Significant reduction in gas emissions due to low-cost power consumption and cooling of the ion source! XHV gas analysis, which is difficult to measure with a typical quadrupole residual gas analyzer, is now possible!
"WATMASS" is an ultra-low gas release residual gas analyzer (mass spectrometer) that has improved its ion source to perform high-precision residual gas analysis in the range of 10^-7 to 10^-13 Pa. By adopting a thermal cathode ion source and a sensor nipple tube (ICF70) made of 0.2% BeCu with low radiation and high thermal conductivity, it significantly reduces gas release through low power consumption and cooling of the ion source. Additionally, by manufacturing the grid from a platinum-iridium (Pt-Ir) alloy, it reduces ESD gas release. A thorough low gas treatment using an electric furnace eliminates hydrogen emissions and forms a Be oxide layer. 【Application Examples】 ■ High-precision mass analysis in XHV/UHV ■ Surface analysis ■ Degradation and gas release of semiconductor devices ■ Gas analysis (mass spectrometry) generated by light stimulation and electron stimulation ■ Trace gas analysis (TDS/Out Gas) ■ Mass analysis of sealed devices/MEMS and leak testing at the level of 10^-17 Pa·m³/s ■ Helium permeability testing of glass and microbubble gas analysis *For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications (Partial)】 ■Mass range: 100, 200, 300 amu ■Detector type: FC/EM ■Ionization energy: 70 eV ■Filament type: Y2O3-Ir dual filament ■Sensitivity: 1.0 x 10^-6 A/Pa or higher (100 amu FC Sensor) ■Minimum detection speed: 1.8 msec ■Operating temperature: 200°C (FC), 150°C (EM) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.