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  1. Home
  2. Testing, Analysis and Measurement
  3. 日本ベーカーヒューズ株式会社&ベーカーヒューズ・エナジージャパン株式会社  (旧)GEセンシング&インスペクション・テクノロジーズ株式会社
  4. Druck TERPS: Innovative vacuum pressure measurement technology supporting the semiconductor industry.
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  • Jul 10, 2025
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Jul 10, 2025

Druck TERPS: Innovative vacuum pressure measurement technology supporting the semiconductor industry.

日本ベーカーヒューズ株式会社&ベーカーヒューズ・エナジージャパン株式会社  日本ベーカーヒューズ株式会社&ベーカーヒューズ・エナジージャパン株式会社  (旧)GEセンシング&インスペクション・テクノロジーズ株式会社
Overview and Features of TERPS • High Precision and Stability: Achieves a precision of ±0.01%FS and long-term stability of less than 0.01%FS per year, with temperature sensitivity significantly reduced through multi-point compensation. • Wide Measurement Range: Covers commonly used ranges from medium vacuum to atmospheric pressure for vacuum applications, providing a continuous measurement range from 10Pa to atmospheric pressure. • Excellent Linearity: Demonstrates very good linearity even in low-pressure regions, with positive/negative offset amounts stable at 21-23Pa in the range of 1Pa to 1000Pa. • Low Hysteresis: The single crystal silicon resonant beam exhibits negligible hysteresis in the range of 0 to 100Pa, providing high stability and reliability even in ultra-low pressure areas. • Robust Operating Temperature Range: Supports operating temperatures from -55℃ to 125℃. • High Media Compatibility: Depending on the measurement medium, options include direct exposure silicon elements, 316L stainless steel isolation diaphragms, or Hastelloy C276 specifications. • Easy System Integration: Compatible with frequency output or digital output (RS232/RS485, CANBus, USB), facilitating easy system integration.
Druck's TERPS technology
Druck's TERPS technology
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Druck TERPS Pressure Sensor

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Pressure【For Meteorological Applications】High-Precision Pressure Sensor TERPS 8100

It is also possible to customize to meet the customer's specific OEM requirements! It operates without issues even in harsh environments.

The "TERPS 8100" is a pressure sensor equipped with high accuracy and stability suitable for the meteorological field. Utilizing Druck's new TERPS technology, it achieves an accuracy of 0.01% FS and a stability of 0.01%/year. By combining quality and reliability, it delivers excellent overall performance. By using this product, you can elevate your meteorological station to the highest level in the market. 【Features】 ■ High stability exceeding ±100 ppm FS/year ■ Wide temperature range of -40 to +85℃ ■ Multiple units of measurement (e.g., mbar, hPa, inHg) ■ Customizable to meet specific OEM requirements ■ Designed with new TERPS technology *For more details, please refer to the PDF document or feel free to contact us. Please note that personal information registered with Ipros may be shared with our authorized distributors, and they may contact you. Thank you for your understanding.

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Druck High-Precision Silicon Vibrating Pressure Sensor TERPS 8000

Achieving excellent stability and high precision! This is a pressure sensor with a structure that isolates the sensor element from the pressure medium.

The "TERPS 8000 Series" adopts TERPS (Trench Etching Resonant Pressure Sensor) technology. It combines accuracy, stability, reliability, and strength, delivering the best performance among Druck's pressure sensors. [Recommended for applications measuring differential pressure with two pressure sensors] The vibrating element is in a vacuum state, making it completely unaffected by changes in the density of the pressure medium, thus achieving excellent stability. [Features] - The first generation of pressure sensors utilizing TERPS technology - A structure where the sensor element is isolated from the pressure medium by a metal diaphragm and encapsulated silicone oil - The vibrating element is in a vacuum state, completely unaffected by changes in the density of the pressure medium - Achieves excellent stability *For more details, please refer to the PDF document or feel free to contact us. Please note that personal information registered with Ipros may be shared with our authorized dealers, and they may contact you. Thank you for your understanding.

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High-Precision Pressure Module 'PM620 TERPS'

Hand-tightening possible without tools! High-accuracy pressure module that can measure from 1.2 bar to 100 bar.

This product is a high-accuracy pressure module that incorporates our unique TERPS resonant silicon pressure sensor technology into the "PM620." Compared to conventional pressure measurement technologies, it achieves up to four times the stability and accuracy. With an easy-to-install screw fit, it allows for the connection of both the pressure and electrical components without the need for tools, sealing tape, cables, or plugs. 【Features】 ■ Overall accuracy of 0.0125% FS ■ Temperature compensation accuracy from -10°C to 50°C ■ Simple screw fit - can be hand-tightened without tools ■ Measurement range from 1.2 bar to 100 bar ■ Compatibility with pressure calibrators such as DPI620G and DPI612 series ■ No settings or calibration required upon replacement *For more details, please refer to the PDF document or feel free to contact us. Please note that the personal information registered with Ipros may be shared with our authorized distributors, and they may contact you. Thank you for your understanding.

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日本ベーカーヒューズ株式会社&ベーカーヒューズ・エナジージャパン株式会社  (旧)GEセンシング&インスペクション・テクノロジーズ株式会社
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Hyper CLT flooring panel

Construction industry focuses on 'Civil Engineering x Timber' | Hyper CLT Flooring

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CLT, which has been widely adopted in the construction field, is now expanding its applications into the civil engineering sector. The "Hyper CLT Mats" are civil engineering CLT products that utilize wood CLT as temporary materials. Traditionally, steel plates have been the mainstream choice for temporary roads, access routes, and heavy machinery yards. The Hyper CLT Mats introduce a new option of "wood" to that market. The 5x10 mats weigh approximately 230 kg, making them lightweight and easy to install and remove with small machinery, with a maximum capacity of 40 mats on a 10-ton truck. They also have advantages in terms of workability and transportation efficiency. Moreover, they offer added value that can only be achieved with wood, such as glare reduction, noise control, CO2 fixation, and consideration for aesthetics. This product is expected to be a new proposal for not only construction companies but also building material firms, lumber companies, and material trading companies. It is a registered technology with the Ministry of Land, Infrastructure, Transport and Tourism under NETIS, with the registration number "TH-250021-A." The use of wood is not limited to construction anymore. The utilization of Hyper CLT Mats is expanding as a new market that connects civil engineering and wood.

Aug 22, 2026

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Please let us know your concerns regarding leaks. We may have some suggestions for you. Leak tests, leakage tests, leak inspections, leak detection, container integrity tests, packaging integrity tests...

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Fukuda Corporation has been pursuing leak detection for 60 years and is dedicated to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing performance. We will propose suitable testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Aug 21, 2026

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Fukuda's Technology Column

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This is a collection of links to Fukuda's technical columns. It covers various topics related to leak tests and more... Please check the related links for more information.

Aug 21, 2026

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Hyper CLT flooring panel

Utilized for temporary roads on slopes | Wood CLT "Hyper CLT Paving Slabs"

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In civil engineering sites such as mountainous areas and construction sites, it may be necessary to use wooden boards on slopes or inclined access roads. Hyper CLT boards are civil engineering materials utilizing wood CLT, which can be laid not only on flat ground but also on sloped terrain. They can be used for temporary roads, access routes, heavy machinery entry paths, and measures against muddy conditions, creating a driving environment that takes advantage of the unique surface characteristics of wood. The 5×10 board weighs approximately 230 kg, and the 5×20 board weighs about 460 kg, making them lightweight and easy to install and remove even with small machinery, which is a notable feature for maneuverability in narrow sites. This wooden board is registered as a technology under the Ministry of Land, Infrastructure, Transport and Tourism's NETIS system as "TH-250021-A," and can also be utilized for safety measures and innovative ideas in public works.

Aug 21, 2026

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PX Suction Cup Series for Handling Challenging Surfaces

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Stable adhesion to rough and uneven surfaces such as stone, sheet metal, textured glass, and wood. Piab's "PX Suction Cup Series" is designed for handling rough surfaces, patterned surfaces, and uneven workpieces that are difficult to hold with standard flat suction cups. The high-conformity EPDM sealing ring adapts to the irregularities and shapes of the work surface, while the rigid aluminum support plate and internal support pad provide a stable grip. The internal support pad helps stabilize thin sheets and delicate workpieces while minimizing suction marks. It is suitable for demanding industrial applications involving stone, metal, glass, and wood. Additionally, a cone valve integrated version is also available. By preventing leaks from suction cups that do not contact the workpiece, it enhances safety during transport while reducing air consumption. This is also effective for energy-saving measures in large-area grippers that use multiple suction cups.

Aug 21, 2026

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