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  1. Home
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  3. 東京電子
  4. Measuring limits and analyzing extremes 【Tokyo Electron Online EXPO】 Open!
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  • Jun 30, 2021
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Jun 30, 2021

Measuring limits and analyzing extremes 【Tokyo Electron Online EXPO】 Open!

東京電子 東京電子
The Tokyo Electron Online Expo hosted by Tokyo Electron is now open! We are showcasing gas analyzers and new vacuum structural materials. Please feel free to stop by.
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Tokyo Electronics Online EXPO
An online EXPO hosted by Tokyo Electronics showcasing gas analyzers and new vacuum structural materials.

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Significantly reduces gas release from the inner wall of the vacuum chamber! New "vacuum structural material."

Made of 0.2% BeCu alloy for low gas emission! An alternative to stainless steel.

The "Magical Nipple/Cube/Chamber" uses BeCu alloy as a material, replacing the stainless steel traditionally used in vacuum systems, significantly reducing gas release from the inner walls with a new vacuum structural material. BeCu alloy has a low emissivity and excellent thermal conductivity, allowing it to quickly dissipate even a small amount of absorbed heat, thereby reducing the gas release speed to less than 1/10 by suppressing temperature rise. 【Features】 ■Improved ultimate vacuum ■Copper surface is NiP passivated ■Capable of baking up to 300°C ■Copper gaskets can be used *For more details, please refer to the materials available for download in PDF format or feel free to contact us.

  • Vacuum Equipment
  • Other semiconductor manufacturing equipment

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Tokyo Electron's lineup enables diverse mass spectrometry.

From trace gas analysis to atmospheric pressure sampling, a mass spectrometer equipped with high-performance models as an upgraded analytical device for both standalone measurements and systems!

We would like to introduce the lineup of Tokyo Electric, which enables diverse mass spectrometry. Specifically, the following types of mass analysis will be possible. 【Features】 ■ Ultra-trace gas analysis at E-15 Pa·m3/sec ■ High-precision mass analysis at E-13 Pa range under ultra-high vacuum ■ High-precision measurement of elements and compounds ■ Real-time analysis at atmospheric pressure (such as exhaled air and combustion gases) *For detailed mechanisms of diverse and high-precision mass analysis, please download the PDF for more information.

  • Analytical Equipment and Devices

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Ultra-Low Gas Emission Residual Gas Analyzer 'WATMASS'

Significant reduction in gas emissions due to low-cost power consumption and cooling of the ion source! XHV gas analysis, which is difficult to measure with a typical quadrupole residual gas analyzer, is now possible!

"WATMASS" is an ultra-low gas release residual gas analyzer (mass spectrometer) that has improved its ion source to perform high-precision residual gas analysis in the range of 10^-7 to 10^-13 Pa. By adopting a thermal cathode ion source and a sensor nipple tube (ICF70) made of 0.2% BeCu with low radiation and high thermal conductivity, it significantly reduces gas release through low power consumption and cooling of the ion source. Additionally, by manufacturing the grid from a platinum-iridium (Pt-Ir) alloy, it reduces ESD gas release. A thorough low gas treatment using an electric furnace eliminates hydrogen emissions and forms a Be oxide layer. 【Application Examples】 ■ High-precision mass analysis in XHV/UHV ■ Surface analysis ■ Degradation and gas release of semiconductor devices ■ Gas analysis (mass spectrometry) generated by light stimulation and electron stimulation ■ Trace gas analysis (TDS/Out Gas) ■ Mass analysis of sealed devices/MEMS and leak testing at the level of 10^-17 Pa·m³/s ■ Helium permeability testing of glass and microbubble gas analysis *For more details, please refer to the PDF materials or feel free to contact us.

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Truck berth vehicle detection

It's not too late to address the "Logistics 2024 Problem." Why not immediately reduce drivers' waiting times?

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Are you making progress on measures for the "2024 Problem"? With stricter management of drivers' working hours, reducing "waiting time" has become an urgent issue in the logistics field. To address this challenge, our company, Hotron, proposes the "Vehicle Detection Ultrasonic Sensor 'HM-UX2'," which instantly grasps the availability of loading bays. The 'HM-UX2' contributes to the resolution of waiting times by accurately understanding the availability situation, reducing unnecessary waiting and queueing, and shortening waiting times to alleviate the burden on drivers! By replacing the "eyes" of your loading bay management with this high-precision sensor, why not start addressing the "2024 Problem"? Take a look at the product features: "Can it accurately detect availability?" "Can we really use it in our company?" "I just want to know the cost, even if it's an estimate." If you have any questions or requests, please feel free to consult with us.

Aug 08, 2025

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Notice of additional compatible cameras for the Elua 7.6 series.

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The following cameras are supported in the Elua 7.6 series. Product introduction: https://aileunsys.co.jp/b01_aileun.html Compatible camera list: https://aileunsys.co.jp/aileun/compatible_camera.html Newly added: - Manufacturer: DAHUA Model number (1 model): DH-IPC-HFW2449TLN-S-PRO

Aug 08, 2025

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Notice of Summer Vacation

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Dear Valued Customers, Thank you very much for your continued support. We would like to inform you that our company will be closed for summer vacation from Wednesday, August 13, 2025, to Friday, August 15, 2025. We will resume normal operations on Monday, August 18. We appreciate your understanding and cooperation.

Aug 08, 2025

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[Limited Time] Learn how to advance "Realistic DX"! Special event "Monozukuri DX CAMP" for small and medium-sized manufacturing businesses!

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Technoa Co., Ltd. (Headquarters: Gifu City, Gifu Prefecture, Representative Director: Koji Yamazaki) will hold a limited-time summer special event, "Monozukuri DX CAMP," from Saturday, August 9, 2025, to Saturday, August 23, 2025. Small and medium-sized manufacturing companies face challenges such as a shortage of specialized personnel and a lack of know-how and information, which act as barriers to promoting DX (digital transformation). This event will provide a step-by-step approach to "realistic DX," based on the know-how accumulated by Technoa while supporting the DX transformation of small and medium-sized manufacturing companies. It will be structured as DAY.1 to DAY.5, offering an opportunity for skill development during the summer break and supporting the learning and growth of small and medium-sized manufacturers. For more details, please refer to the related link.

Aug 08, 2025

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Solve the challenges of large-scale processing! Updated solution page to achieve high quality and short delivery times.

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JOHNAN has updated a webpage summarizing the selection points to solve various challenges in large-scale processing (quality maintenance, short delivery times, costs). This article introduces the challenges faced in large-scale processing based on years of knowledge and experience, as well as the key points for choosing the optimal contractor that balances quality and short delivery times. If you are looking for a reliable contractor, please make use of our "Large-Scale Processing Solutions." ▼For more details "Large-Scale Processing Solutions to Achieve Product Quality and Short Delivery Times" https://www.johnan.com/solution/process/processing-assembly/post_8.html

Aug 08, 2025

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