From trace gas analysis to atmospheric pressure sampling, a mass spectrometer equipped with high-performance models as an upgraded analytical device for both standalone measurements and systems!
We would like to introduce the lineup of Tokyo Electric, which enables diverse mass spectrometry. Specifically, the following types of mass analysis will be possible. 【Features】 ■ Ultra-trace gas analysis at E-15 Pa·m3/sec ■ High-precision mass analysis at E-13 Pa range under ultra-high vacuum ■ High-precision measurement of elements and compounds ■ Real-time analysis at atmospheric pressure (such as exhaled air and combustion gases) *For detailed mechanisms of diverse and high-precision mass analysis, please download the PDF for more information.
Inquire About This Product
basic information
■Extreme and ultra-high precision mass spectrometry in vacuum ■Surface analysis ■Degradation of semiconductor devices and gas emission ■Gas analysis generated by optical and electrical stimulation ■Trace gas analysis (TDS/Out Gas) ■Gas analysis of sealed devices/MEMS and leak testing at E-15Pa·m3/s level ■Helium permeability testing of glass and micro-bubble gas analysis ■Low pressure analysis (exhalation, combustion gas, catalytic reaction) *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（8）
Download All Catalogs
News about this product（1）
Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.