How to choose the drive mechanism for high-precision dispensers (coating machines)? Six key points for selecting the drive system essential for semiconductor and precision dispensing equipment.
Six Key Points for Selecting the Drive Mechanism of High-Precision Dispensers:
Matching Lead and Acceleration/Deceleration: For high-speed jets, select a large lead (10-20mm) to suppress vibrations, while for fine continuous dispensing, use a small lead (1-5mm) to enhance resolution and uniformity.
Screw Precision and Preload Grade: Use C3 grade with light/medium preload to accommodate high precision in semiconductors, while optimizing the balance of cost and yield with C5 grade combined with double nuts or closed-loop control.
Suppression of Micro Vibration on the Z-Axis: To prevent residual vibrations (stringing) caused by cantilever loads from valve weight, employ high-rigidity dual guides or preload-type micro linear guide bushes.
Symmetry of Guides and Supports: Enhance the assembly concentricity of the fixed and support sides to eliminate periodic wave patterns (irregular thickness) in the dispensing line caused by rotational runout of the screw.
Lubrication and Cleanroom Measures: Use low-dust lubricants such as fluorinated grease (PFPE) to prevent fogging of optical components and corrosion or seizing due to chemical solvents.
Thermal Displacement Suppression Design: Mitigate thermal expansion and positioning errors caused by friction heat during 24-hour continuous operation, achieving both long lifespan and high precision.

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