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  3. 東京電子
  4. Measuring limits and analyzing extremes 【Tokyo Electron Online EXPO】 Open!
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  • Jun 30, 2021
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Jun 30, 2021

Measuring limits and analyzing extremes 【Tokyo Electron Online EXPO】 Open!

東京電子 東京電子
The Tokyo Electron Online Expo hosted by Tokyo Electron is now open! We are showcasing gas analyzers and new vacuum structural materials. Please feel free to stop by.
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Tokyo Electronics Online EXPO
An online EXPO hosted by Tokyo Electronics showcasing gas analyzers and new vacuum structural materials.

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1118_tokyo-denshi_550_550_7.jpg

Significantly reduces gas release from the inner wall of the vacuum chamber! New "vacuum structural material."

Made of 0.2% BeCu alloy for low gas emission! An alternative to stainless steel.

The "Magical Nipple/Cube/Chamber" uses BeCu alloy as a material, replacing the stainless steel traditionally used in vacuum systems, significantly reducing gas release from the inner walls with a new vacuum structural material. BeCu alloy has a low emissivity and excellent thermal conductivity, allowing it to quickly dissipate even a small amount of absorbed heat, thereby reducing the gas release speed to less than 1/10 by suppressing temperature rise. 【Features】 ■Improved ultimate vacuum ■Copper surface is NiP passivated ■Capable of baking up to 300°C ■Copper gaskets can be used *For more details, please refer to the materials available for download in PDF format or feel free to contact us.

  • Vacuum Equipment
  • Other semiconductor manufacturing equipment

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Tokyo Electron's lineup enables diverse mass spectrometry.

From trace gas analysis to atmospheric pressure sampling, a mass spectrometer equipped with high-performance models as an upgraded analytical device for both standalone measurements and systems!

We would like to introduce the lineup of Tokyo Electric, which enables diverse mass spectrometry. Specifically, the following types of mass analysis will be possible. 【Features】 ■ Ultra-trace gas analysis at E-15 Pa·m3/sec ■ High-precision mass analysis at E-13 Pa range under ultra-high vacuum ■ High-precision measurement of elements and compounds ■ Real-time analysis at atmospheric pressure (such as exhaled air and combustion gases) *For detailed mechanisms of diverse and high-precision mass analysis, please download the PDF for more information.

  • Analytical Equipment and Devices

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Ultra-Low Gas Emission Residual Gas Analyzer 'WATMASS'

Significant reduction in gas emissions due to low-cost power consumption and cooling of the ion source! XHV gas analysis, which is difficult to measure with a typical quadrupole residual gas analyzer, is now possible!

"WATMASS" is an ultra-low gas release residual gas analyzer (mass spectrometer) that has improved its ion source to perform high-precision residual gas analysis in the range of 10^-7 to 10^-13 Pa. By adopting a thermal cathode ion source and a sensor nipple tube (ICF70) made of 0.2% BeCu with low radiation and high thermal conductivity, it significantly reduces gas release through low power consumption and cooling of the ion source. Additionally, by manufacturing the grid from a platinum-iridium (Pt-Ir) alloy, it reduces ESD gas release. A thorough low gas treatment using an electric furnace eliminates hydrogen emissions and forms a Be oxide layer. 【Application Examples】 ■ High-precision mass analysis in XHV/UHV ■ Surface analysis ■ Degradation and gas release of semiconductor devices ■ Gas analysis (mass spectrometry) generated by light stimulation and electron stimulation ■ Trace gas analysis (TDS/Out Gas) ■ Mass analysis of sealed devices/MEMS and leak testing at the level of 10^-17 Pa·m³/s ■ Helium permeability testing of glass and microbubble gas analysis *For more details, please refer to the PDF materials or feel free to contact us.

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Notice of Golden Week Holiday Closure (Donaldson Japan)

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Thank you very much for your continued support. Donaldson Japan Co., Ltd. will be closed during the following period: From April 25 (Saturday) to May 6 (Wednesday). Inquiries made during the closure will be answered sequentially after May 7 (Thursday). We sincerely apologize for any inconvenience this may cause. Thank you for your understanding and cooperation.

Apr 01, 2026

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[Cast Iron Repair] We will repair cracks that have occurred in metal equipment without applying heat.

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The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact on the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Apr 01, 2026

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【Metal Crack Repair】We repair cracks in metal products without applying heat.

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The "Mechanical Stitch Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Apr 01, 2026

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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

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Fukuda Co., Ltd. has been pursuing leak detection for 60 years and is committed to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing properties. We will propose the appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Apr 01, 2026

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Hotron Group Case Page

[Case Study] Hotron pursues sensor technology and creates products that generate safe and comfortable living spaces. We would like to introduce Hotron products that support people's lives throughout the city.

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We will introduce the implementation results of the sensor technology developed by the Hotron Group, which has been cultivated over more than half a century, through customer case studies. In addition to automatic door sensors, we also offer a wide range of vehicle detection sensors and nursing/care sensors. Many implementation examples are also presented, so please take a look at the case study page.

Apr 01, 2026

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