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  3. 東京電子
  4. Measuring limits and analyzing extremes 【Tokyo Electron Online EXPO】 Open!
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  • Jun 30, 2021
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Jun 30, 2021

Measuring limits and analyzing extremes 【Tokyo Electron Online EXPO】 Open!

東京電子 東京電子
The Tokyo Electron Online Expo hosted by Tokyo Electron is now open! We are showcasing gas analyzers and new vacuum structural materials. Please feel free to stop by.
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Tokyo Electronics Online EXPO
An online EXPO hosted by Tokyo Electronics showcasing gas analyzers and new vacuum structural materials.

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1118_tokyo-denshi_550_550_7.jpg

Significantly reduces gas release from the inner wall of the vacuum chamber! New "vacuum structural material."

Made of 0.2% BeCu alloy for low gas emission! An alternative to stainless steel.

The "Magical Nipple/Cube/Chamber" uses BeCu alloy as a material, replacing the stainless steel traditionally used in vacuum systems, significantly reducing gas release from the inner walls with a new vacuum structural material. BeCu alloy has a low emissivity and excellent thermal conductivity, allowing it to quickly dissipate even a small amount of absorbed heat, thereby reducing the gas release speed to less than 1/10 by suppressing temperature rise. 【Features】 ■Improved ultimate vacuum ■Copper surface is NiP passivated ■Capable of baking up to 300°C ■Copper gaskets can be used *For more details, please refer to the materials available for download in PDF format or feel free to contact us.

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Tokyo Electron's lineup enables diverse mass spectrometry.

From trace gas analysis to atmospheric pressure sampling, a mass spectrometer equipped with high-performance models as an upgraded analytical device for both standalone measurements and systems!

We would like to introduce the lineup of Tokyo Electric, which enables diverse mass spectrometry. Specifically, the following types of mass analysis will be possible. 【Features】 ■ Ultra-trace gas analysis at E-15 Pa·m3/sec ■ High-precision mass analysis at E-13 Pa range under ultra-high vacuum ■ High-precision measurement of elements and compounds ■ Real-time analysis at atmospheric pressure (such as exhaled air and combustion gases) *For detailed mechanisms of diverse and high-precision mass analysis, please download the PDF for more information.

  • Analytical Equipment and Devices

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Ultra-Low Gas Emission Residual Gas Analyzer 'WATMASS'

Significant reduction in gas emissions due to low-cost power consumption and cooling of the ion source! XHV gas analysis, which is difficult to measure with a typical quadrupole residual gas analyzer, is now possible!

"WATMASS" is an ultra-low gas release residual gas analyzer (mass spectrometer) that has improved its ion source to perform high-precision residual gas analysis in the range of 10^-7 to 10^-13 Pa. By adopting a thermal cathode ion source and a sensor nipple tube (ICF70) made of 0.2% BeCu with low radiation and high thermal conductivity, it significantly reduces gas release through low power consumption and cooling of the ion source. Additionally, by manufacturing the grid from a platinum-iridium (Pt-Ir) alloy, it reduces ESD gas release. A thorough low gas treatment using an electric furnace eliminates hydrogen emissions and forms a Be oxide layer. 【Application Examples】 ■ High-precision mass analysis in XHV/UHV ■ Surface analysis ■ Degradation and gas release of semiconductor devices ■ Gas analysis (mass spectrometry) generated by light stimulation and electron stimulation ■ Trace gas analysis (TDS/Out Gas) ■ Mass analysis of sealed devices/MEMS and leak testing at the level of 10^-17 Pa·m³/s ■ Helium permeability testing of glass and microbubble gas analysis *For more details, please refer to the PDF materials or feel free to contact us.

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Notice of Participation in Edge Tech+2025 from November 19 (Wednesday) to November 21 (Friday), 2025.

  • NEW
  • EVENT

Our company will be exhibiting our products at the Mikasa Trading booth during "Edge Tech+2025," which will be held at Pacifico Yokohama from November 19 (Wednesday) to November 21 (Friday), 2025! We will showcase AI compact edge PCs equipped with NVIDIA's Jetson series, as well as embedded boards featuring Intel's Amston Lake and Arrow Lake, and ARM's i.MX8 series. ■ Dates: November 19 (Wednesday) to November 21 (Friday), 2025 ■ Hours: 10:00 AM - 5:00 PM (until 6:00 PM only on November 20, Thursday) ■ Venue: Pacifico Yokohama, Hall C ■ Booth Location: CJ-15 You can register for your visit at the URL below. We sincerely look forward to your attendance. https://www.jasa.or.jp/expo/

Nov 13, 2025

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AAEON 12th/13th Generation Intel(R) Core i7/i5/i3 Equipped Industrial Compact Fanless PC with Dual Gigabit LAN

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Features ● Equipped with 12th/13th generation Intel(R) Core(TM) i7-1370PE / i5-1350PE / i3-1320PE / i7-1270PE / i5-1250PE / i3-1220PE ● Dual channel DDR5 SODIMM x 2 slots (memory sold separately) ● Supports M.2 2280 M Key NVMe SSD ● Wide operating temperature range (-20 to 60℃) (WT model required for memory and storage) ● Equipped with a total of 3 LAN ports: 2.5GbE x 2 and GbE x 1 ● Supports TPM 2.0

Nov 13, 2025

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AAEON DIN rail compatible industrial compact PC, slim model with a thickness of 48mm, equipped with Atom x7211E/N200/N50.

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Features ● For industrial automation controllers ● DIN rail compatible ● Equipped with Intel Atom x7211E / Processor N200 / Processor N50 ● DDR5 4800 SO-DIMM×1 (up to 16GB) (sold separately) ● Onboard TPM 2.0 ● Supports 9~36V DC input ● Wide temperature range -20~60℃

Nov 13, 2025

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■■ Sealed Product Air Leak Test Device | MSZ-0701 series ■■ New standard for waterproof testing. "Dry" non-destructive testing that does not wet electronic devices or packaging. Capable of testing the waterproofness of sealed products (equivalent to IPX7, IPX8).

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● To determine the sealing and waterproofing of sealed products based on pressure changes, it is not necessary to conduct tests that involve spraying water on the product or immersing it in water. ● Once the product is placed in a dedicated fixture within the inspection device, waterproofing can be quantitatively confirmed through automatic measurement. ● The target product size is W 300 × D 210 × H 100 mm or smaller. ● The target products include automotive cameras, smartphones, ECUs, small motors, and other packaging containers, and are effective for any products that require confirmation of sealing, waterproofing, and airtightness. ● For product specifications and details, please contact us.

Nov 13, 2025

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■■ The measurement section is made of all stainless steel! General-purpose air leak tester | FLS-0100 series ■■ Designed to meet the strict production line requirements where the use of specific metals is prohibited, such as in electronic component factories and battery factories.

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In battery manufacturing lines, if components containing copper are used, there is a possibility that metal powder may mix in, dissolve, ionize, and pass through the separator, causing a malfunction that connects the positive and negative electrodes. Such minute metal powders may not be detected during pre-shipment inspections, and even if they are found, they can lead to various issues, such as the need to increase inspection processes to detect them. Therefore, Fukuda has developed a copper-free (all stainless steel) air leak tester that can be safely used in the production lines of battery manufacturers and secondary battery manufacturing equipment manufacturers. For product specifications and details, please refer to the "Related Product Information" and "Related Catalogs" below.

Nov 13, 2025

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  • スマートファクトリーJAPAN 2025出展 会期12/3(水)~5(金) 会場 東京ビッグサイト 南ホールF-22
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