not only is material storage conducted, but also the frequent movement of trucks and heavy machinery, unloading, and the movement of workers. On unpaved ground, mud and ruts can occur due to rain, which may reduce work efficiency. Hyper CLT mats are civil engineering CLT materials that utilize wood CLT. By laying them in material yards or storage areas, a work space that facilitates the movement of vehicles and heavy machinery can be established while protecting the ground. They can be laid only in necessary locations, and relocation or repurposing in accordance with construction progress is also possible. The 5×10 panel weighs approximately 230 kg, and the 5×20 panel weighs about 460 kg, making them lightweight and easy to install and remove even with small machinery. After use, they can also be utilized as temporary roads, access routes, or heavy machinery work yards. Additionally, they offer unique benefits of wood, such as glare reduction, noise suppression, and CO2 fixation. As a registered technology with the Ministry of Land, Infrastructure, Transport and Tourism under NETIS "TH-250021-A," these wooden mats can also be used for environmental improvement in material yards and innovative public works.

Aug 20, 2026

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AAEON UP Series Board for Embedded Applications with Intel Core Processor (Series 3) [UP WCL]

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Features: ● Equipped with Intel Core Processor (Series 3) ● Onboard LPDDR5 memory: up to 24GB ● Onboard UFS storage: up to 256GB ● 2.5GbE (2.5 Gigabit Ethernet): 1 port ● HDMI 2.1 (TMDS): 1 port ● USB 3.2 Type-A: 3 ports ● 10-pin GPIO: 1 port ● Power input: 12V DC * This model does not include an operating system.

Aug 20, 2026

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